Browse > Article
http://dx.doi.org/10.3795/KSME-A.2003.27.12.2085

Micro-machining of Glasses using Chemical-assisted Ultrasonic Machining  

전성건 (강원대학교 기계메카트로닉스 대학원)
신용주 (강원대학교 기계메카트로닉스 대학원)
김병희 (강원대학교 기계메카트로닉스 공학부)
김헌영 (강원대학교 기계메카트로닉스 공학부)
전병희 (인덕대학교 컴퓨터 응용설계)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.27, no.12, 2003 , pp. 2085-2091 More about this Journal
Abstract
An ultrasonic machining process has been known as efficient and economical means fer precision machining of glass or ceramic materials. However, because of its complexity, the mechanism of the machining process is still not well understood. Therefore, it is hard to optimize the process parameters effectively. The conventional ultrasonic machining which uses the abrasive slurry only, furthermore, is time-consuming and gives the relatively rough surface. In order to increase the material removal rate and improve the integrity of the machined surface, we have introduced the novel ultrasonic machining technique, Chemical-assisted UltraSonic Machining(CUSM). The desktop-style micro ultrasonic machine has been developed and the z-axis feed is controlled by the constant load control algorithm. To obtain the chemical effects, the low concentration HF(hydrofluoric acid) solution, which erodes glass, added to alumina slurry. Through various experiments and comparison with conventional results, the superiority of CUSM is verified. MRR increases over 200%, the surface roughness is improved and the machining load decreases dramatically.
Keywords
Chemical-assisted Ultrasonic Machining; Glass; Hydrofluoric acid; Material Removal Rate;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 Chong Nam Chu, Gyu Man Kim and Seong Yune Kim, 200, 'Fabrication of Micro-Shapes Using EDM and Ultrasonic Machining,' Journal of the Korean Society of Precision Engineering, Vol. 17, No. 7, pp. 20-27   과학기술학회마을
2 Sun, X. Q., Masuzawa, T., Fujino, M., 1996, 'Micro Ultrasonic Machining and Its Applications in MEMS,' Sensors and Actuators, Vol. 57, pp. 159-164   DOI   ScienceOn
3 Ghahramani,B. and Wang, Z. Y., 2001, 'Precision Ultrasonic Machining Process: a Case Study of Stress Analysis of Ceramic ($Al_2O_3$),' International Journal of Machine Tools and Manufacture, Vol. 41, Issue 8, pp. 1189-1208   DOI   ScienceOn
4 Zhang, Q. H., Zhang, J. H., Jia, Z. X. and Sun, J. L., 1999, 'Material-Removal-Rate Analysis in the Ultrasonic Machining of Engineering Ceramics,' Journal of Materials Processing Technology, Vol. 88, pp. 180-184   DOI   ScienceOn
5 Clark,D. E., Pantano, C. G., Jr. and Hench, L. L., 1979, 'Corrosion of Glass,' Books for Industry and the Glass Industry, p. 1
6 Pei, Z. J. and Ferreira, P. M., 1998, 'Modeling of Ductile-Mode Material Removal in Rotary Ultrasonic Machining,' International Journal of Machine Tools and Manufacture, Vol. 38, pp. 1399-1418   DOI   ScienceOn
7 Ming, H., Wang, S., Louis Plebani, and Sathyanarayanan, G., 1997, 'Ultrasonic Machining,' Manufacturing Science and Technology, Trans. Of ASME, Vol. 2, pp. 169-176
8 Thoe, T. B., Aspinwall, D. K. and Wise, M. L. H., 1998, 'Review on Ultrasonic Machining,' International Journal of Machine Tools and Manufacture, Vol. 38, Issue 4, pp. 239-255   DOI   ScienceOn
9 Zhao Wansheng, Wang Zhenlong, 'Ultrasonic and Electric Discharge Machining to Deep and Small Hole on Titanium Alloy' Journal of Materials Processing Technology, Vol. 120, pp. 101-106   DOI   ScienceOn
10 Lee, T. C. and Chan, C. W., 1997, 'Mechanism of the Ultrasonic Machining of Ceramic Composites,' Journal of Materials Processing Technology, Vol. 71, pp. 195-201   DOI   ScienceOn