• 한국분말재료학회지
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• 제12권4호
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• pp.239-248
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• 2005

1990년도 초반에 개발되어 나노분말의 제조 공정으로 집중적으로 연구되어온 화학기상응축공정은 고강도용 나노분말 소재이외에 기능성 자성재료로의 응용에 주로 이용되어 왔다. 최근에는 이러한 응용이외에 나노분말의 표면을 다양한 이종 소재로 응용하고자하는 나노캡슐(혹은 core/shell)화 제조 공정으로 진보되어 다양한 합금 시스템으로 발전하게 되었다. 특히 최근 Particles 2005, Surface Modification in Particle Technology 학회에서는 나노금속 혹은 세라믹 분말에 PMMA, PE등 polymer의 유기화합물의 코팅하여, DNA나 RNA를 부착하거나 추출해내는 나노캡슐화 공정 연구가 매우 활발하게 진행됨을 보여주고 있으며, 이들 나노 캡슐의 개발은 약물전달계(Drug delivery system), 온열치료용 및 MRI 조영제 등의 바이오재료로의 응용가능성이 크게 기대되어 이에 대한 연구들이 활발하게 진행될 것으로 예상된다.

• 한국군사과학기술학회지
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• 제7권1호
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• pp.34-46
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• 2004

Copper films were prepared by using ECR-MOCVD(Electron Cyclotron Resonance Metal Organic Chemical Vapor Deposition) coupled with a DC bias system. The DC bias is connected to the electrode which placed 1∼3cm above the polymer substrate. The pulse electrical field around the electrode attracts the positive charged copper ions generated from the dissociation of copper precursor, $Cu(hfac)_2$, under ECR plasma. Condensation of supersaturated copper ions in the space between the electrode and substrate, makes it possible to deposit copper film on the polymer substrate even at room temperature. In this study, optimization of the electrode configuration was carried out in order to obtain the uniform films. The uniformity of the deposited films were closely related to the parameters of electrode geometry such as electrode shape, thickness, grid size and the spacing between electrodes. The most uniform copper film was observed with the electrode that enabled uniform electrical field distribution across the whole dimension of electrode.

• 대한전자공학회논문지SD
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• 제44권11호
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• pp.20-25
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• 2007

SiOC 박막과 같은 유무기 하이브리드 실리카 물질에서의 열처리효과에 의한 결합구조의 변화와 유전상수에 관하여 연구하였다. 유무기 하이브리드 실리카 물질은 BTMSM과 산소의 혼합가스를 이용한 CVD방법에 의하여 증착되었다. 유무기 하이브리드 실리카 물질은 증착조건에 따라 3가지 유형으로 분류되었으며, 유전상수는 MIS 구조에 의하여 조사되었다. XPS 분석에 의하여 C 1s 스펙트라는 O2/BTMSM=1.5의 유량비를 갖는 박막에서 282.9 eV의 organometallic carbon 반응을 보여주는 피크를 나타내었다. organometallic carbon반응의 결과는 안정성 있는 크로스 링크 결합구조를 만들어내며, 하이브리드 특성을 갖는 이 박막에서 열처리 후 유전상수는 가장 낮았다.

• 한국산학기술학회논문지
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• 제19권2호
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• pp.21-27
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• 2018

나프타분리공정은 원유에서 증류 공정에 의해 얻어지는 풀레인지납사(Full Range Naphtha)를 원료로 하여 끓는점 차이에 의해 각각 경질납사, 중질납사 및 등유 반제품으로 순차적으로 분리한다. 이러한 전통적인 분리 방법은 2성분을 분리하는 Column을 연속으로 설치하여 생산한다. 이러한 분리방법은 리보일러에서 소비되는 에너지가 증류탑 내부 고비점 성분을 분리시키는 데 사용되고 이 에너지의 대부분은 탑정의 냉각기에서 응축열로 버려지게 때문에 에너지 낭비가 큰 것으로 알려져 있다 본 연구에서는 납사분리공정의 2개의 Column을 Petlyuk Column으로 설계하였다. 탑내 조성분포가 평형관계만으로 계산되는 이상적 단수 효율 하에서 stage to stage 계산방법으로 구조적 설계를 하였고 일반 증류탑과 비교한 결과 제시된 Petlyuk Distillation Column의 설계 방법이 기존의 3-column 모델법보다 설계 시간이 단축될 뿐만 아니라 증류탑내의 액의 조성분포를 평형증류 조성곡선과 유사하도록 설계함으로써 에너지 효율 측면에서도 효율적임을 입증하였다. 또한 같은 tray 단수하에서 Petlyuk Column은 일반 증류탑 대비 약 12.3% 에너지가 절약될 뿐만 아니라 초기 투자비도 절약됨을 알 수 있었다.

• 한국결정성장학회:학술대회논문집
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• 한국결정성장학회 1996년도 The 9th KACG Technical Annual Meeting and the 3rd Korea-Japan EMGS (Electronic Materials Growth Symposium)
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• pp.5-18
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• 1996

The solid state cesium ion source os alumino-silicate based zeolite which contains cerium. The material is an ionic conductor. Cesiums are stably stored in the material and one can extract the cesiums by applying electric field across the electrolyte. Cesium ion bombardment has the unique property of producing high negative ion yield. This ion source is used as the primary source for the production of a negative ion without any gas discharge or the need for a carrier gas. The deposition of materials as an ionic species in the energy range of 1.0 to 300eV is recently recognized as a very promising new thin film technique. This energetic non-thermal equilibrium deposition process produces films by “Kinetic Bonding / Energetic Condensation" mechansim not governed by the common place thermo-mechanical reaction. Under these highly non-equilibrium conditions meta-stable materials are realized and the negative ion is considered to be an optimum paeticle or tool for the purpose. This process differs fundamentally from the conventional ion beam assisted deposition (IBAD) technique such that the ion beam energy transfer to the deposition process is directly coupled the process. Since cesium ion beam sputter deposition process is forming materials with high kinetic energy of metal ion beams, the process provider following unique advantages:(1) to synthesize non thermal-equilibrium materials, (2) to form materials at lower processing temperature than used for conventional chemical of physical vapor deposition, (3) to deposit very uniform, dense, and good adhesive films (4) to make higher doposition rate, (5) to control the ion flux and ion energy independently. Solid state cesium ion beam sputter deposition system has been developed. This source is capable of producing variety of metal ion beams such as C, Si, W, Ta, Mo, Al, Au, Ag, Cr etc. Using this deposition system, several researches have been performed. (1) To produce superior quality amorphous diamond films (2) to produce carbon nitirde hard coatings(Carbon nitride is a new material whose hardness is comparable to the diamond and also has a very high thermal stability.) (3) to produce cesiated amorphous diamond thin film coated Si surface exhibiting negative electron affinity characteristics. In this presentation, the principles of solid state cesium ion beam sputter deposition and several applications of negative metal ion source will be introduced.

• 전자공학회논문지A
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• 제31A권7호
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• pp.85-94
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• 1994

A high-resolution transmission electron microscopy study of the solid phase crystallization of the amorphous silicon thin films, deposited on SiOS12T at 52$0^{\circ}C$ by low pressure chemical vapor deposition and annealed at 55$0^{\circ}C$ in a dry N$_{2}$ ambient was carried out so that the arrangement of atoms in the crystalline silicon and at the amorphous/crystalline interface of the growing grains could be understood on an atomic level. Results show that circular crystalline silicon nuclei have formed and then the grains grow to an elliptical or dendritic shape. In the interior of all the grains many twins whose{111} coherent boundaries are parallel to the long axes of the grains are observed. From this result, it is concluded that the twins enhance the preferential grain growth in the <112> direction along {111} twin planes. In addition to the twins. many defect such as intrinsic stacking faults, extrinsic stacking faults, and Shockley partial dislocations, which can be formed by the errors in the stacking sequence or by the dissociation of the perfect dislocation are found in the silicon grain. But neither frank partial dislocations which can be formed by the condensation of excess silicon atoms or vacancies and can form stacking fault nor perfect dislocations which can be formed by the plastic deformation are observed. So it is concluded that most defects in the silicon grain are formed by the errors in the stacking sequence during the crystallization process of the amorphous silicon thin films.

• Journal of Biosystems Engineering
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• 제30권2호
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• pp.102-109
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• 2005

Water consumption at the farm is up to 48 percent of water resource of South Korea while manufacturing industry's is only $9.6\%$. The area of arable land is 2,077,067 ha and 27 percent of it is used for growing fruits and vegetables using furrow or surface irrigation at the greenhouse. Surface irrigation at the greenhouse for fruits and vegetables has problems such as over watering and insufficient supply of water to the fine roots of the plant. However, the research on the new method of irrigation to save water usage is few. The characteristics of soil wetting was measured for using surface irrigation and underground trickle irrigation method where water was supplied at 10, 15, 20, and 25 cm beneath the surface ground. Followings are summary of this study. 1. The efficiency of underground trickle irrigation was expected to be as high as twice of surface irrigation such as drip watering or sprinkling. 2. This improvement could be possible by using less than $50\%$ of irrigation water than surface irrigation to supply similar amount of water near fine roots. 3. Surface irrigation causes soil compaction as deep as 20 cm below the surface ground which reduces soil porosity and root respiration ending up developing less fine roots. 4. Underground trickle irrigation can prevent overdamping in the greenhouse since it does not over wet the surface soil. At winter, the amount of agricultural chemical usage could be reduced since this irrigation method does not develop blight or crop disease from condensation of water vapor.

• 한국환경과학회지
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• 제29권11호
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• pp.1065-1078
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• 2020

The statistical characteristics of aerosol-cloud interactions over East Asia were investigated using Moderate Resolution Imaging Spectroradiometer satellite data. The long-term relationship between various aerosol and cloud parameters was estimated using correlation analysis, principle component analysis, and Aerosol Indirect Effect (AIE) estimation. In correlation analysis, Aerosol Optical Depth (AOD) was positively Correlated with Cloud Condensation Nuclei (CCN) and Cloud Fraction (CF), but negatively correlated with Cloud Top Temperature (CTT) and Cloud Top Pressure (CTP). Fine Mode Fraction (FMF) and CCN were positively correlated over the ocean because of sea spray. In principle component analysis, AOD and FMF were influenced by water vapor. In particular, AOD was positively influenced by CF, and negatively by CTT and CTP over the ocean. In AIE estimation, the AIE value in each cloud layer and type was mostly negative (Twomey effect) but sometimes positive (anti-Twomey effect). This is related to regional, environmental, seasonal, and meteorological effects. Rigorous and extensive studies on aerosol-cloud interactions over East Asia should be conducted via micro- and macro-scale investigations, to determine chemical characteristics using various meteorological instruments.

• 한국세라믹학회지
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• 제39권8호
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• pp.789-794
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• 2002

본 연구에서는 TMS[Tetramethylsilane:$Si(CH_3)_4$], $NH_3$와 $H2$를 이용하여 나노크기의 Si-C-N precursor 분말을 합성하기 위하여 CVC법을 이용하였으며 반응온도, TMS/$NH_3$ 비 그리고 TMS/$H_2$ 비를 변화시켰다. XRD와 FESEM 분석을 통해서 결정상과 입자의 크기 그리고 입자의 형태를 관찰하고자 하였으며, 그 결과 제조된 분말은 모든 실험 조건하에서 87∼130 nm 크기를 지닌 균일한 구형의 비정질 분말이 얻어졌다. 입자 크기는 반응온도의 감소에 따라 감소하였으며, 또한 TMS/$NH_3$, TMS/$H_2$ 비가 작아질수록 감소하였다. EA 분석 결과 제조된 분말은 Si, N, C, H로 이루어졌음을 알 수 있었으며 FT-IR를 통하여 Si-N, C-N, Si-C 결합을 가진 Si-C-N precursor 분말이 제조되었다.