• Title/Summary/Keyword: Chemical flow control

Search Result 324, Processing Time 0.03 seconds

The Characteristics of Silicon Nitride Films Grown at Low Temperature for Flexible Display (플렉서블 디스플레이의 적용을 위한 저온 실리콘 질화물 박막성장의 특성 연구)

  • Lim, Nomin;Kim, Moonkeun;Kwon, Kwang-Ho;Kim, Jong-Kwan
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.26 no.11
    • /
    • pp.816-820
    • /
    • 2013
  • We investigated the characteristics of the silicon oxy-nitride and nitride films grown by plasma-enhanced chemical vapor deposition (PECVD) at the low temperature with a varying $NH_3/N_2O$ mixing ratio and a fixed $SiH_4$ flow rate. The deposition temperature was held at $150^{\circ}C$ which was the temperature compatible with the plastic substrate. The composition and bonding structure of the nitride films were investigated using Fourier transform infrared spectroscopy (FTIR) and X-ray photoelectron spectroscopy (XPS). Nitrogen richness was confirmed with increasing optical band gap and increasing dielectric constant with the higher $NH_3$ fraction. The leakage current density of the nitride films with a high NH3 fraction decreased from $8{\times}10^{-9}$ to $9{\times}10^{-11}(A/cm^2$ at 1.5 MV/cm). This results showed that the films had improved electrical properties and could be acceptable as a gate insulator for thin film transistors by deposited with variable $NH_3/N_2O$ mixing ratio.

A Study on Energy Reduction in an Outdoor Air Conditioning System for Semiconductor Manufacturing Cleanrooms Using Water Spray Humidification (반도체 클린룸용 외기공조시스템의 수분무 가습을 이용한 에너지절감에 관한 연구)

  • Song, Won-Il;Kim, Ki-Cheol;Yoo, Kyung-Hoon;Shin, Dae-Kun;Tae, Kyung-Eung;Kim, Yong-Sik;Park, Dug-Jun
    • Particle and aerosol research
    • /
    • v.13 no.2
    • /
    • pp.65-77
    • /
    • 2017
  • In recent large-scale semiconductor manufacturing cleanrooms, the energy consumption in outdoor air conditioning (OAC) systems to heat, humidify, cool and dehumidify outdoor air(OA) represents about 40~50 % of the total cleanroom power consumption required to maintain cleanroom environment. Therefore, the assessment of energy consumption in outdoor air conditioning systems is essential for reducing the outdoor air conditioning load for a cleanroom. In the present study, an experiment with an outdoor air flow rate of $1,000m^3/h$ was conducted to compare the energy consumption in steam humidification, simple air washer, exhaust air heat recovery type air washer and dry cooling coil(DCC) return water heat recovery type air washer OAC systems. Besides, a numerical analysis was carried out to evaluate the annual energy consumption of the aforementioned four OAC systems. It was shown that the simple air washer, exhaust air heat recovery type air washer and DCC return water heat recovery type air washer OAC systems using water spray humidification were more energy-efficient than the steam humidification OAC system. Furthermore the DCC return water heat recovery type air washer OAC system was the most energy-efficient.

Analysis on the Reduction of Phosphorus Release in River and Lake Sediments through Application of Capping Technology (Capping 기술을 이용한 하천 및 호소 퇴적토의 인 용출 저감 효과 분석)

  • Kim, Seog-Ku;Yun, Sang-Leen
    • Journal of Korean Society of Environmental Engineers
    • /
    • v.36 no.11
    • /
    • pp.781-790
    • /
    • 2014
  • Contaminants such as organic matters, nutrients and toxic chemicals in rivers and lakes with a weak flow rate are first removed from the water and accumulated in the sediments. Subsequently, they are released into the water column again, posing direct/indirect adverse effects on the water quality and aquatic ecosystems. In particular, phosphorus is known to accelerate the eutrophication phenomenon when it is released into the water column via physical disturbance and biological/chemical actions as one of important materials that determine the primary production of aquatic ecosystems and an element that is stored mainly in the sediments in the process of material circulation in the body of water. In this study, the effect on reducing phosphorus release in sediments was analyzed by applying different capping materials to lake water, where the effect of aquatic microorganisms is taken into account, and to distilled water, where the effect of microorganisms is excluded. The experimental results showed that capping with chemical materials such as Fe-gypsum and $SiO_2$-gypsum further reduced the phosphorus release by at least 40% compared to the control case. Composite materials like granule gypsum+Sand showed over 50% phosphorus release reduction effect. Therefore, it is determined that capping with chemical materials such as granule-gypsum and eco-friendly materials such as sand is effective in reducing phosphorus release. The changes in phosphorus properties in the sediments before and after capping treatment showed that gypsum input helped to change the phosphorus that is present in lake sediments into apatite-P, a stable form that makes phosphorus release difficult. Based on the above results, it is expected that the application of capping technology will contribute to improving the efficiency of reducing phosphorus release that occurs in river and lake sediments.

Effects of water physico-chemical parameters on tilapia (Oreochromis niloticus) growth in earthen ponds in Teso North Sub-County, Busia County

  • Makori, Agano J.;Abuom, Paul O.;Kapiyo, Raphael;Anyona, Douglas N.;Dida, Gabriel O.
    • Fisheries and Aquatic Sciences
    • /
    • v.20 no.11
    • /
    • pp.30.1-30.10
    • /
    • 2017
  • Small-scale fish farmers in developing countries are faced with challenges owing to their limited information on aquaculture management. Nile tilapia farmers in Teso North Sub-County recorded lower yields than expected in 2009 despite having been provided with required inputs. Water quality was suspected to be the key factor responsible for the low yields. This study sought to assess the effects of earthen pond water physico-chemical parameters on the growth of Nile tilapia in six earthen fish ponds under semi-intensive culture system in Teso North Sub-County. The study was longitudinal in nature with pond water and fish being the units of analysis. Systematic sampling was used to select five ponds while a control pond was purposively selected based on its previously high harvest. Four ponds were fed by surface flow and two by underground water. Each pond was fertilized and stocked with 900 fry of averagely 1.4 g and 4.4 cm. Physico-chemical parameters were measured in-situ using a multi-parameter probe. Sixty fish samples were randomly obtained from each pond fortnightly for four months using a 10 mm mesh size and measured, weighed and returned into the pond. Mean range of physico-chemical parameters were: dissolved oxygen (DO) 4.86-10.53 mg/l, temperature $24-26^{\circ}C$, pH 6.1-8.3, conductivity $35-87{\mu}S/cm$ and ammonia 0.01-0.3 mg/l. Temperature (p = 0.012) and conductivity (p = 0.0001) levels varied significantly between ponds. Overall Specific Growth Rate ranged between 1.8% (0.1692 g/day) and 3.8% (1.9 g/day). Ammonia, DO and pH in the ponds were within the optimal levels for growth of tilapia, while temperature and conductivity were below optimal levels. As temperature and DO increased, growth rate of tilapia increased. However, increase in conductivity, pH and ammonia decreased fish growth rate. Temperature and DO ranging between 27 and $30^{\circ}C$ and 5-23 mg/l, respectively, and SGR of 3.8%/day and above are recommended for higher productivity.

A PRACTITIONERS VIEW OF MODERN DEVELOPMENTS IN LIMNOLOGY

  • IMBERGER J.;ANTENUCCI J.;BRUCE L.;DUCAS A.;EWING T.;FEAVER S.;HIPSEY M.;IMERITO A.;LAM C.;MORILLO S.;ROMERO J.;SHIMIZU K.
    • Proceedings of the Korea Water Resources Association Conference
    • /
    • 2005.09a
    • /
    • pp.11-12
    • /
    • 2005
  • With the great advances in process understanding, sensor and instrumentation technology and modelling capability it is important to ask what if any practical benefits can the lake manager and operator look forward to. Here, we examine some of the more important problems facing operators of drinking reservoirs, hydro-lakes and lakes used predominantly for recreation and the environment. In drinking reservoirs the main problems originate from increased loadings of nutrients leading to increased biomass and biomass that may give rise to toxins, of anthropogenic chemicals such as metals and synthetic organics and of pathogens of different types. Hydro-lakes are predominantly plagued by problems arising from low oxygen levels in the hypolimnion and in recreational and environmentally sensitive lakes the biggest challenge for the operator is to maintain an existing or establish a new trophic hierarchy or protect the water body from foreign species. The control variables that are at an operator's disposal are the choice of lake water level, the modification of the water colunm stratification via a de-stratification system, the modification of the lake flow path with flow intervention. curtains, intervention in the catchments to modify the loadings flowing into a lake, manipulation of the trophic chain with introduction of new species and chemical dosing, the latter being of marginal use in a large lake. Each of these options is cost effective under certain-circumstances. We endeavour to provide a users guide for their application and show how, especially new instrumentation and modelling methodologies may be used to achieve an effective intervention.

  • PDF

Refractive index control of F-doped SiOC : H thin films by addition fluorine (Fluorine 첨가에 의한 F-doped SiOC : H 박막의 저 굴절률 특성)

  • Yoon, S.G.;Kang, S.M.;Jung, W.S.;Park, W.J.;Yoon, D.H.
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.17 no.2
    • /
    • pp.47-51
    • /
    • 2007
  • F-doped SiOC : H thin films with low refractive index were deposited on Si wafer and glass substrate by plasma enhanced chemical vapor deposition (PECVD) as a function of rf powers, substrate temperatures, gas rates and their composition flow ratios ($SiH_4,\;CF_4$ and $N_2O$). The refractive index of the F-doped SiOC : H film continuously decreased with increasing deposition temperature and rf power. As $N_2O$ gas flow rate decreased, the refractive index of the deposited films decreased down to 1.3778, reaching a minimum value at rf power of 180W and $100^{\circ}C$ without $N_2O$ gas. The fluorine content of F-doped SiOC : H film increased from 1.9 at% to 2.4 at% as the rf power was increased from 60 W to 180 W, which results in the decrease of refractive index.

Statistical Analysis on Process Variables in Linear Roll-CMP (선형 Roll-CMP에서 공정변수에 관한 통계적 분석)

  • Wang, Han;Lee, Hyunseop;Jeong, Haedo
    • Tribology and Lubricants
    • /
    • v.30 no.3
    • /
    • pp.139-145
    • /
    • 2014
  • Nowadays, most micro-patterns are manufactured during flow line production. However, a conventional rotary chemical mechanical polishing (CMP) system has a limited throughput for the fabrication of large and flexible electronics. To overcome this problem, we propose a novel linear roll-CMP system for the planarization of large-area electronics. In this paper, we present a statistical analysis on the linear roll-CMP process of copper-clad laminate (CCL) to determine the impacts of process parameters on the material removal rate (MRR) and its non-uniformity (NU). In the linear roll-CMP process, process parameters such as the slurry flow rate, roll speed, table feed rate, and down force affect the MRR and NU. To determine the polishing characteristics of roll-CMP, we use Taguchi's orthogonal array L16 (44) for the experimental design and F-values obtained by the analysis of variance (ANOVA). We investigate the signal-to-noise (S/N) ratio to identify the prominent control parameters. The "higher is better" for the MRR and "lower is better" for the NU were selected for obtaining optimum CMP performance characteristics. The experimental and statistical results indicate that the down force and roll speed mainly affect the MRR and the down force and table feed rate determine the NU in the linear roll-CMP process. However, over 186.3 N of down force deteriorates the NU because of the bending of substrate. Roll speed has little relationship to the NU and the table feed rate does not impact on the MRR. This study provides information on the design parameter of roll-CMP machine and process optimization.

Integrated Environment Impact Assessment of Brick Kiln using Environmental Performance Scores

  • Pokhrel, Rajib;Lee, Heekwan
    • Asian Journal of Atmospheric Environment
    • /
    • v.8 no.1
    • /
    • pp.15-24
    • /
    • 2014
  • The capital city of Himalayan Country Nepal, Kathmandu Valley is surrounded by consecutive high mountains, which limits the air distribution and mixing effects significantly. It in turn generates steady air flow pattern over a year except in monsoon season. The air shed in the Valley is easily trapped by the surrounded mountains and the inversion layer formulated as the cap. The $PM_{10}$ concentration was noticeably higher than the standard level (120 ${\mu}g/m^3$) in urban and suburban area of Kathmandu valley for all seasons except monsoon period. The Valley area experiences similar wind patterns (W, WWS, and S) for a year but the Easterly wind prevails only during the monsoon period. There was low and calm wind blows during the winter season. Because of this air flow structure, the air emission from various sources is accumulated within the valley air, high level of air pollution is frequently recorded with other air polluted cities over the world. In this Valley area, brick kilns are recognized as the major air pollution source followed by vehicles. Mostly Bull Trench Kiln (BKT), Hoffman Kiln and Vertical Shaft Brick Kiln (VSBK) are in operation for brick firing in Kathmandu valley where the fuels such as crushed coal, saw dust, and natural gas are used for processing bricks in this study. Tool for the Reduction and Assessment of Chemical and Other Environmental Impacts (TRACI) was used for screening and quantifying the potential impacts of air emission from firing fuels. The total Environmental Performance Score (EPS) was estimated and the EPS of coal was approximately 2.5 times higher than those of natural gas and saw dust. It is concluded that the crushed coal has more negative impact to the environment and human health than other fuel sources. Concerning the human health and environment point of view, alternative environment friendly firing fuel need to be used for brick industry in the kiln and the air pollution control devices also need to be applied for minimizing the air emissions from the kilns.

DEVELOPMENT OF A SUPERCRITICAL CO2 BRAYTON ENERGY CONVERSION SYSTEM COUPLED WITH A SODIUM COOLED FAST REACTOR

  • Cha, Jae-Eun;Lee, Tae-Ho;Eoh, Jae-Hyuk;Seong, Sung-Hwan;Kim, Seong-O;Kim, Dong-Eok;Kim, Moo-Hwan;Kim, Tae-Woo;Suh, Kyun-Yul
    • Nuclear Engineering and Technology
    • /
    • v.41 no.8
    • /
    • pp.1025-1044
    • /
    • 2009
  • Systematic research has been conducted by KAERI to develop a supercritical carbon dioxide Brayton cycle energy conversion system coupled with a sodium cooled fast reactor. For the development of the supercritical $CO_2$ Brayton cycle ECS, KAERI researched four major fields, separately. For the system development, computer codes were developed to design and analyze the supercritical $CO_2$ Brayton cycle ECS coupled with the KALIMER-600. Computer codes were developed to design and analyze the performance of the major components such as the turbomachinery and the high compactness PCHE heat exchanger. Three dimensional flow analysis was conducted to evaluate their performance. A new configuration for a PCHE heat exchanger was developed by using flow analysis, which showed a very small pressure loss compared with a previous PCHE while maintaining its heat transfer rate. Transient characteristics for the supercritical $CO_2$ Brayton cycle coupled with KALIMER-600 were also analyzed using the developed computer codes. A Na-$CO_2$ pressure boundary failure accident was analyzed with a computer code that included a developed model for the Na-$CO_2$ chemical reaction phenomena. The MMS-LMR code was developed to analyze the system transient and control logic. On the basis of the code, the system behavior was analyzed when a turbine load was changed. This paper contains the current research overview of the supercritical $CO_2$ Brayton cycle coupled to the KALIMER-600 as an alternative energy conversion system.

Planar, Air-breathing PEMFC Systems Using Sodium Borohydride ($NaBH_4$를 이용만 공기호흡형 수소연료전지에 대한 연구)

  • Kim, Jin-Ho;Hwang, Kwang-Taek
    • Journal of Hydrogen and New Energy
    • /
    • v.20 no.4
    • /
    • pp.300-308
    • /
    • 2009
  • In a pursuit of the development of alternative mobile power sources with a high energy density, a planar and air-breathing PEMFCs with a new type of hydrogen cartridge which uses onsite $H_2$ generated from sodium borohydride ($NaBH_4$) hydrolysis have been investigated for use in advanced power systems. Two types of $H_2$ generation through $NaBH_4$ hydrolysis are available: (1) using organic acids such as sulphuric acid, malic acid, and sodium hydrogen carbonate in aqueous solution with solid $NaBH_4$ and (2) using solid selected catalysts such as Pt, Ru, CoB into the stabilized alkaline $NaBH_4$ solution. It might therefore be relevant at this stage to evaluate the relative competitiveness of the two methods mentioned above. The effects of flow rate of stabilized $NaBH_4$ solution, MEA (Membrane Electrode Assembly) improvement, and type and flow control of the catalytic acidic solution have been studied and the cell performances of the planar, air-breathing PEMFCs using $NaBH_4$ has been measured from aspects of power density, fuel efficiency, energy density, and fast response of cell. In our experiments, planar, air-breathing PEMFCs using $NaBH_4$ achieved to maximum power density of 128mW/$cm^2$ at 0.7V and energy efficiency of 46% and has many advantages such as low operating temperature, sustained operation at a high power density, compactness, the potential for low cost and volume, long stack life, fast star-up and suitability for discontinuous operation.