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Separation Purification Characteristics of Rinsing Solution in Semiconductor Process using High Performance Polymer Membranes( II )  

Lee Jae-Dal (Dept. of Textile Hyjeon Junior College)
Hong Young-Ki (Sun Jin. Inc.)
Ro Duck-Kil (Dept. of Fashion Design & Textile Eng., Chungwoon Univ.)
Bae Kie-Seo (Dept. of Textile Engineering, Chungnam National University)
Publication Information
Textile Coloration and Finishing / v.17, no.4, 2005 , pp. 21-26 More about this Journal
Abstract
A combination separation system is composed of three parts, simple microfiltration unit for the pretreatment of real waste IPA, pervaporation unit with plate and frame type module(the effective membrane area 9,040$cm^2$), and simple ultrafiltration unit as a refiner. Utrafiltration module with hollow fiber membrane(MWCO 10,000) used to purify waste aqueous IPA solution. In addition, the flux of $CMPA-K^+$ composite membrane for waste aqueous IPA solution was very steady-state with long experiment time(30 days). And the standard deviation($\sigma$) was 0.152 and then the coefficient of variation($CV\%$)was 10.82 The IPA concentration on the membrane performance using pervaporation module system could be increased from $89.85wt(\%)$ to more than $99.90wt\%$ in about 8hr at operation temperature of $70^{\circ}C$ using the pervaporation module system. Therefore, a combination separation process system of simple filtration and pervaporation was very effective for the purpose of the IPA purification and reuse front industrial electronic components cleaning process.
Keywords
Pervaporation module; Iso-propyl alcohol(IPA); Dehydration; Total flux;
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