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Evaluation of a Propulsion Force Coefficients for Transportation of Wafers in an Air Levitation System  

문인호 (㈜신성이엔지 기술연구소)
황영규 (성균관대학교 기계공학부)
Publication Information
Korean Journal of Air-Conditioning and Refrigeration Engineering / v.16, no.9, 2004 , pp. 820-827 More about this Journal
Abstract
The propulsion force acting on a wafer in an air levitation system was measured accurately and then, the corresponding force coefficient was determined. The theoretical propulsion force on the wafer bottom surface were obtained by CFD simulations and from these results the propulsion force coefficient was deduced. The transportation velocity of a wafer was estimated by using both experimental and numerical force coefficients, for various air velocity of nozzle injection. When the numerical results are compared to the experimental data, the numerical results agree well Quantitatively.
Keywords
Cleanroom; Wafer; Clean tube; Propulsion force coefficient; Air levitation; Recovering; Track;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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