• JSTS:Journal of Semiconductor Technology and Science
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• v.5 no.1
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• pp.52-57
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• 2005

This paper describes a fabrication method of a circular diaphragm using boron etching stop method. It will be applied to acoustic transducers such as microphones or microspeakers and so on. The sensitivity is expected to be increased with the circular diaphragm through the simulation results to compare with a general rectangular diaphragm. The borondoped layer which is doped with solid source is sufficient for achieving an etching stop in 20 wt% TMAH, and the thickness is about $7.4{\mu}m$. The diameter of the circular silicon nitride diaphragm was measured to be 2 mm with $1{\mu}m$ thickness. The fabrication of piezoelectric acoustic devices was completed.

• Journal of Sensor Science and Technology
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• v.30 no.5
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• pp.273-278
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• 2021

Here, we studied the change in the mechanical stiffness of a diaphragm according to the corrugation pattern. The diaphragm consists of a silicon oxide and nitride double layer; a corrugation pattern was formed by dry etching, and the diaphragm was released by wet etching. The fabrication of the thin film was verified using focused ion beam and scanning electron microscopy images. The mechanical stiffness of the diaphragm was obtained by measuring the surface vibration using a laser Doppler vibrometer while applying external sound pressure. Flat squares, diaphragms with square corrugations, and circular corrugation patterns were measured and compared. The stiffness of the diaphragm with a corrugation structure was found to be smaller than that without a corrugation structure; in particular, circular corrugation showed a better effect because of the high symmetry. Furthermore, the effect of corrugation was theoretically predicted. The proposed corrugated diaphragm showed comparable flexibility with the state-of-the-art MEMS microphone diaphragm.

• Journal of Korean Association for Spatial Structures
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• v.7 no.2 s.24
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• pp.91-96
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• 2007

To improve the land use of urban, Construction of the circular steel column is required recently. The circular steel columns have a advantage for improving a load carrying capacity as wall as reducing a effective section area. However, the circular steel columns under service load, such as earthquake, shows a tendency to cause local buckling and large deformation. To prevent these phenomena, use of diaphragm is considered. It is reported that longitudinal stiffeners has a effect on improving a buckling and fatigue performance of steel structures. The research of effect on diaphragm is not sufficient. Under monotonic and cyclic loadings diaphragm make a important role to prevent local buckling and deformation of used steel structures. Therefore, influence of diaphragm on performance of used steel structures is investigated. In this study, the influence of diaphragm on seismic and deformation performance of circular steel piers was investigated by using elastic-plastic finite element analysis considered geometrical and material non-linearity. The seismic performance of circular steel columns was evaluated for analytical parameter of manufactured part. The seismic performance of circular steel columns was clarified by comparing an energy dissipation of circular steel piers.

• Journal of Korean Society of Steel Construction
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• v.18 no.2
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• pp.123-135
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• 2006

This paper investigates the design equations and the strength behavior of the diaphragm for steel box beams and circular-column connections. The strength of the connection is decided by the strength of the diaphragm and the strength of the beam and the column, because the connection diaphragm supports the concentration forces from the box beam's lower flange. In previous researches, however, the calculation procedure of the diaphragm stress from the indeterminate curved-beam model is to complicated to apply in process of the equation. Moreover, no reasonable design has yet ben made because the diaphragm's effect on the strength of the connection has not ben considered. Therefore, through nonlinear FEM analysis of the connection diaphragm, this study examines the strength behavior of a connection with diaphragm details. In addition, a great difference is confirmed between the theoretical and analytic behaviors. Fi naly, considering the strength of the connection and the rigidity capacity of the diaphragm, the diaphragm design method is proposed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.327-327
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• 2007

This paper reports the simulation results of piezoelectric microspeakers due to structural changes(diaphragm materials, corrugation width and electrode shapes). When we compared the dependence of diaphragm material properties, the microspeaker with LTO(Low Temperature Oxide) diaphragm shows higher deflection than that of silicon nitride diaphragm, even though the resonant frequencies are almost same in both cases. In case of circular-electrode microspeaker, the deflection of diaphragm is about $16\;{\mu}m$ at 20 V, and it decreases as the corrugation width is decreased. However, the deflection of diaphragm with the square-electrode reveals almost twice times higher value at the same applied voltage than the circular one, and it increases as the corrugation depths are decreased from $30\;{\mu}m\;to\;10\;{\mu}m$. The first resonant frequency of microspeakers present about 1.8 kHz in circular-electrode and 1.2 kHz in square-electrode, respectively.

• JSTS:Journal of Semiconductor Technology and Science
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• v.5 no.1
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• pp.17-23
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• 2005

This paper describes the simulation of a micromachined dome-shaped-diaphragm acoustic transducer built on a $1.5{\mu}m$ thick silicon nitride diaphragm ($2,000{\mu}m$ in radius, with a circular clamped boundary on a silicon substrate) with electrodes and piezoelectric ZnO film in a silicon substrate. Finite element analysis with ANSYS 5.6 has been performed to analyze the static and dynamic behaviors of the transducer under both pressure and voltage loadings.

• Journal of Korean Society of Steel Construction
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• v.9 no.1 s.30
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• pp.13-22
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• 1997

This paper is concerned with an experimental study on structural behavior of Concrete-Filled Circular Tubular(CFCT) column to H-beam connections. The important parameters are the number of inner reinforced rib and the width of H-beam flange(100, 150, 200mm) with variable column thickness(5.8mm, 9.2mm, 12.5mm) around the joint between CFCT and H-beam. Test results are summarized for the displacement, strength, initial stiffness, failure mode and energy absorption capacity of each specimen. The purpose of this paper is to investigate the initial stiffness and the strength of connections to evaluate the structural behavior of the CFCT column to H-beam connections. From the discussion about the test results, the basic data for non diaphragm connection design would be suggested.

• Journal of Korean Society of Steel Construction
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• v.23 no.6
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• pp.737-745
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• 2011

A concrete-filled tube is a concrete-filled steel tube structure. The steel tube confines the concrete to increase the compressive strength, and the concrete contains the buckling of the tube. CFT structures require a diaphragm to prevent buckling of steel at connections. An outer diaphragm has better concrete filling than a through diaphragm due to a large bore, but being larger than the through diagram, it has poorer constructability and cooperation with building equipment. In this study, a CFT structure that uses different types of diaphragms in its upper and lower connections to improve the concrete filling was tested and analyzed via the FEM program. The building structure had a floor slab that was unified with the upper diaphragm, so the outer diaphragm was placed at the upper bound. Moreover, the through diaphragm was placed at the lower connection to avoid obstruction from building equipment. The CFT structure with the improved concrete filling showed the same structural behavior as the CFT structure with the use of the same type of diaphragms at the upper and lower connections.

• Advances in Computational Design
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• v.2 no.2
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• pp.107-119
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• 2017

The Micro circular diaphragm (MCD) is the mechanical actuator part used in the micro electro-mechanical sensors (MEMS) that combine electrical and mechanical components. These actuators are working under harsh mechanical and thermal conditions, so it is very important to study the mechanical and thermal behaviors of these actuators, in order to do with its function successfully. The objective of this paper is to determine the thermo-mechanical behavior of MCD by developing the traditional bulge test technique to achieve the aims of this work. The specimen is first pre-stressed to ensure that is no initial deflection before applied the loads on diaphragm and then clamped between two plates, a differential pressure (P) and temperature ($T_b$) is leading to a deformation of the MCD. Analytical formulation of developed bulge test technique for MCD thermo-mechanical characterization was established with taking in-to account effect of the residual strength from pre-stressed loading. These makes the plane-strain bulge test ideal for studying the mechanical and thermal behavior of diaphragm in both the elastic and plastic regimes. The differential specimen thickness due to bulge effect to describe the mechanical behavior, and the temperature effect on the MCD material properties to study the thermal behavior under deformation were discussed. A finite element model (FEM) can be extended to apply for investigating the reliability of the proposed bulge test of MCD and compare between the FEM results and another one from analytical calculus. The results show that, the good convergence between the finite element model and analytical model.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.34 no.6
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• pp.35-41
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• 2006

In this paper, we focus on improving the performance of the piezoelectric diaphragms of valveless micropumps. A circular lightweight piezoelectric composite actuator (LIPCA) with a high level of displacement and output force has been developed for piezoelectrically actuated micropumps. We used numerical and experimental methods to analyze the characteristics of the actuator to select optimal design. With the developed circular LIPCA, we fabricated a valveless micropump by photo-lithography and PDMS molding techniques. The displacement of the diaphragm, the flow rate and the back pressure of the micropump were evaluated and discussed. With a semi-empirical method, the flow rate with respect to driving frequency was predicted and compared with experimental one. The test results confirm that the circular LIPCA is a promising candidate for micropump application and can be used as a substitute for a conventional piezoelectric actuator diaphragm.