Textile Coloration and Finishing (한국염색가공학회지)

The Korean Society of Dyers and Finishers (한국염색가공학회)
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Separation Purification Characteristics of Rinsing Solution in Semiconductor Process using High Performance Polymer Membranes( II )

기능성 고분자막을 이용한 반도체 공정 세정액의 분리정제특성( II )

  • Lee Jae-Dal (Dept. of Textile Hyjeon Junior College) ;
  • Hong Young-Ki (Sun Jin. Inc.) ;
  • Ro Duck-Kil (Dept. of Fashion Design & Textile Eng., Chungwoon Univ.) ;
  • Bae Kie-Seo (Dept. of Textile Engineering, Chungnam National University)
  • 이재달 (혜전대학 패션섬유과) ;
  • 홍영기 ((주)선진인더스트리) ;
  • 노덕길 (청운대학교 패션디자인섬유공학과) ;
  • 배기서 (충남대학교 섬유공학과)
  • Published : 2005.08.01
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Abstract

A combination separation system is composed of three parts, simple microfiltration unit for the pretreatment of real waste IPA, pervaporation unit with plate and frame type module(the effective membrane area 9,040$cm^2$), and simple ultrafiltration unit as a refiner. Utrafiltration module with hollow fiber membrane(MWCO 10,000) used to purify waste aqueous IPA solution. In addition, the flux of $CMPA-K^+$ composite membrane for waste aqueous IPA solution was very steady-state with long experiment time(30 days). And the standard deviation($\sigma$) was 0.152 and then the coefficient of variation($CV\%$)was 10.82 The IPA concentration on the membrane performance using pervaporation module system could be increased from $89.85wt(\%)$ to more than $99.90wt\%$ in about 8hr at operation temperature of $70^{\circ}C$ using the pervaporation module system. Therefore, a combination separation process system of simple filtration and pervaporation was very effective for the purpose of the IPA purification and reuse front industrial electronic components cleaning process.

Keywords

References

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