• 한국기계가공학회지
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• 제2권4호
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• pp.17-24
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• 2003

Chemical mechanical polishing(CMP) has been applied for planarization of topography after patterning process in semiconductor fabrication process. Tungsten CMP is necessary to build up interconnects of semiconductor device. But the tungsten dishing and the oxide erosion defects appear at end-point during tungsten CMP. It has been known that the generation of dishing and erosion is based on the over-polishing time, which is determined by pattern selectivity. Fixed abrasive pad takes advantage of decreasing the defects resulting flam reducing pattern selectivity because of the lower abrasive concentration. The manufacturing technique of fixed abrasive pad using hydrophilic polymers is introduced in this paper. For application to tungsten CMP, chemicals composed of oxidizer, catalyst, and acid were developed. In comparison of the general pad and slurry for tungsten CMP, the fixed abrasive pad and the chemicals resulted in appropriate performance in point of removal rate, uniformity, material selectivity and roughness.

• 대한금속재료학회지
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• 제49권9호
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• pp.708-714
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• 2011

The premature failure of a servovalve used for six months in a thermal power plant has been analyzed. The servovalve was made of stainless steel, containing 16Cr-0.44Mo, along with other elements. An overload of oil-supply pumping and an abnormal increase in the oil flux were observed during operation. A study revealed that erosion and corrosion could be the main causes of the failure. The visual examination of the servovalve did not show any appreciable damage. However, corrosion and erosion of the servovalve were observed using scanning electron microscopy (SEM). Upon examination of the servovalve, the corrosion was found to have occurred throughout the bushing and spool; however, erosion occurred at only the edge-side. In addition, the condition of the electrohydraulic control system (EHC) oil was investigated with respect to its satisfaction of the management standard.

• 한국물환경학회지
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• 제31권6호
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• pp.693-699
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• 2015

It has been known that torrential rainfall events have been occurring worldwide due to climate change. The accelerated soil erosion has caused negative impacts on water quality and ecosystem of receiving waterbodies. Since soil security issues have been arising in various areas of the world, intensive interests have been given to topsoil management in Korea. Thus in this study, Web GIS-based computing system of physical, chemical, and biological topsoil quality indices were developed. In this study, five soil quality maps at national scale and top soil erosion potential were prepared for evaluation of soil quality based on soil erosion potential. For this system, the open source Web GIS engine, OpenGeo, was used as core engine of the system. With this system, decision makers or related personnel in areas of soil erosion Best Management Practices (BMPs) would be able to find the most appropriate soil erosion BMPs based on soil erosion potential and soil quality at the area of interest. The Web GIS system would be efficiently used in decision making processes because of ease-of-use interface and scientific data used in this system. This Web GIS system would be efficiently used because this system could provide scientific knowledge to decision makers or stakeholders. Currently various BMP database are being built to be used as a decision support system in topsoil management and topsoil quality areas.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.16-16
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• 2011

Plasmas in saline solutions receive considerable attention in recent years. How the operating parameters influence the plasma characteristics and how the electrode erosion occurs have been topics that require further study. In the first part of this talk, the effect of the frequency on the plasmas characteristics in saline solution driven by 50~1000 Hz AC power will be presented. Two distinct modes, namely bubble and jetting modes, are identified. The bubble mode occurs under low frequencies. In this mode, one mm-sized bubble is tightly attached to the electrode tip and oscillates with the applied voltage. With an increase in the frequency, it shows the jetting mode, in which many smaller bubbles are continuous formed and jetted away from the electrode surface. Multiple mechanisms that are potentially responsible to such a change in bubble dynamics have been proposed and the dominant mechanism is identified. From the Stark broadening of the hydrogen optical emission line, electron densities in both modes are estimated. It shows clearly that the driving frequency greatly influences the bubble dynamics, which in turn alters the plasma behavior. In the second part, the study of the erosion of a tungsten electrode immersed in saline solution under conditions suitable for bio-medical applications is presented. The electrode is immersed in 0.1 M saline solution and is positively or negatively biased using a DC power source up to 600 V. It is identified that when the electrode is positively biased, erosion by the surface electrolytic oxidation is the dominant mechanism with an applied voltage below 150 V. An increase in the applied voltage leads to the formation of the plasma and the damage by the plasma and the thermal effect becomes more prominent. The formation of the gas film at the electrode surface leads to the formation of the plasma and hinders the electrolytic erosion. In the negatively-biased electrode, no electrolytic oxidation is seen and the damage is mostly likely due to the plasma erosion and the thermal effect.

• 한국수자원학회논문집
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• 제41권5호
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• pp.473-482
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• 2008

본 연구의 목적은 최근 끝막이 공사가 완료된 새만금 인공호 점착성 퇴적물의 침식특성을 정량적으로 분석하는 것이다. 침식실험은 국내 최초로 제작되고 그 타당성이 검증된 전북대 환형수조를 이용하여 각기 다른 밀도를 갖는 균일저면 조건하에서 수행되었으며, 새만금 인공호 점착성 퇴적물의 침식한계전단응력 및 침식률계수가 정량적으로 산정되었다. 한편, 일반적으로 점착성 퇴적물의 침식특성은 퇴적물의 물리.화학적 기본특성에 따라 크게 변화하므로, 새만금 인공호 점착성 퇴적물의 이러한 특성 또한 조사되었으며, 이와 연계하여 침식특성이 해석되었다. 새만금 인공호 점착성 퇴적물의 경우에, 저면밀도 $1.17{\sim}1.34g/cm^3$ 범위에서 침식한계전단응력은 $0.26{\sim}0.52N/m^2$로 로그함수적으로 증가하였으며, 침식률계수는 $14.28{\sim}6.02mg/cm^2\;hr$ 범위로 지수함수적으로 감소하였다. 산정된 침식 매개변수들은 타 지역 점착성 퇴적물과 또한 비교/분석되었으며, 그 값은 정량적으로 지역마다 크게 다른 것으로 나타났다. 특히 새만금 인공호 점착성 퇴적물의 침식한계전단응력은 군산해역 퇴적물보다는 크며, 시화호 퇴적물과는 유사한 것으로 나타났으며, 반면에 새만금 인공호 퇴적물의 침식률계수는 군산해역 퇴적물보다는 작은 것으로 나타났다.

• Corrosion Science and Technology
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• 제4권2호
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• pp.64-68
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• 2005

Various metallic materials are coated on Fe base materials via thermal spraying or welding process to improve both corrosion resistance as well as erosion resistance of the Fe base materials used in buildings and special works. The mechanical properties and corrosion resistance of the coat are estimated by means of hardness measurement and anodic polarization test. In additions, the effect of alloying elements and microstructure of the coatings on the mechanical and chemical properties of the coat is investigated using X- ray diffraction, Optical microscope, Transmission electron microscopy and Auger analysis. The coating deposited by tungsten inert gas (TIG) welding exhibit a good combination of hardness and corrosion properties.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2006년도 제26회 춘계학술대회논문집
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• pp.141-143
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• 2006

추진기관 노즐 삭마에 대한 연구 결과를 보면 이 삭마라 불리는 현상에는 융삭(Ablation), 기계적 침식(Erosion), 그리고 화학적 부식(Corrosion)의 3가지 형태로 일어난다고 알려져 있다. 또 이 3가지 현상은 각각 작동 원으로 열전달 계수, 전단력, 화학적 농도 구배 등을 사용하여 표현 할 수 있다. 이 3가지 현상에 대하여 상관관계를 상사 해석 방법을 채택하고, 노즐 내벽의 가스 유속 즉 마하수를 노즐 형상(위치)의 함수로 표시하고 보면 총 삭마 현상을 각각의 현상의 크기를 비교해 볼 수 있다. 이 비교를 통하여 상호 크기를 비교해 본다.

• 전기학회논문지
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• 제62권12호
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• pp.1694-1699
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• 2013

Frequency accelerated partial discharge resistance (PDR) aging of epoxy/layered silicate nanocomposite with 1.5wt % additions of layered silicate was investigated in comparison with that of epoxy without layered silicate in terms of PD(partial discharge) erosion depth. It was found that the change in the erosion depth is far smaller in specimens with layered silicate than those without layered silicate nano particles. Frequency acceleration can be done from 60Hz to 1000Hz. But the depth of erosion is less proportional to frequency. Acceleration factor is almost 2 times between 500Hz and 1000Hz, but it is much less than about 8.3 times between 60Hz and 500Hz. This superior PD resistance is caused by the presence of nanofillers, anano-effect due to closely packed nanofillers, and strong chemical bonds at layered silicate nanofillers /resin interfaces.

• Journal of Chest Surgery
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• 제25권1호
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• pp.112-116
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• 1992

I clinically analysed 13 cases of broncholithiasis which treated surgically and found only four cases of broncholithiasis caused by the erosion of the peribronchial lymph node named by extrinsic formation[Group II], and nine cases of broncholithiasis caused by intrinsic formation[group I] which indicates that no evidence of the erosion of the calcified per-ibronchial lymph node into the bronchial tree was found. This study is performed to see any differences between two groups regarding presenting symptoms, locations of broncholith, preoperative diagnosis, a history of pulmonary tuberculosis, a procedure of operation, and chemical compositions of broncholiths from both groups. There was no difference between two groups in the presenting symptoms, the procedure of operation, and chemical compositions of broncholiths. The broncholits from group two is located in the right middle lobe bronchus, and the broncholiths of group one were distributed at various bronchi, In group one, only five cases out of nine had preoperative diagnosis[55.5%], but in group two, all four had preoperative diagnosis. All cases had good postoperative courses without any complication and recurrences.

• 한국해안해양공학회지
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• 제18권4호
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• pp.283-293
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• 2006

본 연구의 목적은 금강 하구역 표층에 분포하는 점착성 퇴적물의 침식특성을 정량적으로 산정하고, 그 침식특성의 계절적 변화와 타 지역 침식특성 결과와의 비교/분석을 통한 공간적 변화를 해석하는데 있다. 또한 점착성 퇴적물의 침식특성은 퇴적물 자체의 물리 화학적 기본특성에 의해 크게 영향을 받으므로, 본 연구에서는 이러한 퇴적물의 기본특성이 침식특성에 미치는 영향에 대해서도 해석하였다. 침식실험은 균일저면 조건에서 1개 지점에 대해 계절별로(가을과 겨울) 4회씩 총 8회의 실험이 환형수조를 사용하여 수행되었으며 그 결과 저면밀도 $1.15{\sim}1.34g/cm^3$ 범위에서 침식한계전단응력(${\tau}_{ce.s}$)은 $0.12{\sim}0.36N/m^2$, 침식률 계수(${\varepsilon}_{M.S}$)는 $120.91{\sim}6.72mg/cm^2{\cdot}hr$ 범위의 값을 갖는 것으로 확인되었으며, 산정된 침식특성 매개변수들은 다른 점착성 퇴적물(Okeechobee호, Kaolinite)과 비교해 정량적으로 상당한 차이를 보였으나 금강 하구역 내에서의 계절적 변화는 미미한 것으로 나타났다.