• Title/Summary/Keyword: Co oxide

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The effect of abrasive size and shape on W CMP (W CMP 공정에서 abrasive size 와 shape 영향성)

  • Park, Joon-Sang;Park, Jung-Hun;Lee, Jae-Dong;Hong, Chang-Ki;Cho, Han-Ku;Moon, Joo-Tae;Ryu, Byoung-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07a
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    • pp.243-246
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    • 2004
  • W CMP 공정에서 abrasive 의 size 및 shape 에 따른 CMP 거동에 대해 관찰하였으며, 주요 제거 막질인 W 막질과 stopping layer 로 사용되는 Oxide 막질에 대한 압력(P)과 상대 속도(V) 영향성을 관찰하였다. CMP 제거량이 입자의 size 변화에 의존한다는 기존의 이론과는 달리 응집도(aggregate ratio) 변화가 주요 변수임을 밝혀 내었다. 한편, 각 막질에 대한 P,V 영향성 평가를 통해, 변형된 Prestonian equation 이 abrasive size 및 shape 에 상관없이 W 막질의 제거 거동을 설명하는데 중요한 역할을 수행함을 보였다. 그렇지만, W CMP 공정에서 stopping layer 로 사용되는 oxide 막질의 거동을 설명하는 데에는 어려움이 있었으며, 특히 P,V 에 의한 비선형적 removal rate(RR) 거동발생으로 인해 기존의 이론치와는 많은 차이를 나타내었다. 또한, abrasive size 와 shape 에 따라서도 복잡한 거동을 나타낸다.

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A Study of Nitric Oxide Oxidation Catalyst Using Non-noble Metals (비귀금속계 금속을 이용한 일산화질소 산화 촉매 연구)

  • Shin, JungHun;Hong, SungChang
    • Applied Chemistry for Engineering
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    • v.32 no.4
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    • pp.385-392
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    • 2021
  • In this study, impact of Co proportion and calcination temperature of ceria on the Co/CeO2 was analyzed by comparing nitrogen monoxide oxidation performance of various catalysts and their physico-chemical properties. The structural properties of each catalyst were studied by XRD and BET analysis, and the surface crystal states of cobalt were proposed according to the surface density. Oxidation states of elements were observed through Raman and XPS analysis, and the relationship between typical oxidation states and nitrogen monoxide oxidation performance was designed. Through H2-TPR, oxygen-transferring capacity due to changes in the characteristics of catalysts were identified, and activation sites (Co3+) for oxidation were suggested.

CO Oxidation Over Manganese Oxide Catalysts: Effect of Calcination Temperature (망간 산화물 촉매상에서 일산화탄소의 산화반응 : 소성온도의 영향)

  • Park, Jung-Hyun;Kim, Yun-Jung;Cho, Kyung-Ho;Kim, Eui-Sik;Shin, Chae-Ho
    • Clean Technology
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    • v.17 no.1
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    • pp.41-47
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    • 2011
  • [ $MnO_2$ ]catalysts were prepared by precipitation method using potassium manganate and manganese acetate. The effect of calcination temperatures of $MnO_2$ catalysts for CO oxidation has been studied and their physicochemical properties were studied by X-ray diffraction (XRD), $N_2$ sorption, temperature programmed reduction of $H_2$ ($H_2-TPR$), and temperature programmed desorption of CO (CO-TPD) techniques. $MnO_2$ calcined at $300^{\circ}C$ catalyst has a large surface area $181m^2/g$ having a narrow pore size distribution at 9 nm. The results of XRD and $H_2-TPR$ showed that the catalysts calcined at different temperatures showed mixed oxidation states of Mn such as $Mn^{4+}$ and $Mn^{3+}$. CO-TPD showed that the quantity of $CO_2$ desorbed was decreased with increasing the calcination temperatures. The catalytic activity over the catalyst calcined at $300^{\circ}C$ exhibited the highest conversion reaching to 100% at $200^{\circ}C$. $H_2O$ vapor showed an inhibiting effect on the efficiency of the catalyst because of co-adsorption with CO on the active sites of manganese oxide catalysts and the initial catalytic activity of CO oxidation could be regenerated by removing $H_2O$ vapor in the reactants.

Neuronal Nitric Oxide Synthase-Immunoreactive Neurons In the Hamster Visual Cortex: Lack of Co-localization with Parvalbumin (햄스터 시각피질에서 Neuronal nitric oxide synthase-면역반응성 뉴런: parvalbumin과의 co-localization 부재)

  • Jin Mi-Joo;Lee Jee-Eun;Ye Eun-Ah;Jeon Chang-Jin
    • Journal of Life Science
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    • v.15 no.3 s.70
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    • pp.344-351
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    • 2005
  • Nitric oxide (NO) and calcium-binding proteins occur in various types of cells in the central nervous system. They are important signaling and calcium buffering molecules, respectively. In the present study, using immunocytochemistry we examined the distribution and the co-localization pattern of neurons containing neuronal nitric oxide synthase (nNOS) and parvalbumin in the visual cortex of hamster. The overall number of parvalbumin-immunoreactive (IR) neurons was 17 times higher than that of the nNOS-IR neurons in the hamster visual cortex. The highest differences were found in layer V, where parvalbumin-IR neurons were 54.7 times more abundant than nNOS-IR neurons. Many nNOS- and parvalbumin-IR neurons were similar in size, shape, and manner of distribution in the visual cortex. However, two-color immunofluorescence revealed that no neurons in the hamster visual cortex expressed both nNOS and parvalbumin. The present results indicate that there are subtle species differences in the co-localization pattern between nNOS and calcium-binding proteins. The present results also suggest not only the heterogeneity and functional diversity of nNOS-IRneurons in the visual cortex, but also the importance of understanding animal diversity

Coupling Reaction of CO2 with Epoxides by Binary Catalytic System of Lewis Acids and Onium Salts

  • Bok, Taekki;Noh, Eun Kyung;Lee, Bun Yeoul
    • Bulletin of the Korean Chemical Society
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    • v.27 no.8
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    • pp.1171-1174
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    • 2006
  • Various off-the-shelf Lewis acids in conjunction with various onium salts are screened for coupling reaction of $CO_2$ with epoxides. Among the tested ones, $VCl_3/n-Bu_4NOAc$, $VCl_3/(n-Bu_4NCl$ or PPNCl), $FeCl_3/ n-Bu_4NOAc$, and $FeCl_3/ n-Bu_4NOAc$are proved to be highly active. Propylene oxide, epichlorohydrin, styrene oxide, and cyclohexene oxide can be converted over 90% yields to the corresponding cyclic carbonates without the use of organic solvents under mild conditions by 0.1-1.0 mol% catalyst charge.

Enhancement of Thermomechanical Properties of Poly(D, L-lactic-co-glycolic acid) and Graphene Oxide Composite Films for Scaffolds

  • Yoon, Ok-Ja;Sohn, Il-Yung;Kim, Duck-Jin;Lee, Nae-Eung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.548-548
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    • 2012
  • Thermomechanical and surface chemical properties of composite films of poly(D, L-lactic-co-glycolic acid) (PLGA) were significantly improved by the addition of graphene oxide (GO) nanosheets as nanoscale fillers to the PLGA polymer matrix. Enhanced thermomechanical properties of the PLGA/GO (2 wt.%) composite film, including an increase in the crystallization temperature and reduction in the weight loss, were observed. The tensile modulus of a composite film with increased GO fraction was presumably enhanced due to strong chemical bonding between the GO nanosheets and PLGA matrix. Enhanced hydrophilicity of the composite film due to embedded GO nanosheets also improved the biocompatibility of the composite film. Improved thermomechanical properties and biocompatibility of the PLGA composite films embedded with GO nanosheets may be applicable to biomedical applications such as scaffolds.

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Thermomechanical Properties of Poly(D, L-actic-co-glycolic acid) and Graphene Oxide Nanocomposite for Scaffolds

  • Sohn, Il-Yung;Yoon, Ok-Ja;Kim, Duck-Jin;Lee, Nae-Eung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.478-478
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    • 2011
  • The thermomechanical and surface chemical properties of nanocomposite of poly( D, L-actic-co-glycolic acid) (PLGA) were improved significant due to concentration of graphene oxide (GO) nanosheets as nanoscale fillers to PLGA film. Thermomechanical properties of the PLGA/GO (2wt.-%.) nanocomposite were decreased crystallization and melting temperature, weight loss. The storage and loss moduli of the nanocomposite were enhanced by chemical bonding between the oxygenated functional groups of the GO nanosheets and the polymer chains in the PLGA matrix. Enhanced hydrophilicity of nanocomposite caused by embedded GO nanosheets also improved for good biocompatibility. Our findings indicate that thermomechanical properties and biocompatibility of nanocomposite embedded with GO nanosheets are attractive candidates for use in biomedical applications such as scaffolds.

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Preparation and characterization of high transmittance and low resistance index matched transparent conducting oxide coated glass for liquid crystal on silicon panel

  • Jang, Chang-Young;Paik, Woo-Sung;Choi, Bum-Ho;Kim, Young-Back;Lee, Jong-Ho
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.1415-1417
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    • 2009
  • High transmittance and low resistance index matched transparent conducting oxide (IMTCO) coated glass was prepared and characterized. IMTCO was deposited by RF magnetron sputtering with the thickness of 15nm and 90nm thick anti-reflection layer was evaporated. To modify surface to hydrophilic, in-situ plasma treatment was also performed. IMTCO coated glass exhibited 96.6% of transmittance in the wavelength range of 400~700nm which is relatively high value compared to commercially available IMTCO glass. The sheet resistance uniformity was measured to be 1.53%.

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Component Profile Analysis of Irradiated Korean White Ginseng Powder (방사선 조사 인삼의 성분변화에 관한 분석)

  • 한병훈;한용남
    • Journal of Ginseng Research
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    • v.19 no.2
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    • pp.138-143
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    • 1995
  • Currently, some food materials are disinfected by $\gamma$-irradiation (using Co-60) or ethylene oxide treatment. These treatments were applied to ginseng powder and the ginseng components such as ginsenosides, polyacetylenes and phenolic acids were analyzed by HPLC to determine any compositional changes due to irradiation. No appreciable difference was observed in the HPLC pattern of ginsenosides, polyacetylenes of ginseng powder after 10 key irradiation or ethylene oxide treatment (EO $CO_2$= 3 : 7, w/wfb) from those of untreated fresh ginseng powder when they were analyzed soon after treatments. When the ginseng powders were stored at room temperature for three years after the same treatment, the HPLC patterns of polyacetylenes and phenolic acid fraction showed appreciable change from those of fresh ginseng powder, however, the HPLC patterns of three year old samples did not show any appreciable difference.

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