• Title/Summary/Keyword: Co-sputtering

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A Study on Corrosion CoCrMo Magnetic Thin Films (CoCrMo 자성박막의 부식에 관한 연구)

  • 남인탁;홍양기
    • Journal of the Korean Magnetics Society
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    • v.3 no.3
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    • pp.221-228
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    • 1993
  • The general requirements of recording media include recording performance, environmental stability, runnability on the drive or deck, and manufacturability. CoCrMo thin films were prepared using RF sputtering system for a study on chemical stability. Surface degradation of the CoCrMo thin film was studied by SEM, XPS and AES. Surface degradation was found to be dependent of sputtering condition and Mo content. Addition of Mo to CoCr thin film improved dramatically its surface degradation resistance in dilute sulfuric acid, as indicated by active-passive transition appeared in electrochemical polarization curve. Futhermore, the passive current density was decreased with increasing Mo content. The reduction in a number density of corrosion sites by Mo addition vms observed, after accelerated corrosion test. AES survey indicated that corrosion occured on the site with Cr depletion and highly concentrated chloride ions.

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Electrode Properties of Thin Film Battery with LiCoO2 Cathode Deposited by R.F. Magnetron Sputtering at Various Ar Partial Pressures (R.F. 마그네트론 스퍼터링을 이용한 LiCoO2 양극활물질의 Ar 증착분압에 따른 박막전지 전극 특성)

  • Park, H.Y.;Lim, Y.C.;Choi, K.G.;Lee, K.C.;Park, G.B.;Kwon, M.Y.;Cho, S.B.;Nam, S.C.
    • Journal of the Korean Electrochemical Society
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    • v.8 no.1
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    • pp.37-41
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    • 2005
  • We investigated the electrochemical properties and microstructure on the various argon deposition pressure $(P_{Ar})$ and the low annealing temperature $(400^{\circ}C)$ of $LiCoO_2$ cathodes, which deposited by R.F. magnetron sputtering. The microsuucture and composition of Lico02 thin film was changed as a function of $P_{Ar}$. The capacity and electrochemical properties were improved with Ph of $LiCoO_2$ thin films. The cycling reversibility and stability of thin film batteries were measured by cyclic voltammetry and the constant current charge-discharge. The physical properties of cathode films were analyzed by ICP-AES, XRD, SEM and AFM for composition, crystallization and surface morphology.

Magnetic Properties of Al-Co-N Thin Films Dispersed with Co Particles

  • Han, Chang-Suk
    • Journal of the Korean Society for Heat Treatment
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    • v.21 no.1
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    • pp.3-9
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    • 2008
  • Al-Co-N thin films, Al-Co-N/Al-N and Al-Co-N/Al-Co multilayers containing various amounts of Co content were deposited by using a two-facing targets type dc sputtering (TFTS) system. The films were also annealed successively and isothermally at different annealing temperatures. Irrespective of Co content and preparation methods, all the as-deposited films were observed non-magnetized. It was found that annealing conditions can control the magnetic and electrical properties as well as the microstructure of the films.

The Study on Formation of Pt-Co Alloy Thin Films for RTD Temperature Sensors (측온저항체 온도센서용 Pt-Co 합금박막의 형성에 관한 연구)

  • Kim, Seo-Yeoun;Noh, Sang-Soo;Choi, Young-Kyu;Chung, Gwiy-Sang
    • Proceedings of the KIEE Conference
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    • 1997.07d
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    • pp.1485-1487
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    • 1997
  • Platinum-Cobalt alloy thin films were deposited on $Al_2O_3$ substrates by co sputtering for RTD temperature sensors. We made Pt-Co alloy resistance patterns on $Al_2O_3$ substrate by lift-off method and investigated the physical and electrical characteristics of these films under sputtering conditions (; the input power, working vacuum), annealing conditions (; temperature, time) and also after annealing these films. After the annealing treatment at $800^{\circ}C$ for 60min, the resistivity and sheet resistivity of Pt-Co thin films was $0.0302{\mu}{\Omega}{\cdot}cm$ and $0.1{\Omega}/{\square}$, respectively, and the TCR value of Pt-Co RTD was $3600ppm/^{\circ}C$ in the temperature range of $25{\sim}400^{\circ}C$. These results indicate that Pt-Co thin films have potential for the excellent RTD temperature sensors.

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Microstructure and Magnetic Properties of Zn1-xCoxO Film Prepared by Pulsed DC Magnetron Sputtering (펄스 DC 마그네트론 스퍼터링법에 의한 Zn1-xCoxO 박막의 미세조직 및 자기적 특성)

  • Ko, Yoon-Duk;Ko, Seok-Bae;Choi, Moon-Soon;Tai, Weon-Pil;Kim, Ki-Chul;Kim, Jong-Min;Soh, Su-Jeung;Kim, Young-Sung
    • Journal of the Korean Ceramic Society
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    • v.42 no.3 s.274
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    • pp.211-217
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    • 2005
  • [ $Zn_{1-x}Co_{x}O$ (x=0-0.3) films were grown on Corning 7059 glasses by asymmetrical bipolar pulsed dc magnetron sputtering. The c-axis orientation along (002) plane was enhanced with increasing Co concentration. The $Zn_{1-x}Co_{x}O$ films are grown with fibrous grains of tight dome shape. The transmittance spectra measured from UV-visible showed that sp-d exchange interactions and typical d-d transitions become activated with increasing Co concentration. The electrical resistivity of $Zn_{1-x}Co_{x}O$ films increased with increasing Co concentration, especially it increased greatly at $30at\% Co. X-ray photoelectron spectroscopy and alternating gradient magnetometer analyses indicated that no Co metal cluster is formed and the ferromagnetic properties are exhibited. The low electrical resistivity and room temperature ferromagnetism of $Zn_{1-x}Co_{x}O$ thin films suggested the possibility of the application to Diluted Magnetic Semiconductors (DMSs).