• Title/Summary/Keyword: Chemical passivation

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A Study on HF Chemical Passivation for Crystalline Silicon Solar Cell Application (결정질 태양전지를 위한 HF 화학 패시베이션 연구)

  • Choi, Jeong-Ho;Roh, Si-Cheol;Yu, Dong-Yeol;Li, Zhen-Hua;Kim, Yeong-Cheol;Seo, Hwa-Il
    • Journal of the Semiconductor & Display Technology
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    • v.10 no.1
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    • pp.51-55
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    • 2011
  • The surface passivation is one of the important methods that can improve the efficiency of solar cells and can be classified into two methods: wet-chemical passivation and film passivation. In this paper, chemical HF treatment were employed for the passivation of n-type silicon wafers and their effects were studied. To investigate film passivation effects, the silicon nitride films were also deposited by PECVD (plasma-enhanced chemical vapor deposition) on n-type silicon wafers treated with chemical HF. The minority carrier lifetime measurements were used for evaluation of the passivation characteristics in the all experiments steps. We confirmed that the minority carrier lifetime was improved with chemical HF treatment due to passivation effects by H-termination.

Effect of Chemical Passivation Treatment and Flow on the Corrosion of 304 Stainless Steel in Hydrochloric Acid Solution

  • Zhao, Jie;Cheng, Cong Qian;Cao, Tie Shan
    • Corrosion Science and Technology
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    • v.14 no.6
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    • pp.273-279
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    • 2015
  • Effects of passive film quality by chemical passivation and solution flow on the corrosion behavior of 304 stainless steel in HCl solution were investigated using a coloration indicator, and by corrosion weight loss, electrochemical polarization and element dissolution measurements. A high redness degree suggests a low passive-film integrity for 304 stainless steel following air exposure, while the minimum redness degree for the samples after chemical passivation suggests a high passive-film integrity. In the static condition, samples subjected to air exposure exhibited a high corrosion rate and preferential dissolution of Fe. Chemical passivation inhibited the corrosion rate due to the intrinsically high structural integrity of the passive film and high concentrations of Cr-rich oxides and hydroxide. Solution flow accelerated corrosion by promoting both the anodic dissolution reaction and the cathodic reaction. Solution flow also altered the preferential dissolution to fast uniform dissolution of metal elements.

Improved Dit between ALD HfAlO Dielectric and InGaAs Substrate Using NH3 Plasma Passivation (InGaAs 위의 NH3 Plasma Passivation을 이용한 ALD HfAlO유전체 계면전하(Dit) 향상)

  • Choi, Jae Sung
    • Journal of the Semiconductor & Display Technology
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    • v.17 no.4
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    • pp.27-31
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    • 2018
  • The effect of $NH_3$ plasma passivation on the chemical and electrical characteristics of ALD HfAlO dielectric on the InGaAs substrate was investigated. The results show that $NH_3$ plasma passivation exhibit better electrical & chemical performance such as much lower leakage current, lower density of interface trap(Dit) level, and low unstable interfacial oxide. $NH_3$ plasma passivation can effectively enhance interfacial characteristics. Therefore $NH_3$ plasma passivation improved the HfAlO dielectric performance on the InGaAs substrate.

Organic Passivation Material-Polyvinyl Alcohol (PVA)/Layered Silicate Nanocomposite-for Organic Thin Film Transistor

  • Ahn, Taek;Suk, Hye-Jung;Yi, Mi-Hye
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08b
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    • pp.1539-1542
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    • 2007
  • We have synthesized novel organic passivation materials to protect organic thin film transistors (OTFTs) from $H_2O$ and $O_2$ using polyvinyl alcohol (PVA)/layered silicate (SWN) nano composite system. Up to 3 wt% of layered silicate to PVA, very homogeneous nanocomposite solution was prepared.

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Characterization of Thin Film Passivation for OLED by PECVD (PECVD에 의한 OLED 소자의 Thin Film Passivation 특성)

  • Kim, KwanDo;Jang, SeokHee;Kim, JongMin;Chang, SangMok
    • Korean Chemical Engineering Research
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    • v.50 no.3
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    • pp.574-581
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    • 2012
  • The relatively short lifetime is a major obstruction for the commercial applications of OLED. One of the reason for the short lifetime is that the organic materials are interacted with water or oxygen in the atmosphere. Protection of water or oxygen from diffusing into the organic material layers are necessary to increase the lifetime of OLED. Although encapsulation of OLED with glass or metal cans has been established, passivation methods of OLED by organic/inorganic thin films are still being developed. In this paper we have developed in-situ passivation system and thin film passivation method using PECVD by which deposition can be performed at room temperature. We have analyzed the characteristics of the passivated OLED device also. The WVTR (Water Vapor Transmission Rate) for the inorganic thin film mono-layer can be reached down to $1{\times}10^{-2}g/m^2{\cdot}day$ and improved lifetime can be obtained. Thin film passivation methods are expected to be applied to flexible display.

A Review on Silicon Oxide Sureface Passivation for High Efficiency Crystalline Silicon Solar Cell (고효율 결정질 실리콘 태양전지 적용을 위한 실리콘 산화막 표면 패시베이션)

  • Jeon, Minhan;Kang, Jiyoon;Balaji, Nagarajan;Park, Cheolmin;Song, Jinsoo;Yi, Junsin
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.29 no.6
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    • pp.321-326
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    • 2016
  • Minimizing the carrier recombination and electrical loss through surface passivation is required for high efficiency c-Si solar cell. Usually, $SiN_X$, $SiO_X$, $SiON_X$ and $AlO_X$ layers are used as passivation layer in solar cell application. Silicon oxide layer is one of the good passivation layer in Si based solar cell application. It has good selective carrier, low interface state density, good thermal stability and tunneling effect. Recently tunneling based passivation layer is used for high efficiency Si solar cell such as HIT, TOPCon and TRIEX structure. In this paper, we focused on silicon oxide grown by various the method (thermal, wet-chemical, plasma) and passivation effect in c-Si solar cell.

Passivation properties of SiNx and SiO2 thin films for the application of crystalline Si solar cells (결정질 실리콘 태양전지 응용을 위한 SiNx 및 SiO2 박막의 패시베이션 특성 연구)

  • Jeong, Myung-Il;Choi, Chel-Jong
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.24 no.1
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    • pp.41-45
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    • 2014
  • We have investigated the passivation property of $SiN_x$ and $SiO_2$ thin films formed using various process conditions for the application of crystalline Si solar cells. An increase in the thickness of $SiN_x$ deposited using plasma enhanced chemical vapor deposition (PECVD) led to the improvement of passivation quality. This could be associated with the passivation of Si dangling bonds by hydrogen atoms which were supplied during PECVD deposition. The $SiO_2$ thin films grown using dry oxidation process exhibited better passivation behavior than those using wet oxidation process, implying the dry oxidation process was more effective in the formation of high quality $SiO_2$ thin films. The relative effective life time gradually decreased with increasing dry oxidation temperature. Such a degradation of passivation behavior could be attributed to the increase in interface trap density caused by thermal damages.

Effects of Co-solvent on Passivation Film of Lithium Surface (리튬 표면의 부동태 피막에 미치는 공용매의 영향)

  • Kang, Jihoon;Jeong, Soonki
    • Transactions of the Korean hydrogen and new energy society
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    • v.25 no.3
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    • pp.305-310
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    • 2014
  • This study examined the morphological changes in lithium surface immersed in 1mol $dm^{-3}$ (M) $LiPF_6 $ dissolved in propylene carbonate (PC) containing different 1,2-dimethoxyethane (DME) concentrations as a co-solvent. A passivation film was formed on the surface of lithium metal by electrolyte decomposition. The passivation film formation reactions were significantly affected by the amount of co-solvent, DME, in electrolyte solution. A stable film was obtained from the 1 M $LiPF_6 $ / PC:DME (67:33) solution in which lithium electrode showed good electrochemical performances. Atomic force microscope (AFM) and electrochemical impedance spectroscopy (EIS) results revealed that there were no direct correlations between changes in the surface morphology of lithium metal and the resistance behavior of its passivation film.

Utilization of Parylene Thin Film for Passivation of Organic Light Emitting Diodes

  • Lee, Jun-Ho;Kim, Jeong-Moon;Lee, Jong-Seung;Park, Moo-Ryoung;Park, Chin-Ho
    • 한국정보디스플레이학회:학술대회논문집
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    • 2002.08a
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    • pp.750-753
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    • 2002
  • The chemical vapor condensation process of Parylene-N thin films was investigated and applied to the passivation of the organic light emitting diodes (OLEDs). The effects of process variables on the deposition rate were studied, and it was found that the deposition rate of Parylene increases with increasing precursor sublimation temperature but decreases with increasing substrate temperature. The Parylene film was used as a passivation layer for OLEDs, and as a result, the lifetime of the passivated OLEDs was increased by a factor of about 2.3 compared with that of non-passivated OLEDs.

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Influence of Perfluorinated Polymer Passivation on AlGaN/GaN High-electron-mobility Transistors (질화갈륨계 고전자이동도 트랜지스터에 대한 불소계 고분자 보호막의 영향)

  • Jang, Soohwan
    • Korean Chemical Engineering Research
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    • v.48 no.4
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    • pp.511-514
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    • 2010
  • Perfluorinated polymer($Cytop^{TM}$) was deposited on selective area of AlGaN/GaN HEMT structure using low cost and simple spin-coating method, and the electrical characteristics of the device was analyzed for application of passivation layer on semiconductors. Gate lag measurement results of $Cytop^{TM}$ passivated and unpassivated HEMT were compared. Passivated device shows improved 65 % pulsed drain current of dc mode value. Rf measurements were also performed. $Cytop^{TM}$ passivated HEMT have similar rf performance to PECVD grown $Si_3N_4$ passivated device. $Cytop^{TM}$ passivation layer may play an important role in mitigating surface state trapping in the region between gate and drain.