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http://dx.doi.org/10.4191/KCERS.2005.42.3.211

Microstructure and Magnetic Properties of Zn1-xCoxO Film Prepared by Pulsed DC Magnetron Sputtering  

Ko, Yoon-Duk (Advanced Material Process of Information Technology, Sungkyunkwan University)
Ko, Seok-Bae (Advanced Material Process of Information Technology, Sungkyunkwan University)
Choi, Moon-Soon (Advanced Material Process of Information Technology, Sungkyunkwan University)
Tai, Weon-Pil (Institute of Advanced Materials, Inha University)
Kim, Ki-Chul (Electronics and Telecommunications Research Institute)
Kim, Jong-Min (APRO Co. Ltd.)
Soh, Su-Jeung (Advanced Material Process of Information Technology, Sungkyunkwan University)
Kim, Young-Sung (Advanced Material Process of Information Technology, Sungkyunkwan University)
Publication Information
Journal of the Korean Ceramic Society / v.42, no.3, 2005 , pp. 211-217 More about this Journal
Abstract
[ $Zn_{1-x}Co_{x}O$ (x=0-0.3) films were grown on Corning 7059 glasses by asymmetrical bipolar pulsed dc magnetron sputtering. The c-axis orientation along (002) plane was enhanced with increasing Co concentration. The $Zn_{1-x}Co_{x}O$ films are grown with fibrous grains of tight dome shape. The transmittance spectra measured from UV-visible showed that sp-d exchange interactions and typical d-d transitions become activated with increasing Co concentration. The electrical resistivity of $Zn_{1-x}Co_{x}O$ films increased with increasing Co concentration, especially it increased greatly at $30at\% Co. X-ray photoelectron spectroscopy and alternating gradient magnetometer analyses indicated that no Co metal cluster is formed and the ferromagnetic properties are exhibited. The low electrical resistivity and room temperature ferromagnetism of $Zn_{1-x}Co_{x}O$ thin films suggested the possibility of the application to Diluted Magnetic Semiconductors (DMSs).
Keywords
DC magnetron sputtering; Ferromagnetism; Ferromagnetism;
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