• Journal of the Korean Society of Manufacturing Process Engineers
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• v.2 no.4
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• pp.17-24
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• 2003

Chemical mechanical polishing(CMP) has been applied for planarization of topography after patterning process in semiconductor fabrication process. Tungsten CMP is necessary to build up interconnects of semiconductor device. But the tungsten dishing and the oxide erosion defects appear at end-point during tungsten CMP. It has been known that the generation of dishing and erosion is based on the over-polishing time, which is determined by pattern selectivity. Fixed abrasive pad takes advantage of decreasing the defects resulting flam reducing pattern selectivity because of the lower abrasive concentration. The manufacturing technique of fixed abrasive pad using hydrophilic polymers is introduced in this paper. For application to tungsten CMP, chemicals composed of oxidizer, catalyst, and acid were developed. In comparison of the general pad and slurry for tungsten CMP, the fixed abrasive pad and the chemicals resulted in appropriate performance in point of removal rate, uniformity, material selectivity and roughness.

• Korean Journal of Metals and Materials
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• v.49 no.9
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• pp.708-714
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• 2011

The premature failure of a servovalve used for six months in a thermal power plant has been analyzed. The servovalve was made of stainless steel, containing 16Cr-0.44Mo, along with other elements. An overload of oil-supply pumping and an abnormal increase in the oil flux were observed during operation. A study revealed that erosion and corrosion could be the main causes of the failure. The visual examination of the servovalve did not show any appreciable damage. However, corrosion and erosion of the servovalve were observed using scanning electron microscopy (SEM). Upon examination of the servovalve, the corrosion was found to have occurred throughout the bushing and spool; however, erosion occurred at only the edge-side. In addition, the condition of the electrohydraulic control system (EHC) oil was investigated with respect to its satisfaction of the management standard.

• Journal of Korean Society on Water Environment
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• v.31 no.6
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• pp.693-699
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• 2015

It has been known that torrential rainfall events have been occurring worldwide due to climate change. The accelerated soil erosion has caused negative impacts on water quality and ecosystem of receiving waterbodies. Since soil security issues have been arising in various areas of the world, intensive interests have been given to topsoil management in Korea. Thus in this study, Web GIS-based computing system of physical, chemical, and biological topsoil quality indices were developed. In this study, five soil quality maps at national scale and top soil erosion potential were prepared for evaluation of soil quality based on soil erosion potential. For this system, the open source Web GIS engine, OpenGeo, was used as core engine of the system. With this system, decision makers or related personnel in areas of soil erosion Best Management Practices (BMPs) would be able to find the most appropriate soil erosion BMPs based on soil erosion potential and soil quality at the area of interest. The Web GIS system would be efficiently used in decision making processes because of ease-of-use interface and scientific data used in this system. This Web GIS system would be efficiently used because this system could provide scientific knowledge to decision makers or stakeholders. Currently various BMP database are being built to be used as a decision support system in topsoil management and topsoil quality areas.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.16-16
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• 2011

Plasmas in saline solutions receive considerable attention in recent years. How the operating parameters influence the plasma characteristics and how the electrode erosion occurs have been topics that require further study. In the first part of this talk, the effect of the frequency on the plasmas characteristics in saline solution driven by 50~1000 Hz AC power will be presented. Two distinct modes, namely bubble and jetting modes, are identified. The bubble mode occurs under low frequencies. In this mode, one mm-sized bubble is tightly attached to the electrode tip and oscillates with the applied voltage. With an increase in the frequency, it shows the jetting mode, in which many smaller bubbles are continuous formed and jetted away from the electrode surface. Multiple mechanisms that are potentially responsible to such a change in bubble dynamics have been proposed and the dominant mechanism is identified. From the Stark broadening of the hydrogen optical emission line, electron densities in both modes are estimated. It shows clearly that the driving frequency greatly influences the bubble dynamics, which in turn alters the plasma behavior. In the second part, the study of the erosion of a tungsten electrode immersed in saline solution under conditions suitable for bio-medical applications is presented. The electrode is immersed in 0.1 M saline solution and is positively or negatively biased using a DC power source up to 600 V. It is identified that when the electrode is positively biased, erosion by the surface electrolytic oxidation is the dominant mechanism with an applied voltage below 150 V. An increase in the applied voltage leads to the formation of the plasma and the damage by the plasma and the thermal effect becomes more prominent. The formation of the gas film at the electrode surface leads to the formation of the plasma and hinders the electrolytic erosion. In the negatively-biased electrode, no electrolytic oxidation is seen and the damage is mostly likely due to the plasma erosion and the thermal effect.

• Journal of Korea Water Resources Association
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• v.41 no.5
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• pp.473-482
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• 2008

The purpose of this study is to quantitatively estimate the erosional properties for cohesive sediment from Saemankeum artificial lake. A series of erosion tests were conducted with Chonbuk annular flume, which is the first one constructed in this country and verified with validities. Each erosion tests were conducted under a uniform bed condition but a different bed density respectively, and its critical shear stress for erosion(${\tau}_{ce}$) as well as the erosion rate coefficient (${\varepsilon}_M$) were determined quantitatively. Since the erosional properties of the cohesive sediments vary largely depending in the physico-chemical properties, such properties of Saemankeum sediments were also estimated and their effects on the erosional properties were analyzed. For Saemankeum sediments, it can be seen that ${\tau}_{ce}$ increases from $0.26N/m^2$ to $0.52N/m^2$ and ${\varepsilon}_M$ decreases exponentially from $14.28mg/cm^2\;hr$ to $6.02mg/cm^2\;hr$, as the bed density varies from $1.17g/cm^3$ to $1.34g/cm^3$. The erosional parameters of Saemankeum sediments are found to be remarkably different in quantity as compared with those for cohesive sediments from other sites. Particularly, ${\tau}_{ce}$ for Saemankeum sediments is known to be larger than that of Kunsan sediments but similar with that of Shihwa sediments, while ${\varepsilon}_M$ for Saemankeum sediments is shown to be smaller than that for Kunsan sediments.

• Corrosion Science and Technology
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• v.4 no.2
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• pp.64-68
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• 2005

Various metallic materials are coated on Fe base materials via thermal spraying or welding process to improve both corrosion resistance as well as erosion resistance of the Fe base materials used in buildings and special works. The mechanical properties and corrosion resistance of the coat are estimated by means of hardness measurement and anodic polarization test. In additions, the effect of alloying elements and microstructure of the coatings on the mechanical and chemical properties of the coat is investigated using X- ray diffraction, Optical microscope, Transmission electron microscopy and Auger analysis. The coating deposited by tungsten inert gas (TIG) welding exhibit a good combination of hardness and corrosion properties.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2006.05a
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• pp.141-143
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• 2006

It is well known that there are three mechanisms in the nozzle surface regression, namely ablation, mechanical erosion and chemical corrosion. There are Analogies among these three mechanisms. In order to compare the order of the magnitude of these mechanism, the analogy was adapted and the Mach number of the gas flow was expressed by the nozzle shape(location).

• The Transactions of The Korean Institute of Electrical Engineers
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• v.62 no.12
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• pp.1694-1699
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• 2013

Frequency accelerated partial discharge resistance (PDR) aging of epoxy/layered silicate nanocomposite with 1.5wt % additions of layered silicate was investigated in comparison with that of epoxy without layered silicate in terms of PD(partial discharge) erosion depth. It was found that the change in the erosion depth is far smaller in specimens with layered silicate than those without layered silicate nano particles. Frequency acceleration can be done from 60Hz to 1000Hz. But the depth of erosion is less proportional to frequency. Acceleration factor is almost 2 times between 500Hz and 1000Hz, but it is much less than about 8.3 times between 60Hz and 500Hz. This superior PD resistance is caused by the presence of nanofillers, anano-effect due to closely packed nanofillers, and strong chemical bonds at layered silicate nanofillers /resin interfaces.

• Journal of Chest Surgery
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• v.25 no.1
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• pp.112-116
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• 1992

I clinically analysed 13 cases of broncholithiasis which treated surgically and found only four cases of broncholithiasis caused by the erosion of the peribronchial lymph node named by extrinsic formation[Group II], and nine cases of broncholithiasis caused by intrinsic formation[group I] which indicates that no evidence of the erosion of the calcified per-ibronchial lymph node into the bronchial tree was found. This study is performed to see any differences between two groups regarding presenting symptoms, locations of broncholith, preoperative diagnosis, a history of pulmonary tuberculosis, a procedure of operation, and chemical compositions of broncholiths from both groups. There was no difference between two groups in the presenting symptoms, the procedure of operation, and chemical compositions of broncholiths. The broncholits from group two is located in the right middle lobe bronchus, and the broncholiths of group one were distributed at various bronchi, In group one, only five cases out of nine had preoperative diagnosis[55.5%], but in group two, all four had preoperative diagnosis. All cases had good postoperative courses without any complication and recurrences.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.18 no.4
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• pp.283-293
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• 2006

The purpose of this study is to quantitatively estimate the erosional properties for cohesive sediments on Keum Estuary. Then the spatial variation was evaluated, through analyzing and comparing the seasonal variation of the erosional properties in Keum Estuary with that of the erosional properties in the other sites. As erosional properties of cohesive sediments are also influenced largely by basic physico-chemical property of cohesive sediments themselves, the impact that the basic physico-chemical property has on the erosional properties is analyzed in this study. Erosional tests are performed under the condition of uniform beds. Total 8 times of tests using an annular flume are also conducted in a location, low times respectively by seasons: the fall, winter. Experimental results of erosional tests show that the critical shear stress for erosion varies in the range of $0.12{\sim}0.36N/m^2$ and the coefficient of erosion rate varies in the range of $120.91{\sim}6.72mg/cm^2{\cdot}hr$, over the corresponding bulk-density range $1.15{\sim}1.34g/cm^3$. Although the calculated parameters of erosional properties are remarkably different in quantity compared with those of other cohesive sediments(lake Okeechobee) and Kaolinite, their seasonal variabilities within Keum Estuary appear to be insignificant.