• 제목/요약/키워드: Chemical Mechanical Micro machining

검색결과 45건 처리시간 0.026초

Micro-machining of Glasses using Chemical-assisted Ultrasonic Machining (화학적 초음파가공을 이용한 유리의 미세가공)

  • 전성건;신용주;김병희;김헌영;전병희
    • Transactions of the Korean Society of Mechanical Engineers A
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    • 제27권12호
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    • pp.2085-2091
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    • 2003
  • An ultrasonic machining process has been known as efficient and economical means fer precision machining of glass or ceramic materials. However, because of its complexity, the mechanism of the machining process is still not well understood. Therefore, it is hard to optimize the process parameters effectively. The conventional ultrasonic machining which uses the abrasive slurry only, furthermore, is time-consuming and gives the relatively rough surface. In order to increase the material removal rate and improve the integrity of the machined surface, we have introduced the novel ultrasonic machining technique, Chemical-assisted UltraSonic Machining(CUSM). The desktop-style micro ultrasonic machine has been developed and the z-axis feed is controlled by the constant load control algorithm. To obtain the chemical effects, the low concentration HF(hydrofluoric acid) solution, which erodes glass, added to alumina slurry. Through various experiments and comparison with conventional results, the superiority of CUSM is verified. MRR increases over 200%, the surface roughness is improved and the machining load decreases dramatically.

Fabrication of Micro-fluidic Channels using a Flexible and Rapid Surface Micro-machining Technique (유연하고 신속한 표면미세가공기술을 이용한 Micro-fluidic Channel 제작)

  • 김진산;성인하;김대은
    • Transactions of the Korean Society of Machine Tool Engineers
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    • 제11권4호
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    • pp.97-101
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    • 2002
  • Recently, the need for transporting and manipulating minute amount of fluids in microscale channels (so-called micro-fluidics) has been increasing, especially in biotechnology and biochemical processing. This work demonstrates that the so-called mechano-chemical process which consists of mechanical abrasive action combined with chemical process can be used to f뮤ricate micro-fluidic channels more rapidly and cost effectively than other methods. In this work, capillary filling of fluids in micro-channels was investigated by theoretical approaches and experiments. From the experimental results, it is expected that a complex micro-fluidic system can be fabricated using the micro-fabrication technique and microsystem packaging method described in this work.

A Study on Micro-hole Machining Technology using Ultrasonic vibration (초음파 진동을 이용한 미세구멍 가공기술)

  • 이석우;최헌종;이봉구;최영재
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 한국정밀공학회 2002년도 추계학술대회 논문집
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    • pp.231-234
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    • 2002
  • Ultrasonic machining technology has been developed over recent years for the manufacture of cost-effective and quality-assured precision parts for several industrial application such as optics, semiconductors, aerospace, and automobile. Ultrasonic machining process is an efficient and economical means of precision machining of ceramic materials. The process is non-thermal, non-chemical and non-electric and hardly creates changes to the mechanical properties of the brittle materials machined. This paper describes the characteristics of the micro-hole of $\textrm{Al}_2\textrm{O}_3$ by ultrasonic machining with tungsten carbide tool. The effects of various parameters of ultrasonic machining, including abrasives, machining force and pressure, on the material removal rate, hole quality, and tool wear presented and discussed. The ultrasonic Machining of micro-holes in ceramics has been under taken and the machining mechanism in the ultrasonic machining of ceramics based on the fracture-mechanics concept has been analyzed.

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Machinability in Micro-precision Machining of Ni-Plated Layer by Diamond Tool (다이어몬드 공구를 이용한 Ni 도금층의 정밀미세가공 시 절삭성)

  • Kim, Seon-Ah;Park, Dong-Sam
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • 제18권6호
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    • pp.636-641
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    • 2009
  • Recently, expansion of micro-technology parts requires micro-precision machining technology. Micro-groove machining is important to fabricate micro-grating lens and many micro-parts such as microscope lens, fluidic graphite channel etc. Conventional groove fabrication methods such as etching and lithography have some problems in efficiency and surface integrity. But, mechanical micromachining methods using single crystal diamond tools can reduce these problems in chemical process. For this reason, microfabrication methods are expected to be very efficient, and widely studied. This study deals with machinability in micro-precision V-grooves machining of nickel plated layer using non-rotational single crystal diamond tool and 3-axis micro stages. Micro V-groove shape, chip formation and tool wear were investigated for the analysis of machinability of Ni plated layer.

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Micro Hole Machining for Ceramics ($Al_2O_3$) Using Ultrasonic Vibration (초음파 진동을 이용한 세라믹 소재의 마이크로 홀 가공)

  • 박성준;이봉구;최헌종
    • Transactions of the Korean Society of Machine Tool Engineers
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    • 제13권2호
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    • pp.104-111
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    • 2004
  • Ultrasonic machining is a non-thermal, non-chemical, md non-electorial material removal process, and thus results in minimum modifications in mechanical properties of the brittle material during the process. Also, ultrasonic machining is a non-contact process that utilize ultrasonic vibration to impact a brittle material. In this research characteristics of micro-hole machining for brittle materials by ultrasonic machining(USM) process have been investigated. And the effect of ultrasonic vibration on the machining conditions is analyzed when machining fir non-conductive brittle materials using tungsten carbide tools with a view to improve form and machining accuracy.

A Fundamental Study on UV Laser Micro Machining of Micro Porous Polymeric Foams (마이크로 다공질 폴리머 폼의 UV 레이저 미세가공에 관한 기초 연구)

  • Oh, Jae-Yong;Shin, Bo-Sung;Lee, Jung-Han;Park, Sang-Hu;Park, Chul-Beom
    • Journal of the Korean Society for Precision Engineering
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    • 제29권5호
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    • pp.572-577
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    • 2012
  • Recently porous polymer has widely been applied to packaging, heat isolation, and sound absorption in various fields from the electrics to the automobiles industry. A lot of micro porosities inside foamed polymer provide lower heat conduction and lighter weight than non-porous polymer, because they involve gas or air during foaming process. In this paper experimental approaches of the UV laser micro machining behavior for Expanded Polypropylene (EPP) foamed polymer materials, which have different expansion rates, were investigated. From these results, the ablation phenomena were finally observed that the ablation is depended upon stronger photo-chemical than photo-thermal effect. This study will also help us to understand interaction between UV laser beam and porous polymer.

마찰가공에 있어서의 분위기 영향에 관한 연구 제 1장

  • ;Sohn, Myung-Whan
    • Transactions of the Korean Society of Mechanical Engineers
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    • 제5권4호
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    • pp.338-346
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    • 1981
  • Honing, lapping, polishing and superfinishing are applied for a precision machining to finish the metal surface, but these precision machining are micro-cutting by hard and micro-abrasive grains. Frictional machining is the new method to finish mirrorlike surface without using those abrasive grains. The frictional machining produces high pressure and high temperature instantly by compressing a tool material against the metal surface in sliding motion. The metal surface is given plastic deformation and plastic flow by the above mentioned frictional motion, but the surface roughness of the metal surface is influenced by physical and chemical reaction in surrounding atmosphere. Therefore, the atmosphere around the metal optimum atmosphere in the frictional machining. The part 1 of the study was performed in liquid atmospheres. Diesel oil, lubricant, grease, lard oil, bean oil and cutting fluid were used as such atmospheres. Medium carbon steel SM 50 C was used as a workpiece and ceramic tip was applied as a frictional tool. The result of the experiment showed characteristic machining conditions to generate the best surface roughness in each atmospheres.

A Study on Micro Ultrasonic machining for Brittle Material Using Ultrasonic vibration (초음파 진동을 이용한 취성재료의 가공기술에 관한 연구)

  • Lee Seok-Woo;Choi Heon-Jong;Yi Bong-Gu
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 한국소성가공학회 2002년도 금형가공 심포지엄
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    • pp.245-252
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    • 2002
  • Ultrasonic machining technology has been developed over recent years for the manufacture of cost-effective and quality-assured precision parts for several industrial application such as optics, semiconductors, aerospace, and automobile. Ultrasonic machining process is an efficient and economical means of precision machining of ceramic materials. The process is non-thermal, non-chemical and non-electric md hardly creates changes to the mechanical properties of the brittle materials machined. This paper describes the characteristics of the micro-hole of $Al_2O_3$ by ultrasonic machining with tungsten carbide tool. The effects of various parameters of ultrasonic machining, including abrasives, machining force and pressure, on the material removal rate, hole quality, and tool wear presented and discussed. The ultrasonic Machining of micro-holes in ceramics has been under taken and the machining mechanism in the ultrasonic machining of ceramics based on the fracture-mechanics concept has been analyzed.

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Characteristics of Chemical-assisted Ultrasonic Machining of Glass (화학적기법을 이용한 유리의 초음파가공 특성)

  • Kim, B.H.;Jeon, S.K.;Kim, H.Y.;Jeon, B.H.
    • Proceedings of the KSME Conference
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    • 대한기계학회 2003년도 춘계학술대회
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    • pp.1349-1354
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    • 2003
  • Ultrasonic Machining process is an efficient and economical means of precision machining on glass and ceramic materials. However, the mechanics of the process with respect to crack initiation and propagation, and stress development in the ceramic workpiece subsurface are still not well understood. In this research, we investigate the basic mechanism of chemical assisted ultrasonic machining(CUSM) of glass through the experimental approach. For the purpose of this study, we designed and fabricated the desktop micro ultrasonic machine. The feed is controlled precisely by using the constant load control system. During the machining experiment, the effects of HF(hydrofluoric acid) characteristics and machining condition on the surface roughness and the material removal rate are measured and compared.

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An Experimental Study on the Improvement of Microscopic Machinability of Glass using the Discharging Peak Control Techniques in the Electrochemical Discharge Machining Technologies

  • Chang, In-Bae;Kim, Nam-Hyeock;Kim, Byeong-Hee;Kim, Heon-Young
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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    • pp.315-316
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    • 2002
  • Electrochemical discharge machining is a very recent technique for non-conducting materials such as ceramics and glasses. ECDM is conducted in the NaOH solution and the cathode electrode is separated from the solution by $H_2$ gas bubble. Then the discharge is appeared and the non-conductive material is removed by spark and some chemical reactions. In the ECDM technology, the $H_2$ bubble control is the most important factor to stabilize the discharging condition. In this paper, we proposed the discharge peak monitoring/ discharging duty feedback algorithms for the discharge stabilization and the feasibility of this algorithm is verified by various pattern machining in the constant preload conditions for the cathode electrode.

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