• 제목/요약/키워드: Coated layer

검색결과 1,806건 처리시간 0.031초

Mo 하지층의 첨가원소(Ti) 농도에 따른 Cu 박막의 특성 (Characteristic of Copper Films on Molybdenum Substrate by Addition of Titanium in an Advanced Metallization Process)

  • 홍태기;이재갑
    • 한국재료학회지
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    • 제17권9호
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    • pp.484-488
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    • 2007
  • Mo(Ti) alloy and pure Cu thin films were subsequently deposited on $SiO_2-coated$ Si wafers, resulting in $Cu/Mo(Ti)/SiO_2$ structures. The multi-structures have been annealed in vacuum at $100-600^{\circ}C$ for 30 min to investigate the outdiffusion of Ti to Cu surface. Annealing at high temperature allowed the outdiffusion of Ti from the Mo(Ti) alloy underlayer to the Cu surface and then forming $TiO_2$ on the surface, which protected the Cu surface against $SiH_4+NH_3$ plasma during the deposition of $Si_3N_4$ on Cu. The formation of $TiO_2$ layer on the Cu surface was a strong function of annealing temperature and Ti concentration in Mo(Ti) underlayer. Significant outdiffusion of Ti started to occur at $400^{\circ}C$ when the Ti concentration in Mo(Ti) alloy was higher than 60 at.%. This resulted in the formation of $TiO_2/Cu/Mo(Ti)\;alloy/SiO_2$ structures. We have employed the as-deposited Cu/Mo(Ti) alloy and the $500^{\circ}C-annealed$ Cu/Mo(Ti) alloy as gate electrodes to fabricate TFT devices, and then measured the electrical characteristics. The $500^{\circ}C$ annealed Cu/Mo($Ti{\geq}60at.%$) gate electrode TFT showed the excellent electrical characteristics ($mobility\;=\;0.488\;-\;0.505\;cm^2/Vs$, on/off $ratio\;=\;2{\times}10^5-1.85{\times}10^6$, subthreshold = 0.733.1.13 V/decade), indicating that the use of Ti-rich($Ti{\geq}60at.%$) alloy underlayer effectively passivated the Cu surface as a result of the formation of $TiO_2$ on the Cu grain boundaries.

3차원 FDTD Simulation을 이용한 자기조립된 Ag 나노입자의 국소표면플라즈몬공명 상호작용 현상 연구 (Localized Surface Plasmon Resonance Coupling in Self-Assembled Ag Nanoparticles by Using 3-Dimensional FDTD Simulation)

  • 이경민;윤순길;정종율
    • 한국재료학회지
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    • 제24권8호
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    • pp.417-422
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    • 2014
  • In this study, we investigated localized surface plasmon resonance and the related coupling phenomena with respect to various geometric parameters of Ag nanoparticles, including the size and inter-particle distance. The plasmon resonances of Ag nanoparticles were studied using three-dimensional finite difference time domain(FDTD) calculations. From the FDTD calculations, we discovered the existence of a symmetric and an anti-symmetric plasmon coupling modes in the coupled Ag nanoparticles. The dependence of the resonance wavelength with respect to the inter-particle distance was also investigated, revealing that the anti-symmetric mode is more closely correlated with the inter-particle distance of the Ag nanoparticles than the symmetric mode. We also found that higher order resonance modes are appeared in the extinction spectrum for closely spaced Ag nanoparticles. Plasmon resonance calculations for the Ag particles coated with a $SiO_2$ layer showed enhanced plasmon coupling due to the strengthened plasmon resonance, suggesting that the inter-particle distance of the Ag nanoparticles can be estimated by measuring the transmission and absorption spectra with the plasmon resonance of symmetric and anti-symmetric localized surface plasmons.

비염증성 치은증식증의 상피 및 상피하조직내 세포변화에 관한 면역조직화학적 연구 (AN IMMUNOHISTOCHEMICAL STUDY ON THE CELLULAR CHANGE IN EPITHELIUM AND SUBEPITHELIAL TISSUE OF NON-INFLAMMATORY GINGIVAL HYPERPLASIA)

  • 최영욱;한경윤
    • Journal of Periodontal and Implant Science
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    • 제23권3호
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    • pp.605-621
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    • 1993
  • The gingival hyperplasia refers to an increase in the size of the gingival tissue produced by an increase in the number of its component cells. In order to investigate the cellular change in epithelium and subepithelial tissue of noninflammatory gingival hyperplasia, the gingival tissues were surgically obtained from the patients with dilantin gingival hyperplasia and idiopathic gingival hyperplasia. The excised tissue samples were fixed in neutral formalin for 6-24 hours, embedded with paraffin, sectioned at $4-6{\mu}m$ in thickness, mounted on glass slides coated with 3-aminopropyltriethoxysilane(Sigma Chemical Co., St. Louis, MO, U.S.A.) and immunocytochemically processed by Avidin-Biotin peroxidase complex method for detecting proliferating cell nuclear antigen, tenascin and collagen type IV. Monoclonal mouse anti-human PCNA antibody(Oncogene Science, Uniondale, NY, U.S.A., 1 : 250,000), monoclonal mouse anti-human tenascin antibody(Chemicon-International Inc., Temecula, CA, U.S.A., 1:5,000), and monoclonal mouse anti-human collagen type IV(Dakopatts, Glostrup, Denmark, 1: 50) were used as primary antibodies. The results were as follows: 1. In non-inflammatory gingival hyperplasia, the positive reaction to proliferating cell nuclear antigen was localized in the basal cell layer of gingival epithelium and well-developed rete pegs. 2. The positive reaction to tenascin was shown in the connective tissue subjacent to basament membrane of gingival tissue, and especially strong positive reaction was noted in the tip portion of connective tissue projections. 3. The positive reaction to collagen type IV was localized along the basement membranes of gingival epithelium and blood vessels. The results suggest that connective tissue enlargement may affect the proliferation of gingival epithelium.

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Siloxane 유-무기 복합막 제조와 투과증발법을 이용한 Acetone-Butanol-Ethanol (ABE) 용액에서 부탄올의 분리 (Preparation of Organic/Inorganic Siloxane Composite Membranes and Concentration of n-butanol from ABE Solution by Pervaporation)

  • 지기용;이용택
    • Korean Chemical Engineering Research
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    • 제51권5호
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    • pp.580-586
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    • 2013
  • 본 연구에서는 투과증발 공정에서 지지체에 따른 투과특성의 차이를 알아보기 위해 고분자 지지체 복합막과 세라믹 지지체 복합막을 제조하였다. 고분자 지지체로는 polyvinylidene fluoride (PVDF)를 사용하였으며 세라믹 지지체로는 $a-Al_2O_3$ 를 사용하였다. 활성층으로는 각각의 지지체에 고무상 고분자인 polydimethoxysilane (PDMS)를 코팅하였다. 제조한 복합막의 구조와 특성을 살펴보기 위해 SEM, contact angle, XPS로 분석하였으며, 이를 투과증발 공정에 적용하여 다성분계의 혼합용액에서 복합막의 지지체에 따른 투과 특성을 알아보았다. 투과 증발 실험 결과 세라믹 지지체 복합막의 투과 플럭스는 $250.87g/m^2h$로 고분자 지지체 복합막의 $159.64g/m^2h$ 보다 높은 투과 플럭스를 나타내었다. 그러나 선택도의 경우 고분자 지지체 복합막이 31.98로 20.66인 세라믹 지지체 복합막보다 더 높게 나타나는 것을 확인하였다.

플라즈마 중합에 의한 타이어 코드의 접착성 향상연구 (Enhanced Adhesion of Tire Cords via Plasma Polymerizations)

  • 김륜관;강현민;손봉영;한민현;윤태호
    • Elastomers and Composites
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    • 제34권2호
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    • pp.128-134
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    • 1999
  • 타이어 코드용 강철선을 RF 플라즈마를 이용한 acetylene 및 butadiene 가스의 플라즈마 중합으로 코팅하였으며, 타이어용 고무와의 접착력을 TCAT 또는 T-test로 측정하였다. 강철선의 접착력은 사용된 gas, plasma power, 코팅시간 및 가스 압력에 따라 측정하였으며, 플라즈마 중합에 앞서 Ar 플라즈마 에칭으로 타이어 코드를 세척하였다. 또한 $80^{\circ}C$의 증류수에서 7일간 노화시켜 접착력 저하를 고찰하였으며, 접착력 시험 후 타이어 코드 표면을 SEM으로 분석하여 파괴거동을 규명하고자 하였다. 가장 우수한 접착력은 acetylene의 경우 20W, 2분, 25mtorr에서, 그리고 butadiene의 경우는 l0W, 4분, 25mtorr에서 얻을 수 있었으며, Ar 에칭에 의한 접착력 변화는 없었다. 노화에 의한 접착력 저하는 없었으며, 도리어 증가하는 현상을 보였다. SEM 분석에서 강철선의 높은 거칠기와 플라즈마 코팅의 얇은 두께로 인하여 파괴거동 규명에는 한계가 있었다.

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Silver Nanowire 기반 Stretchable 투명 전극 (Silver Nanowire-based Stretchable and Transparent Electrodes)

  • 이진영;김수연;정다혜;신동균;유수호;서화일;박종운
    • 반도체디스플레이기술학회지
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    • 제14권3호
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    • pp.51-55
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    • 2015
  • We have fabricated silver nanowire (AgNW) films as a stretchable and transparent electrode on polydimethylsiloxane (PDMS) substrates using a spray coater. Inherently, they show poor surface roughness and stretchability. To tackle it, we have employed a conductive polymer, poly (3,4-ethylenedioxythiophene) : Poly(styrene sulfonate) (PEDOT : PSS). PEDTO : PSS solution is mixed with AgNWs or spin-coated on the AgNW film. Compared with AgNW film only, PEDOT : PSS film only, and polymer-mixed AgNW films, the AgNW/polymer bilayer films exhibit much better surface roughness and stretchability. It is found that spray-coating of AgNWs on uncured PDMS and spin-coating of PEDOT : PSS solution on the AgNW films enhance the surface roughness of electrodes. Such a bilayer structure also provides a stable resistance under tensile strain due to the fact that each layer acts as a detour route for carriers. With this structure, we have obtained the peak-to-peak roughness ($R_{pv}$) as low as 76.8nm and a moderate increase of sheet resistance (from $10{\Omega}/{\Box}$ under 0% strain to $30{\Omega}/{\Box}$ under 40% strain).

은 나노 입자가 코팅된 인공경량골재의 생물오손 방지 특성 (Anti-biofouling properties of silver nano-particle coated artificial light-weight aggregates)

  • 김성열;김유택;박용준
    • 한국결정성장학회지
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    • 제25권5호
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    • pp.212-217
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    • 2015
  • 본 연구는 해상 양식장 내에 유해 조류로 인해 발생하는 수산 동, 식물의 폐사를 막고, 양식장을 주기적으로 정화하는 폰툰 시스템 내의 멤브레인 층(Membrane Layer)의 생물오손(Biofouling)을 막고자, ML에 적용되는 인공경량골재 및 골재의 구조에 따른 미생물 흡착을 비교하고자 지오폴리머에 은 나노 입자를 코팅하여 생물오손 정도를 확인하고 그 능력을 평가하였다. 이후 코팅에 따른 미생물 기능 억제 능력을 확인하고자 항균 테스트를 실시하였으며, 한국해양과학기술원 남해연구소 앞바다에 설치하여 생물오손 정도와 무게변화율을 관찰하였다. 항균 테스트 결과 은 나노 입자를 코팅한 인공경량골재에서 99.99 %의 세균 감소율을 확인하였으며, 생물오손 정도를 관찰한 결과 2개월부터 은 나노 입자의 효과에 의해 생물오손 정도가 억제되는 것을 확인하였다. 은 나노 입자 코팅에 의한 생물오손 억제기간은 인공경량골재에서 5개월, 지오폴리머에서 3개월 미만으로 나타났으며, 따라서 은 나노 입자가 코팅된 인공경량골재가 효과적으로 생물오손을 감소시킬 수 있는 친환경적이며 효과적인 방법임을 알 수 있었다.

Synthesis of Silica Membranes on a Porous Stainless Steel by Sol-Gel Method and Effect of Preparation Conditions on Their Permselectivity

  • Lee, Dong-Wook;Nam, Seung-Eun;Sea, Bong-Kuk;Ihm, Son-Ki;Lee, Kew-Ho
    • Bulletin of the Korean Chemical Society
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    • 제25권9호
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    • pp.1371-1378
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    • 2004
  • A porous stainless steel (SUS) as a substrate of silica composite membranes for hydrogen purification was used to improve mechanical strength of the membranes for industrial application. The SUS support was successfully modified by using submicron Ni powder, $SiO_2$ sols with particle size of 500 nm and 150 nm in turns. Silica top layer was coated on the modified supports under various preparation conditions such as calcination temperature, dipping time and repeating number of dipping-drying process. The calcination temperature for proper sintering was between H ttig temperature and Tamman temperature of the coating materials. Maximum hydrogen selectivity was investigated by changing dipping time. As repeating number of dipping-drying process increased, permeances of nitrogen and hydrogen were decreased and $H_2/N_2$ selectivity was increased due to the reduction of non-selective pinholes and mesopores. For the silica membrane prepared under optimized conditions, permeance of hydrogen was about $3\;{\times}\;10^{-5}\;cm^3{\cdot}cm^{-2}{\cdot}s^{-1}{\cdot}cmHg^{-1}$ combined with $H_2/N_2$ seletivity of about 20.

해양환경 하에서 Ni-Cr계 자용성 합금 코팅된 ALBC3 합금의 캐비테이션 특성 평가 (Evaluation of Cavitation Characteristics for ALBC3 Alloy Coated with Ni-Cr Series Self Fluxing Alloy in Marine Environment)

  • 이승준;김성종
    • 해양환경안전학회지
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    • 제19권5호
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    • pp.538-544
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    • 2013
  • 본 연구에서는 ALBC3 합금에 Ni기 자용성 합금으로 내마모성 및 내캐비테이션 특성을 향상시키기 위하여 용사코팅 후 열처리를 실시하여 캐비테이션 특성을 평가하였다. 본 연구 결과, 자용성 합금 코팅층이 높은 경도를 나타내어 내마모성이 우수할 것으로 판단되나, 다공질의 조직으로 인해 열악한 내캐비테이션 특성을 나타냈다. 따라서 열처리 조건의 최적화가 중요하며, 본 조건에서는 열처리 온도를 높여 자용성 합금 내 B와 Si의 유동성을 증가시킴으로써 기공이나 결함을 제거하여 특성개선 효과를 기대할 수 있을 것으로 판단된다.

Surface reactive micro/nano particles on inorganic oxygen separation membrane

  • Lee, Kee-Sung;Shin, Tae-Ho;Lee, Shiwoo;Woo, Sang-Kuk;Yang, Jae-Kyo;Choa, Yong-Ho
    • 한국막학회:학술대회논문집
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    • 한국막학회 2004년도 Proceedings of the second conference of aseanian membrane society
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    • pp.94-97
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    • 2004
  • Micro/nano-sized L $a_{0.6}$S $r_{0.4}$Co $O_{3-}$$\delta$/ particles are considered to improve oxygen permeability in highly selective inorganic oxygen separation membrane. A L $a_{0.7}$S $r_{0.3}$G $a_{0.6}$F $e_{0.4}$ $O_{3-}$$\delta$/ membrane with perovskite structure is fabricated by a conventional solid-state reaction. As the oxygen permeation flux of the L $a_{0.7}$S $r_{0.3}$G $a_{0.6}$F $e_{0.4}$ $O_{3-}$$\delta$/ membrane was lower than commercial gas separation membranes, we coated the L $a_{0.6}$S $r_{0.4}$Co $O_{3-}$$\delta$/ particles to enhance the oxygen permeation flux. It has been demonstrated that the effective area of reactive free surface is an important factor in determining the effectiveness of the introduction of coating layer for oxygen permeation. The introduction of micro/nano L $a_{0.6}$S $r_{0.4}$Co $O_{3-}$$\delta$/ particles was very effective for increasing oxygen flux, as the flux was as much as 2 to 6 times higher than that of an uncoated L $a_{0.7}$S $r_{0.3}$G $a_{0.6}$F $e_{0.4}$ $O_{3-}$$\delta$/ membrane.\delta$/ membrane.>/ membrane.brane.

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