Electric Properties of PLZT Thin Films Prepared Using ECR PECVD method for the Charge Storage Capacitor of a High Density Memory (ECR PECVD법으로 제조한 고접적 메모리 소자 charge storage capacitor용 PLZT 박막의 전기적 특성)
-
- Proceedings of the Materials Research Society of Korea Conference
- /
- 1996.11a
- /
- pp.69-69
- /
- 1996