Browse > Article

Fabrication of Circular Diaphragm for Piezoelectric Acoustic Devices  

Lee, Woon-Seob (Department of Mechanical Engineering Korea Advanced Institute of Science and Technology)
Kim, Yong-Chul (Department of Mechanical Engineering Korea Advanced Institute of Science and Technology)
Lee, Jin-Seung (Department of Mechanical Engineering Korea Advanced Institute of Science and Technology)
Lee, Seok-Woo (Department of Mechanical Engineering Korea Advanced Institute of Science and Technology)
Lee, Seung-S. (Department of Mechanical Engineering Korea Advanced Institute of Science and Technology)
Publication Information
JSTS:Journal of Semiconductor Technology and Science / v.5, no.1, 2005 , pp. 52-57 More about this Journal
Abstract
This paper describes a fabrication method of a circular diaphragm using boron etching stop method. It will be applied to acoustic transducers such as microphones or microspeakers and so on. The sensitivity is expected to be increased with the circular diaphragm through the simulation results to compare with a general rectangular diaphragm. The borondoped layer which is doped with solid source is sufficient for achieving an etching stop in 20 wt% TMAH, and the thickness is about $7.4{\mu}m$. The diameter of the circular silicon nitride diaphragm was measured to be 2 mm with $1{\mu}m$ thickness. The fabrication of piezoelectric acoustic devices was completed.
Keywords
Boron doping; Circular diaphragm; Microphone; Microspeaker;
Citations & Related Records
연도 인용수 순위
  • Reference
1 D. Hohm and R. Gerhard-Multhaupt, 'Silicon-Dioxide Electret Transducer', J. of Acoustical Society of America, vol. 75, no. 4, pp. 1297-1298, 1984   DOI   ScienceOn
2 M. Royer, J. O. Holmen, M. A. Wurm, O. S. Aadland, and M. Glenn, 'ZnO on Si Integrated Acoustic Sensor', Sensor and Actuators, A 4, pp. 357-362, 1983   DOI
3 E. Manea, I. Cernica, V. Dolocan, and R. Muller, 'Residual Stress Analysis in Thin Membranes Obtained by Boron Diffusion Processes', Proceeding of Semiconductor Conference, pp. 471-474, 2000   DOI
4 C. H. Han and E. S. Kim, 'Fabrication of Dome-Shaped Diaphragm with Circular Clamped Boundary on Silicon Substrate', Proceedings of the 12th IEEE International Workshop on Micro Electro Mechanical Systems, pp. 505-510, 1999   DOI
5 M. J. Madou, Fundamentals of microfabrication, 2nd ed., CRC Press LLC, New York, 2002
6 M. Gel and I. Shimoyama, 'Sub-Micron Thick High Sensitive Piezoresistive Cantilevers by Boron Etch Stop and Argon Implantation', Proceedings of the 16th IEEE International Workshop on Micro Electro Mechanical Systems, pp. 494-497, 2003   DOI
7 J. C. Greenwood, 'Ethylene Diamine-Cathechol-Water Mixture Shows Preferential Etching of p-n Junction', J. Electrochemical Society, vol. 116, pp. 1325-1326, 1969   DOI
8 O. C. Jeong and S. S. Yang, 'Fabrication and Test of a Thermopneumatic Micropump with a Corrugated $p^+$ diaphragm', Sensors and actuators, A 83, pp. 249-255, 2000   DOI   ScienceOn
9 S. H. Yi and E. S. Kim, 'Piezoelectric Microspeaker with Compressive Nitride Diaphragm', Proceedings of the 15th IEEE International Workshop on Micro Electro Mechanical Systems, pp. 260-263, 2002   DOI
10 W. Kuhnel and G.. Hess, 'Micromachined Subminiature Condenser Microphones in Silicon', Sensor and Actuators, A 32, pp. 560-564, 1992   DOI   ScienceOn
11 R. Schellin and G. Hess, 'A Silicon Subminiature Micro- phone Based on Piezoresistive Polysilicon Strain Gauges', Sensor and Actuators, A 32, pp. 555-559, 1992   DOI   ScienceOn
12 S. S. Lee, R. P. Ried, and R. M. White, 'Piezoelectric Cantilever Microphone and Microspeaker', J. of Microelectromecanical Systems, Vol. 5, no.4, pp. 238-242, 1996   DOI   ScienceOn
13 S. C. Ko, Y. C. Kim, S. S. lee, S. H. Choi, and S. R. Kim, 'Micromachined Piezoelectric membrane acoustic device', Sensors and Actuators, A 103, pp. 130-134, 2003   DOI   ScienceOn
14 M. N. Niu and E. S. Kim, 'Piezoelectric Bimorph Microphone Built on Micromachined Parylene Diaphragm', J. of Microelectromecanical Systems, vol. 12, no. 6, pp. 892-898, 2003   DOI   ScienceOn
15 J. J. Neumann Jr. and K. J. Gabriel, 'CMOS-MEMS Membrane for Audio-Frequency Acoustic Actuation', Sensor and Actuators, A 95, pp. 175-182, 2002   DOI   ScienceOn
16 P. R. Scheeper, A. G. H. van der Donk, W. Olthuis, and P. Bergveld, 'A Review of Silicon Microphones', Sensors and Actuators, A 44, pp. 1-11, 1994   DOI   ScienceOn