A Numerical Study on the Flow Uniformity according to Chamber Shapes Used for Test of the Semi-Conductor Chip (반도체 칩 테스트용 챔버 형상에 따른 유동 균일성에 대한 수치적 연구)
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- Transactions of the Korean hydrogen and new energy society
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- v.31 no.5
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- pp.480-488
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- 2020