• KIEE International Transactions on Electrophysics and Applications
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• v.4C no.4
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• pp.137-141
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• 2004

In this paper, a thermopneumatic PMDS (polydimethlysiloxane) micropump with nozzle/diffuser elements is presented. The micropump is composed of nozzle/diffuser elements as dynamic valves, an actuator consisting of a circular PDMS diaphragm and a Cr/Au heater on a glass substrate. Four PDMS layers are used for fabrication of an actuator chamber, actuator diaphragm by a spin coating process, spacer layer, and nozzle/diffuser by the SU-8 molding process. The radius and thickness of the actuator diaphragm is 2 mm and 30 ${\mu}{\textrm}{m}$, respectively. The length and the conical angle of the nozzle/diffuser elements are 3.5 mm and 20$^{\circ}$, respectively. The actuator diaphragm is driven by the air cavity pressure variation caused by ohmic heating and natural cooling. The flow rate of the micropump in the frequency domain is measured for various duty cycles of the square wave input voltage. When the square wave input voltage of 5 V DC is applied to the heater, the maximum flow rate of the micropump is 44.6 ${mu}ell$/min at 100 Hz with a duty ratio of 80% under the zero pressure difference.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.8
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• pp.790-796
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• 2013

Micro-speaker diaphragms play an important role in generating a desired audio response. The diaphragm is generally a circular membrane, and the cross section is a double dome, with an inner dome and an outer dome. To improve the sound quality of the speaker, a number of corrugations may be included in the outer dome region. In this study, the role of these corrugations is investigated using two kinds of finite element method (FEM) calculations. Structural FEM modeling was carried out to investigate the change in stiffness of the diaphragm when the corrugations were included. Modal FEM modeling was then carried out to compare the natural frequencies and the resulting vibrational modes of the plain and corrugated diaphragms. The effects of the corrugations on the vibration characteristics of the diaphragm are discussed.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.24 no.7
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• pp.525-536
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• 2014

In this paper, GUI program for microspeaker system simulation program was developed and verified through closed box, vent box and 6th order bandpass enclosure system. By using the pseudo loudspeaker model concept, TS parameters and rear volume of microspeaker were identified. Their suitabilities were proved by comparing test results with simulations of electrical impedance and sound pressure response curves for the three box types; closed box, vent box and 6th order bandpass box. Also, MSSP was found to be effective regardless of the microspeaker's shape, either circular or rectangular shape. MSSP can be used for the microspeaker system simulation, and can give a general prediction of such as; sound pressure level curve, electrical impedance, diaphragm velocity and displacement curve according to multiple design parameters; diaphragm mass, compliance, force factor, front and rear volume, front and rear port's diameter and length.

• Current Optics and Photonics
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• v.4 no.4
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• pp.293-301
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• 2020

In this paper we propose and theoretically analyze a monolithic multiparametric sensor consisting of a superstructure of surface-relief waveguide Bragg gratings (WBGs), a micro-machined diaphragm, and a cantilever beam. Diaphragms of two different configurations, namely circular and square, are designed and analyzed separately for pressure measurement. The square diaphragm is then selected for further study, since it shows relatively higher sensitivity compared to the circular one, as it incurs more induced stress when any pressure is applied. The cantilever beam with a proof mass is designed to enhance the sensitivity for acceleration measurement. A unique mathematical method using coupled-mode theory and the transfer-matrix method is developed to design and analyze the shift in the Bragg wavelength of the superstructure configuration of the gratings, due to simultaneously applied pressure and acceleration. The effect of temperature on the wavelength shift is compensated by introducing another Bragg grating in the superstructure configuration. The measured sensitivities for pressure and acceleration are found to be 0.21 pm/Pa and 6.49 nm/g respectively.

• The Journal of the Acoustical Society of Korea
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• v.14 no.2E
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• pp.12-18
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• 1995

Capactive miro pressure sensor is simulated with finite element methods to analyze the effect of geometrical variation on its performace. Sensor material is th silicon single crystal. The sensor consists of a disk type diaphragm and several bridges connected to a rigid frame. Structural variables in consideration are the thickness of the diaphragm and the bridges, radius of the circular plate, and the number of bridges. Results of static, dynamic and sensitivity analyses reveal the best structure of the sensor among the fifteen cases under investigation.

• Journal of IKEEE
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• v.1 no.1 s.1
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• pp.1-10
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• 1997

It is well-known that rectangular bulk-Si sensors prepared by etch or epi etch-stop micromachining technology are already in practical use today, but the conventional bulk-Si sensor shows some drawbacks such as large chip size and limited applications as silicon sensor device is to be miniaturized. We consider a circular-shape SOI(Silicon-On-Insulator) micro-cavity technology to facilitate multiple sensors on very small chip, to make device easier to package than conventional sensor like pressure sensor and to provide very high over-pressure capability. This paper demonstrates the cross-functional results for stress analyses(targeting $5{\mu}m$ deflection and 100MPa stress as maximum at various applicable pressure ranges), for finding permissible diaphragm dimension by output sensitivity, and piezoresistive sensor theory from two-type SOI structures where the double SOI structure shows the most feasible deflection and small stress at various ambient pressures. Those results can be compared with the ones of circular-shape bulk-Si based sensor$^{[17]}. The SOI micro-cavity formed the sensors is promising to integrate with calibration, gain stage and controller unit plus high current/high voltage CMOS drivers onto monolithic chip.

• Journal of Korean Society of Steel Construction
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• v.10 no.3 s.36
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• pp.525-536
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• 1998

This paper is concerned with a theoretical study on the local load-carrying capacities of Concrete-Filled Circular Tubular(CFCT) column to H-beam connections by yield line theory. In this paper, the three cases which are assumed the yield line are involved. The first model is a simplified yield line model. The second model is modified by x and kx factors. The last one is a Morita's model. The local load-carrying capacities of CFCT column to H-beam connections has been studied both experimentally and theoretically using the yield line theory. The purpose of this paper is to suggest the basic data for developing the non-diaphragm connection.

• International Journal of Aeronautical and Space Sciences
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• v.12 no.1
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• pp.69-77
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• 2011

A peristaltic micropump with lightweight piezo-composite actuator (LIPCA) membrane valves is presented. The micropump contained three cylinder chambers that were connected by microchannels and two active membrane valves. A circular miniature LIPCA was developed and manufactured to be used as actuating diaphragms. The LIPCA diaphragm acted as an active membrane valve that alternate between open and closed positions at the inlet and outlet in order to produce high pumping pressure. In this LIPCA, a lead zirconium titanate ceramic with a thickness of 0.1 mm was used as an active layer. The results confirmed that the actuator produced a large out-of-plane deflection. During the design process, a coupled field analysis was conducted in order to predict the actuating behavior of the LIPCA diaphragm; the behavior of the actuator was investigated from both a theoretical and experimental perspective. The active membrane valve concept was introduced as a means for increasing pumping pressure, and microelectromechanical system techniques were used to fabricate the peristaltic micropump. The pumping performance was analyzed experimentally in terms of the flow rate, pumping pressure and power consumption.

• Journal of the Semiconductor & Display Technology
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• v.14 no.2
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• pp.1-7
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• 2015

In this paper, a new capacitive pressure sensor has been proposed for a displacement measurement. The new sensor is mainly composed of a gap of $5{\mu}m$ and a notch of $1{\mu}m$. And the sensor has the performance as the high sensitivity and capacitance compared with a commercial capacitive sensor. Therefore, the advantages of the new capacitive pressure sensor are good sensitivity in normal range, mechanically robust and large overload protection. The analytical model is induced for confirming the performance of the proposed sensor. In addition, FEM (finite elements method) simulation has been performed to verify the analytical model. Firstly, the displacement characteristics of diaphragm membrane were simulated by the analytical model and FEM in the case of different structure and materials. At last, through this analysis, these simulation results can be predicted the change of the performance when the device parameters are varied. And it is used as a design tool to achieve at a set of performance we desired.

• Journal of Korean Society of Steel Construction
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• v.27 no.3
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• pp.299-310
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• 2015

CFT(Concrete-Filled Tube) structures have problems at processing cause closed section and concrete filling problems. In this study, a CFT structure that uses different types of diaphragms in its upper and lower connections to improve the concrete filling was tested and analyzed via the FEM program. Implementation of variable analysis of EP-T type to find out the reason that effect on the resistance force of the connection. As a result, through experiments and analysis investigated the structural characteristics of circular CFT beam-to-column connection.