1 |
/
[
Chen, C.J.;Jaw, S.Y.
] /
Fundamentals of Turbulence Modeling
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2 |
<TEX>$N_2$</TEX> tunnel wafer transport system
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[
Toda, M.;Ohmi, T.;Kanno, Y.;Umeda, M.
] /
Proceedings-Institute of Environmental Sciences
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3 |
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[
Son, B.J.;Maeng, J.S.;Lee, S.H.
] /
Fluid Mechanics
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4 |
The revolution of semiconductor manufacturer required next generation
/
[
Hayashi, T.U.(e-CATS)
] /
Semiconductor Industrial Newspaper Forum
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5 |
A study on the characteristics of semiconductor wafer transportation for levitation system
/
[
Moon, I.H.;Hwang, Y.K.;Cho, S.J.;Kim, D.K.
] /
Proceedings of the SAREK Summer Annual Conference
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6 |
Air film system for handling semiconductor wafers
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[
Paivanas, J.A.;Hassan, J.K.
] /
IBM Journal Research and Development
DOI
ScienceOn
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7 |
Wafer transportation through a tunnel filled with nitrogen gas
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[
Toda, M.;Shishido, M.;Kanno, Y.;Umeda, M.;Nitta, T.;Ohmi, T.
] /
ICCCS Proceedings
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