• Title/Summary/Keyword: Cleaning Module

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Development of Multi-Chemical Supply System for Semiconductor Wafer Cleaning Station

  • Chung, Myung-Jin;Song, Young-Wook
    • 제어로봇시스템학회:학술대회논문집
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    • 2005.06a
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    • pp.1309-1312
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    • 2005
  • A multi-chemical supply system is developed and applied to a wet station, which uses the multi-chemical process in one bath. To control the concentration of two chemicals, control logic of a supply pump is programmed using the programable logic controller (PLC). By using the multi-chemical supply system, wet station with single bath is applied to cleaning process using multi chemicals such as buffed oxide etchant (BOE) and standard clean 1 (SC-1). The concentration of each chemical is measured in the bath to verify the multi-chemical supply system. The control range in the each chemical concentration is measured to 1.33weight% in NH4OH and 0.23weight% in H2O2. The multi-chemical supply system can be movable and usable as an independent module of fixed wet station. By simply midifying the PLC, a multi-chemical supply system can be developed for a wet station.

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Evaluation of the efficiency of cleaning method in direct contact membrane distillation of digested livestock wastewater

  • Kim, Sewoon;Park, Ki Young;Cho, Jinwoo
    • Membrane and Water Treatment
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    • v.8 no.2
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    • pp.113-123
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    • 2017
  • This study investigated effects of physical and chemical cleaning methods on the initial flux recovery of fouled membrane in membrane distillation process. A laboratory scale direct contact membrane distillation (DCMD) experiment was performed to treat digested livestock wastewater with 3.89 mg/L suspended solids, 874.7 mg/L COD, 543.7 mg/L nitrogen, 15.6 mg/L total phosphorus, and pH of 8.6. A hydrophobic PVDF membrane with an average pore size of $0.22{\mu}m$ and a porosity of 75 % was installed inside a direct contact type membrane distillation module. The temperature difference between feed and permeate side was maintained at $40^{\circ}C$ with the feed and permeate stream velocity of 0.18 m/s. The results showed that the permeate flux decreased from $22.1L{\cdot}m^{-2}{\cdot}hr^{-1}$ to $19.0L{\cdot}m^{-2}{\cdot}hr^{-1}$ after 75 hours of distillation. The fouled membrane was cleaned first by physical flushing and consecutively by chemicals with NaOCl and citric acid. After the physical cleaning the flux was recovered to 92 % as compared with the initial clean water flux of the virgin membrane. Then 94 % of the flux was recovered after cleaning by 2,000 ppm NaOCl for 90 minutes and finally 97 % of flux recovered after 3 % citric acid for 90 minutes. SEM-EDS and FT-IR analysis results presented that the foulants on the membrane surface were removed effectively after each cleaning step. The contact angle measurement showed that the hydrophobicity of the membrane surface was also restored gradually after each cleaning step to reach nearly the same hydrophobicity level as the virgin membrane.

A study on the Development and Evaluation of Sludge Occlusion Reduced Diffuser (폐색 저감형 산기관의 개발 및 적용성 평가)

  • Kim, Young-Hoon;Kim, Kwan-Yeop;Lee, Eui-Jong;Nam, Jong-Woo;Lee, Chang-Ha;Jeon, Min-Jung;Kim, Hyung-Soo
    • Journal of Korean Society of Water and Wastewater
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    • v.25 no.1
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    • pp.41-49
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    • 2011
  • The diffuser which is conventionally adapted to MBR, has problem that decreasing the cleaning effect of membrane module by inflexible air supply due to the occlusion of sludge from diffuser hole. To solve this problem, diffuser structure of submerged module should be improved to discharge sludge which is flow into the diffuser for prevent occlusion in the diffuser. In this study, the structure of the diffuser was reformed to open lower part for preclusion the blocking. And the outlet diameter of the diffuser was drawn through the condition for the depth of water and air rate, to prevent air-leak condition of improved diffuser. Moreover, application is evaluated by comparing test with occlusion effect of the conventional and improved diffuser. From the results, air-water boundary changes are steady with changes of water depth and it shows linear relation about air rate. By using this linear numerical formula, the height of diffuser's outlet can be decided. Also, it displays that it can prevent the occlusion effect during the comparing test. Hereafter, if this diffuser is applied to practical MBR process, the occlusion problem of diffuser will be disappeared.

Characteristics of Joint Between Ag-Pd Thick Film Conductor and Solder Bump and Interfacial Reaction (Ag-Pd 후막도체와 솔더범프 사이의 접합특성 및 계면반응)

  • 김경섭;한완옥;이종남;양택진
    • Journal of the Microelectronics and Packaging Society
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    • v.11 no.1
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    • pp.1-6
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    • 2004
  • The requirements for harsh environment electronic controllers in automotive applications have been steadily becoming more and more stringent. Electronic substrate technologists have been responding to this challenge effectively in an effort to meet the performance, reliability and cost requirements. An effect of the plasma cleaning at the ECM(Engine Control Module) alumina substrate and the intermetallic compound layer between Sn-37wt%Pb solder and pad joints after reflow soldering has been studied. Organic residual carbon layer was removed by the substrate plasma cleaning. So the interfacial adhesive strength was enhanced. As a result of AFM measurement, conductor pad roughness were increased from 304 nm to 330 nm. $Cu_6/Sn_5$ formed during initial reflow process at the interface between TiWN/Cu pad and solder grew by the succeeding reflow process, so the grains became coarse. A cellular-shaped $Ag_3Sn$ was observed at the interface between Ag-Pd conductor pad and solder. The diameters of the $Ag_3Sn$ grains ranged from about 0.1∼0.6 $\mu\textrm{m}$. And a needle-shaped was also observed at the inside of the solder.

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A Study on the Methods of the Decorations Using Module Plants in Interior Spaces (모듈형 식물장식을 활용한 실내공간 장식방법에 대한 연구)

  • Lee, Jong-Ran
    • Korean Institute of Interior Design Journal
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    • v.24 no.5
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    • pp.62-69
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    • 2015
  • The purpose of this research is to analyze the methods of the decorations using module plants in interior spaces. This research produced 18 types of the module plant decoration: considering the classifications of module plants(soil, hydroculture, moss), directions of module plants (up, side, down), assembling ways of module plants (horizontal, vertical). Applying these 18 types to the interior space decoration (floor stand, wall attach, ceiling hanging), 54 types were classified. After that, 150 cases of the decoration using module plants in interior spaces were collected and analyzed. In result, the cases were belong to 25 types of 54 types. The important types were the types to be able to decorate wide area of walls or ceilings without occupying floor area: SOIL-UP-VERTICAL, HYDROCULTURE-UP-VERTICAL, MOSS-SIDE-VERTICAL. These types were the decorations with function of bio-filter for air cleaning. Special types were SOIL-SIDE-HORIZONTAL, SOIL-SIDE-VERTICAL with soil developed not to pour and SOIL-DOWN-HORIZONTAL, SOIL-DOWN-VERTICAL with lucks not to pour soil. Plants will be used widely in interior design because of the awareness of eco-friendly design. The strength that module plants are portable, changable, able to exchange parts helps users to maintain plants in interior spaces. For designers, module plants are flexible materials in order to make variety of forms to adjust to interior spaces. The results of this research about methods of the decorations using module plants in interior spaces are useful to designers who want to design interior spaces eco-friendly and user-friendly.

Separation Purification Characteristics of Rinsing Solution in Semiconductor Process using High Performance Polymer Membranes( II ) (기능성 고분자막을 이용한 반도체 공정 세정액의 분리정제특성( II ))

  • Lee Jae-Dal;Hong Young-Ki;Ro Duck-Kil;Bae Kie-Seo
    • Textile Coloration and Finishing
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    • v.17 no.4 s.83
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    • pp.21-26
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    • 2005
  • A combination separation system is composed of three parts, simple microfiltration unit for the pretreatment of real waste IPA, pervaporation unit with plate and frame type module(the effective membrane area 9,040$cm^2$), and simple ultrafiltration unit as a refiner. Utrafiltration module with hollow fiber membrane(MWCO 10,000) used to purify waste aqueous IPA solution. In addition, the flux of $CMPA-K^+$ composite membrane for waste aqueous IPA solution was very steady-state with long experiment time(30 days). And the standard deviation($\sigma$) was 0.152 and then the coefficient of variation($CV\%$)was 10.82 The IPA concentration on the membrane performance using pervaporation module system could be increased from $89.85wt(\%)$ to more than $99.90wt\%$ in about 8hr at operation temperature of $70^{\circ}C$ using the pervaporation module system. Therefore, a combination separation process system of simple filtration and pervaporation was very effective for the purpose of the IPA purification and reuse front industrial electronic components cleaning process.

Flow control of air blowing and vacuuming module using Coanda effect (코안다 효과를 이용한 에어 블로어와 흡입구의 유동 제어)

  • Jeong, Wootae
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.3
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    • pp.115-121
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    • 2017
  • The efficiency of railway track cleaning vehicle for eliminating fine particulate matter (PM10 and PM2.5) in a subway tunnel depends strongly on the structure of the air blowing and suction system installed under the train. To increase the efficiency of underbody suction system, this paper proposes a novel method to use the Coanda effect for the air blower and dust suction module. In particular, through Computational Fluid Dynamics (CFD) analysis, the flow control device induced by the Coanda effect enables an increase in the overall flow velocity and to stabilize the flow distribution of the suction module at a control angle of $90^{\circ}$. In addition, the flow velocity drop at the edge of the air knife-type blower can be improved by placing small inserts at the edge of the blower. Those 4 modular designs of the dust suction system can help remove the dust accumulated on the track and tunnel by optimizing the blowing and suction flows.

A Study on the Oil-mist/Smoke Collecting Module for the Pure Energy Recycling (청정에너지 회수용 유증기/매연 포집모듈에 관한 연구)

  • Kim, Myung-Soo;Ohkura, Shigenobu;Ham, Koung-Chun
    • 한국태양에너지학회:학술대회논문집
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    • 2009.11a
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    • pp.279-284
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    • 2009
  • Traditionally, so-called "industrial waste gases", such ad exhaust from boilers at industrial installations and a large quantity of soot discharged from power station, before their release into the atmosphere, have been on occasion subjected to an air cleaning process to remove fine particles that may pollute the atmosphere (such as mist and dust containing various powdery or oily substances and moisture from industrial waste gases). The release of industrial waste gases containing these particles directly into the atmosphere poses a serious threat to the earth environment; and recovery of these noxious substances is required by law in some countries and local governments. in urban areas, air pollution from automobile exhaust and others creates a serious condition. Some homes are equipped with and use indoor air purifiers. In many of the kitchens of restaurants, smoke generated during cooking and otherwise contaminated air are cleansed by air purifiers before being released outside or recycled inside. For the dust collecting devices to recover the fine particles contained in contaminated air, the cause for air pollution and how to purify air, many types based on various principles are known. Specifically, classified based on theories of particle collection, filtration, gravity, inertia, centrifugation, electricity, and cleaning types are cited as available processes. Among them, an appropriate type is selected according to the size or type of fine particles to be collected and conditions for installation. For the efficiency of dust collection, a filtration system (by using bag filters and others) and electric system are particularly outstanding and are therefore used widely in various areas of industry. In this research, rotary type high performance oil mist and smoke collecting system with self auto cleaning device equipped with the cleaning fluid spraying section is investigated.

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A Study on the Application Effect of Intelligent Air Cleaning systems for EMU (도시철도 차량의 지능형 공기청정 시스템 적용 효과에 대한 고찰)

  • Cho, Kwan-Hyun;Kwon, Soon-Bark;Kim, Kwan-Su;Nam, Hee-Bog;Kim, Woo-Kyo;Nam, Goon-Seok
    • Proceedings of the KSR Conference
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    • 2011.05a
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    • pp.594-600
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    • 2011
  • "The guidelines on the management of indoor air quality of public transportation" was enacted in December 2006 due to the fact that the interest and demand of improving the air quality for citizen using public transportation have been increased. Thus this research has considered what has influenced on the passenger cabin HVAC as well as the improvement of customer service as we proceed the study for better indoor air quality inside of the train by developing the module of cleaning air system for pollutants of a car air.

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