Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1998.11a
- /
- Pages.163-166
- /
- 1998
$CH_4$ Gas Sensor Utilizing Pd-SiC Schottky Diode
Pd-SiC 쇼트키 다이오드를 이용한 $CH_4$ 가스센서
Abstract
The mechanism of methane sensing by Pd-SiC diode was investigated over the temperature range of 400~