• Journal of Sensor Science and Technology
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• v.17 no.2
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• pp.147-150
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• 2008

Multiple ZnO nanorod device detecting $NO_2$ gas was fabricated by sol-gel growth method and gas response characteristics were measured as a chemical gas sensor. The device is mainly composed of sensing electrode and sensing nano material. To acquire high sensitivity of the device for $NO_2$ gas it was heated by a heat chuck up to $400^{\circ}C$ The sensing part was easily made using the CMOS compatible process, for example, the large area and low temperature nano material growth process, etc. The sensors were successfully demonstrated and showed high sensitive response for $NO_2$ gas sensing.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1998.11a
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• pp.163-166
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• 1998

The mechanism of methane sensing by Pd-SiC diode was investigated over the temperature range of 400~$600^{\circ}C$. The effects or methane gas reaction on the parameters such as barrier height, initial rate of methane gas reaction are investigated. The methane gas reaction kinetics on the device are also discussed. The physical and chemical mechanism responsible for methane detection are proposed. Analysis of steady-state reaction kinetics using I-V method confirmed that methane gas reaction processes are responsible for the barrier height change in the diode.

• Journal of Sensor Science and Technology
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• v.29 no.4
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• pp.220-226
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• 2020

Graphene has been widely considered a promising candidate for high-quality chemical sensors, owing to its outstanding characteristics, such as sensitive gas adsorption at room temperature, high conductivity, high flexibility, and high transparency. However, the main drawback of a graphene-based gas sensor is the necessity for external heaters due to its slow response, incomplete recovery, and low selectivity at room temperature. Conventional heating devices have limitations such as large volume, thermal safety issues, and high power consumption. Moreover, metal-based heating systems cannot be applied to transparent and flexible devices. Thus, to solve this problem, a method of supplying the thermal energy necessary for gas sensing via the self-heating of graphene by utilizing its high carrier mobility has been studied. Herein, we provide a brief review of recent studies on self-activated graphene-based gas sensors. This review also describes various strategies for the self-activation of graphene sensors and the enhancement of their sensing properties.

• Proceedings of the IEEK Conference
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• 2003.07b
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• pp.727-730
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• 2003

Thin tin oxide film with nano-size particle was prepared on silicon substrate by hydrothermal synthetic method and successive sol-gel spin coating method. The fabrication method of tin oxide film with ultrafine nano-size crystalline structure was tried to be applied to fabrication of micro gas sensor array on silicon substrate. The tin oxide film on silicon substrate was well patterned by chemical etching upto 5${\mu}{\textrm}{m}$width and showed very uniform flatness. The tin oxide film preparation method and patterning method were successfully applied to newly proposed 2-dimensional micro sensor fabrication.

• Fire Science and Engineering
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• v.11 no.3
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• pp.15-23
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• 1997

In this study, the alumina for gas sensor was prepared by anodic oxidation. It was stable thermally and chemically, and pore diameter and pore distribution was uniform. And the shape of pore was cylinderical. The aluminum plate was carried out by the thermal oxidation, chemical polishing and electropolishing pretreatment. The pore diameter, pore size distribution, pore density and thickness of alumina was observed with the change of reaction temperature, electrolyte concentration and current density. As a results, It was able to use for carrier because alumina which was prepared by anodic oxidationhas uniform pore size distribution.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.6 no.2
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• pp.315-322
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• 2002

A thin film oxide semiconductor micro gas sensor array which shows only 60㎽ of power consumption at an operating temperature of 30$0^{\circ}C$ has been fabricated using microfabrication and rnicrornachining techniques. Excellent thermal insulation of the membrane is achieved by the use of a double la! or structure of 0.1${\mu}{\textrm}{m}$ thick Si$_3$N$_4$ and 1${\mu}{\textrm}{m}$ thick phosphosilicate glass(PSG) prepared by low pressure chemical vapor deposition(LPCVD) and atmospheric－pressure chemical-vapor deposition(APCVD), respectively. The sensor way consists of such thin film oxide semiconductor sensing materials as 1wt.％ Pd-doped SnO$_2$, 6wt.% AI$_2$O$_3$-doped ZnO, WO$_3$ and ZnO. The thin film oxide semiconductor micro gas sensor array exhibited resistance changes usable for subsequent data processing upon exposure to various gases and the sensitivity strongly depended on the sensing layer materials. Heater Part of the sensor structure has been modified in order to improve the process yield of the sensor, and as a result of modified heater structure improved process yield has been achieved.

• Journal of Sensor Science and Technology
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• v.29 no.6
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• pp.382-387
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• 2020

Hydrogen (H₂) is considered as a new clean energy resource for replacing petroleum because it produces only H₂O after the combustion process. However, owing to its explosive nature, it is extremely important to detect H₂ gas in the ambient atmosphere. This has triggered the development of H₂ gas sensors. 2-dimensional (2D) graphene has emerged as one of the most promising candidates for chemical sensors in various industries. In particular, graphene exhibits outstanding potential in chemoresistive gas sensors for the detection of diverse harmful gases and the control of indoor air quality. Graphene-based chemoresistive gas sensors have attracted tremendous attention owing to their promising properties such as room temperature operation, effective gas adsorption, and high flexibility and transparency. Pristine graphene exhibits good sensitivity to NO₂ gas at room temperature and relatively low sensitivity to H₂ gas. Thus, research to control the selectivity of graphene gas sensors and improve the sensitivity to H₂ gas has been performed. Noble metal decoration and metal oxide decoration on the surface of graphene are the most favored approaches for effectively controlling the selectivity of graphene gas sensors. Herein, we introduce several strategies that enhance the sensitivity of graphene gas sensors to H₂ gas.

• Journal of Sensor Science and Technology
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• v.25 no.2
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• pp.103-109
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• 2016

Recent light-enhanced metal oxide gas sensors are reviewed in this article. The basic mechanisms of a light-enhanced metal oxide gas sensor are discussed. Many literatures reveal that the standalone sensitivity and the response/recovery time enhancements enabled by the exposing light are not as high as the performance enhancement provided by external heating. Therefore, both optimal amount of external heating and exposed light intensity are necessary to increase the performance of these light-enhanced gas sensors. The development of highly light sensitive materials and structures is important to lower the overall power consumptions of the sensors.

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.11 no.6
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• pp.123-132
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• 2012

Gas sensors has been used very differently that depending on following purposes; Automotive (exhaust gas, fuel mixture gas, oxygen, particulates), agriculture / food industry (fresh, stored, CO2, humidity, NH3, nitrogen oxide gas, organic gas, toxic gas emitted from pesticides and insecticides), industrial / medical (chemical gas, hydrogen, oxygen and toxic gases), military (chemical weapon), environmental measurements (CO and other air pollution consisting of sulfur and nitrogen gas), residential (LNG, LPG, butane, indoor air, humidity). The types of industrial toxic substances are known about 700 species and many of these exist in gaseous form under normal conditions. he multi-gas detection sensors will be developed for casualties that detect the most important and find easy three kinds of gases in marine plant; carbon dioxide(CO2), carbon(CO), ammonia(NH3). Package block consists of gas sensing device minor ingredient, rf front end, zigbee chip. Develope interworking technology between the sensor and zigbee chip inside a package. Conduct a performance test through test jig about prototype zigbee sensor module with rf output power and unwanted emission test. This research task available early address when poisonous gas leaked from large industrial site and contribution for workers' safety at the enclosed space.

• Journal of the Korean Institute of Gas
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• v.12 no.2
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• pp.32-37
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• 2008

For a development of U-safety system, liquid/gas-sensors that are easy to carry and install in any place are needed. Therefore, in this work, we prepared porous gold using a templating method with nanoporous alumina, and it was used as sensing materials and electrode. The resulting materials showed high purity macroporous structure with $200{\sim}300\;nm$ of window-pore and $4.8\;m^2/g$ of surface area. Because porous gold had good electric conductivity, convenience to measure the change of electric resistivity and good reproducibility, it could be used as potential sensing materials. As a proof-of-concept test, the detection test for mercury ion was carried out.