• 제목/요약/키워드: Cleaning Module

검색결과 67건 처리시간 0.026초

Development of Multi-Chemical Supply System for Semiconductor Wafer Cleaning Station

  • Chung, Myung-Jin;Song, Young-Wook
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2005년도 ICCAS
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    • pp.1309-1312
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    • 2005
  • A multi-chemical supply system is developed and applied to a wet station, which uses the multi-chemical process in one bath. To control the concentration of two chemicals, control logic of a supply pump is programmed using the programable logic controller (PLC). By using the multi-chemical supply system, wet station with single bath is applied to cleaning process using multi chemicals such as buffed oxide etchant (BOE) and standard clean 1 (SC-1). The concentration of each chemical is measured in the bath to verify the multi-chemical supply system. The control range in the each chemical concentration is measured to 1.33weight% in NH4OH and 0.23weight% in H2O2. The multi-chemical supply system can be movable and usable as an independent module of fixed wet station. By simply midifying the PLC, a multi-chemical supply system can be developed for a wet station.

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Evaluation of the efficiency of cleaning method in direct contact membrane distillation of digested livestock wastewater

  • Kim, Sewoon;Park, Ki Young;Cho, Jinwoo
    • Membrane and Water Treatment
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    • 제8권2호
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    • pp.113-123
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    • 2017
  • This study investigated effects of physical and chemical cleaning methods on the initial flux recovery of fouled membrane in membrane distillation process. A laboratory scale direct contact membrane distillation (DCMD) experiment was performed to treat digested livestock wastewater with 3.89 mg/L suspended solids, 874.7 mg/L COD, 543.7 mg/L nitrogen, 15.6 mg/L total phosphorus, and pH of 8.6. A hydrophobic PVDF membrane with an average pore size of $0.22{\mu}m$ and a porosity of 75 % was installed inside a direct contact type membrane distillation module. The temperature difference between feed and permeate side was maintained at $40^{\circ}C$ with the feed and permeate stream velocity of 0.18 m/s. The results showed that the permeate flux decreased from $22.1L{\cdot}m^{-2}{\cdot}hr^{-1}$ to $19.0L{\cdot}m^{-2}{\cdot}hr^{-1}$ after 75 hours of distillation. The fouled membrane was cleaned first by physical flushing and consecutively by chemicals with NaOCl and citric acid. After the physical cleaning the flux was recovered to 92 % as compared with the initial clean water flux of the virgin membrane. Then 94 % of the flux was recovered after cleaning by 2,000 ppm NaOCl for 90 minutes and finally 97 % of flux recovered after 3 % citric acid for 90 minutes. SEM-EDS and FT-IR analysis results presented that the foulants on the membrane surface were removed effectively after each cleaning step. The contact angle measurement showed that the hydrophobicity of the membrane surface was also restored gradually after each cleaning step to reach nearly the same hydrophobicity level as the virgin membrane.

폐색 저감형 산기관의 개발 및 적용성 평가 (A study on the Development and Evaluation of Sludge Occlusion Reduced Diffuser)

  • 김영훈;김관엽;이의종;남종우;이창하;전민정;김형수
    • 상하수도학회지
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    • 제25권1호
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    • pp.41-49
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    • 2011
  • The diffuser which is conventionally adapted to MBR, has problem that decreasing the cleaning effect of membrane module by inflexible air supply due to the occlusion of sludge from diffuser hole. To solve this problem, diffuser structure of submerged module should be improved to discharge sludge which is flow into the diffuser for prevent occlusion in the diffuser. In this study, the structure of the diffuser was reformed to open lower part for preclusion the blocking. And the outlet diameter of the diffuser was drawn through the condition for the depth of water and air rate, to prevent air-leak condition of improved diffuser. Moreover, application is evaluated by comparing test with occlusion effect of the conventional and improved diffuser. From the results, air-water boundary changes are steady with changes of water depth and it shows linear relation about air rate. By using this linear numerical formula, the height of diffuser's outlet can be decided. Also, it displays that it can prevent the occlusion effect during the comparing test. Hereafter, if this diffuser is applied to practical MBR process, the occlusion problem of diffuser will be disappeared.

Ag-Pd 후막도체와 솔더범프 사이의 접합특성 및 계면반응 (Characteristics of Joint Between Ag-Pd Thick Film Conductor and Solder Bump and Interfacial Reaction)

  • 김경섭;한완옥;이종남;양택진
    • 마이크로전자및패키징학회지
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    • 제11권1호
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    • pp.1-6
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    • 2004
  • 자동차 전장품의 시험환경 조건이 엄격해짐에 따라, 전장품 개발 기술자들은 이에 부합하는 성능, 신뢰성, 비용 등을 고려한 보다 효과적인 제품 설계를 위해 노력하고 있다. 본 논문에서는 ECM 알루미나 기판의 플라즈마 세척 영향과 리플로우 후 Sn-37wt%Pb 솔더와 패드 접합부 계면에서 형성되는 금속간 화합물을 관찰하였다. 기판의 플라즈마 세척은 계면 접착력을 저해하였던 C에 의한 유기 잔류물 층이 제거되어 계면 접착력을 향상시키는 효과가 있다. 또한 AFM 분석 결과 도체 패드의 표면 거칠기는 304 nm에서 330 m로 증가하였다. 리플로우 과정에서 솔더와 TiWN/Cu 패드 계면에서 형성된 $Cu_6/Sn_5$는 리플로우 횟수가 증가할 수록 결정립의 크기도 조대화되었다. 솔더와 Ag-Pd 도체패드 계면에서는 세포질 형태의 $Ag_3Sn$화합물이 관찰되었다. $Ag_3Sn$은 지름이 약 0.1∼0.6 $\mu\textrm{m}$이며, 솔더 내부에서는 침상 모양도 관찰되었다.

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모듈형 식물장식을 활용한 실내공간 장식방법에 대한 연구 (A Study on the Methods of the Decorations Using Module Plants in Interior Spaces)

  • 이종란
    • 한국실내디자인학회논문집
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    • 제24권5호
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    • pp.62-69
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    • 2015
  • The purpose of this research is to analyze the methods of the decorations using module plants in interior spaces. This research produced 18 types of the module plant decoration: considering the classifications of module plants(soil, hydroculture, moss), directions of module plants (up, side, down), assembling ways of module plants (horizontal, vertical). Applying these 18 types to the interior space decoration (floor stand, wall attach, ceiling hanging), 54 types were classified. After that, 150 cases of the decoration using module plants in interior spaces were collected and analyzed. In result, the cases were belong to 25 types of 54 types. The important types were the types to be able to decorate wide area of walls or ceilings without occupying floor area: SOIL-UP-VERTICAL, HYDROCULTURE-UP-VERTICAL, MOSS-SIDE-VERTICAL. These types were the decorations with function of bio-filter for air cleaning. Special types were SOIL-SIDE-HORIZONTAL, SOIL-SIDE-VERTICAL with soil developed not to pour and SOIL-DOWN-HORIZONTAL, SOIL-DOWN-VERTICAL with lucks not to pour soil. Plants will be used widely in interior design because of the awareness of eco-friendly design. The strength that module plants are portable, changable, able to exchange parts helps users to maintain plants in interior spaces. For designers, module plants are flexible materials in order to make variety of forms to adjust to interior spaces. The results of this research about methods of the decorations using module plants in interior spaces are useful to designers who want to design interior spaces eco-friendly and user-friendly.

기능성 고분자막을 이용한 반도체 공정 세정액의 분리정제특성( II ) (Separation Purification Characteristics of Rinsing Solution in Semiconductor Process using High Performance Polymer Membranes( II ))

  • 이재달;홍영기;노덕길;배기서
    • 한국염색가공학회지
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    • 제17권4호
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    • pp.21-26
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    • 2005
  • A combination separation system is composed of three parts, simple microfiltration unit for the pretreatment of real waste IPA, pervaporation unit with plate and frame type module(the effective membrane area 9,040$cm^2$), and simple ultrafiltration unit as a refiner. Utrafiltration module with hollow fiber membrane(MWCO 10,000) used to purify waste aqueous IPA solution. In addition, the flux of $CMPA-K^+$ composite membrane for waste aqueous IPA solution was very steady-state with long experiment time(30 days). And the standard deviation($\sigma$) was 0.152 and then the coefficient of variation($CV\%$)was 10.82 The IPA concentration on the membrane performance using pervaporation module system could be increased from $89.85wt(\%)$ to more than $99.90wt\%$ in about 8hr at operation temperature of $70^{\circ}C$ using the pervaporation module system. Therefore, a combination separation process system of simple filtration and pervaporation was very effective for the purpose of the IPA purification and reuse front industrial electronic components cleaning process.

코안다 효과를 이용한 에어 블로어와 흡입구의 유동 제어 (Flow control of air blowing and vacuuming module using Coanda effect)

  • 정우태
    • 한국산학기술학회논문지
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    • 제18권3호
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    • pp.115-121
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    • 2017
  • 도시철도 터널 내에 축적된 미세먼지(PM10 and PM2.5)의 제거를 위해 사용되는 분진흡입차량은 에어 블로어와 흡입시스템으로 구성된 하부흡입시스템의 설계방법에 따라 성능이 달라진다. 본 논문에서는 터널 집진차량의 하부에 설치된 먼지 흡입시스템의 효율 향상을 위하여 흡입구와 에어 블로어에 코안다 효과를 이용한 유속 조절장치를 적용하여 그 효과를 확인하였다. 특히, 공기 유동에 대한 수치해석을 통하여 진공 흡입구 내에 코안다 효과를 이용한 유속조절장치를 적용하였으며, 유속 조절각이 약 90도 내외일 때 유속의 상승과 더불어 유동의 안정화가 동시에 이루어질 수 있음을 확인하였다. 또한 링 블로어에 의해 동작되는 에어 나이프형 공기 블로어는 양쪽 끝 가장자리에 코안다 효과를 유도할 수 있는 엣지 구조를 삽입함으로써 블로어 양 끝단의 유속 저하를 개선할 수 있음을 확인하였다. 이러한 4개의 통합된 모듈 형식의 흡입 시스템의 설계는 최적화를 통하여 바닥 먼지가 비산됨과 동시에 흡입구로 흡입되어 궤도면에 누적된 미세먼지와 초미세먼지의 제거에 효과적으로 활용될 수 있을 것으로 기대된다.

청정에너지 회수용 유증기/매연 포집모듈에 관한 연구 (A Study on the Oil-mist/Smoke Collecting Module for the Pure Energy Recycling)

  • 김명수;오꾸라 시게노부;함경춘
    • 한국태양에너지학회:학술대회논문집
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    • 한국태양에너지학회 2009년도 추계학술발표대회 논문집
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    • pp.279-284
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    • 2009
  • Traditionally, so-called "industrial waste gases", such ad exhaust from boilers at industrial installations and a large quantity of soot discharged from power station, before their release into the atmosphere, have been on occasion subjected to an air cleaning process to remove fine particles that may pollute the atmosphere (such as mist and dust containing various powdery or oily substances and moisture from industrial waste gases). The release of industrial waste gases containing these particles directly into the atmosphere poses a serious threat to the earth environment; and recovery of these noxious substances is required by law in some countries and local governments. in urban areas, air pollution from automobile exhaust and others creates a serious condition. Some homes are equipped with and use indoor air purifiers. In many of the kitchens of restaurants, smoke generated during cooking and otherwise contaminated air are cleansed by air purifiers before being released outside or recycled inside. For the dust collecting devices to recover the fine particles contained in contaminated air, the cause for air pollution and how to purify air, many types based on various principles are known. Specifically, classified based on theories of particle collection, filtration, gravity, inertia, centrifugation, electricity, and cleaning types are cited as available processes. Among them, an appropriate type is selected according to the size or type of fine particles to be collected and conditions for installation. For the efficiency of dust collection, a filtration system (by using bag filters and others) and electric system are particularly outstanding and are therefore used widely in various areas of industry. In this research, rotary type high performance oil mist and smoke collecting system with self auto cleaning device equipped with the cleaning fluid spraying section is investigated.

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도시철도 차량의 지능형 공기청정 시스템 적용 효과에 대한 고찰 (A Study on the Application Effect of Intelligent Air Cleaning systems for EMU)

  • 조관현;권순박;김관수;남희복;김우교;남궁석
    • 한국철도학회:학술대회논문집
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    • 한국철도학회 2011년도 춘계학술대회 논문집
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    • pp.594-600
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    • 2011
  • "The guidelines on the management of indoor air quality of public transportation" was enacted in December 2006 due to the fact that the interest and demand of improving the air quality for citizen using public transportation have been increased. Thus this research has considered what has influenced on the passenger cabin HVAC as well as the improvement of customer service as we proceed the study for better indoor air quality inside of the train by developing the module of cleaning air system for pollutants of a car air.

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