• 한국산업보건학회지
• /
• 제33권4호
• /
• pp.427-438
• /
• 2023

Objectives: This study aims to create a safer working environment by examining the working environment of cleanroom cleaning workers through a survey and comparing the differences in perception between workers and managers. Methods: The survey was written based on the working environment and the safety and health management system. In order to improve the quality of the study, we visited the sites in person and conducted an in-depth interview. SPSS Statistics 26 (IBM, USA) was used to analyze the data. Results: Based on the survey, differences were found in chemical used, MSDS sharing methods, risk factors during cleaning work, work environment measurement results, special health examination items, places considered dangerous, and work. Conclusions: It is necessary that there be different work environments and risk factors for cleanroom cleaning workers at respective workplaces. As a result of the survey, there was found to be a difference in perception between workers and managers, and both workers and managers should try to reduce this difference.

• 한국정밀공학회지
• /
• 제19권8호
• /
• pp.7-15
• /
• 2002

• 한국대기환경학회:학술대회논문집
• /
• 한국대기환경학회 2001년도 추계학술대회 논문집
• /
• pp.54-55
• /
• 2001

반도체 산업에서 메모리의 고집적화, 회로 패턴의 미세화에 따라 클린룸 공기중에 존재하는 분자상오염 물질 (Airborne Molecular Contaminants, AMCs)이 제조공정에 미치는 영향이 매우 중요하게 대두되었다$^{1)}$ . 분자상 오염물질은 입자상 오염물질과 달리 외관상 관찰이 어려우며, 오염 종류와 형태가 원소의 종류에 따라 매우 다양하게 나타난다. 클린룸에서의 입자상 오염물질은 고효율 필터(HEPA, ULPA)를 사용하여 제거 관리하고 있으나, 분자상 오염물질은 종류 및 형태조차 파악하지 못하고 있다. (중략)

• 대한설비공학회:학술대회논문집
• /
• 대한설비공학회 2003년도 하계학술대회 논문집
• /
• pp.3-3
• /
• 2003

• 한국대기환경학회:학술대회논문집
• /
• 한국대기환경학회 2002년도 추계학술대회 논문집
• /
• pp.70-71
• /
• 2002

암모니아 가스는 일반환경에서 뿐만 아니라 첨단 산업인 반도체 제조공정에서도 가장 주목하여 관리하여야 할 대상이다. 반도체 공정에서 암모니아 가스는 T-Topping, 광학 현미경의 헤이즈 현상 등을 일으키는 원인으로써 꾸준한 농도 관리가 요구되고 있다. 또한 관리 기준 농도가 점점 강화되면서 일부 공정에서는 sub ppbv까지 신뢰성 있는 측정치 요구되고 있다. 현재 클린룸에서의 암모니아 농도 관리는 일부 자동화 기기를 사용하고 있으나, 대부분의 경우 임핀저 샘플링을 이용한 불연속적인 농도 관리가 이루어지고 있다. (중략)

• 대한설비공학회:학술대회논문집
• /
• 대한설비공학회 2007년도 동계학술발표대회 논문집
• /
• pp.382-386
• /
• 2007

In this study, the qualitative prediction and evaluation of clean room being utilized for mass production of electrronic components have been performed with the help of flow simulation. Compared to the experimental analysis based on measurements of the number of particles, concentration of contaminants and flow characteristics, the numerical analysis used in this study is much cost-effective.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2007년도 춘계학술대회B
• /
• pp.3162-3167
• /
• 2007

The OPS (Optical Particle Sensor) using light scattering from the particles (real-time measurement without physical contact to the particles) can be used for cleanroom or atmospheric environment monitoring. For particles smaller than 300 nm, the detection efficiency becomes lower as scattered light decreases with particle size. To obtain higher detection efficiency with small particles, the flow field in particle chamber and the detection volume should be designed optimally to achieve maximum scattered light from the particles. In this study, a commercial computational fluid dynamics software FLUENT was used to simulate the gas flow field and particle trajectories with various optical chamber designs for 300 nm PSL particle. For estimation of laser viewing volume, we used a commercial computational optical design program ZEMAX. The results will be a great help in the development of OPS which can measure small particles with higher detection efficiency.

• 조명전기설비학회논문지
• /
• 제25권10호
• /
• pp.23-27
• /
• 2011

In this paper, material handing cleanroom stocker system for thin film solar cell line of photovoltaic industry and liquid crystal display line of flat panel display industry was selected for the study. Optimum solution for stocker system's CPS(Contactless Power Supply) is approached by changing the motion pattern, optimizing design & production, and analyzing characteristics of the power system. As a result, acceleration time of X-Axis changed from 3 sec to 4 sec, changed the input characteristic of CPS within approximately 11[kW]. This result shows that extending acceleration time of the X-Axis in Stocker Crane's motion pattern can reduce the capacity of the CPS, thus saving the manufacturing cost.

• 반도체디스플레이기술학회지
• /
• 제8권4호
• /
• pp.83-88
• /
• 2009

In this paper TRIZ was used to solve noise and dust reduction related to cable carrier chain system. On modern machines in a clean room, the contradictions arose due to increase noise and dust for the high speed were eliminated with 40 principles and seperation rules. As the results, the sound pressure level of the new carrier chain system was reduced to below 40 dB(A), and cleanroom classifications was satisfied with ISO class 4. In these successful results, TRIZ showed its usefulness in solving the design problems even with severe constraints.

• 설비공학논문집
• /
• 제16권9호
• /
• pp.820-827
• /
• 2004

The propulsion force acting on a wafer in an air levitation system was measured accurately and then, the corresponding force coefficient was determined. The theoretical propulsion force on the wafer bottom surface were obtained by CFD simulations and from these results the propulsion force coefficient was deduced. The transportation velocity of a wafer was estimated by using both experimental and numerical force coefficients, for various air velocity of nozzle injection. When the numerical results are compared to the experimental data, the numerical results agree well Quantitatively.