A Numerical Study on the Flow Uniformity according to Chamber Shapes Used for Test of the Semi-Conductor Chip |
LEE, DAEGYU
(Mechanical Engineering, Graduate School of Jeonbuk National University)
MA, SANG-BUM (Clean Energy R&D Department, Korea Institute of Industrial Technology) KIM, SUNG (Clean Energy R&D Department, Korea Institute of Industrial Technology) KIM, JEONG-YEOL (Clean Energy R&D Department, Korea Institute of Industrial Technology) KANG, CHAEDONG (Mechanical Engineering, Jeonbuk National University) KIM, JIN-HYUK (Clean Energy R&D Department, Korea Institute of Industrial Technology) |
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