• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.9
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• pp.790-794
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• 2003

This paper describes the fabrication and characteristics of ceramic thin film type pressure sensors based on Ta-N strain gauges for high temperature applications. Ta-N thin-film strain gauges are deposited onto a thermally oxidized Si diaphragm by RF sputtering in an argon-nitrogen atmos[here($N_2$ gas ratio: 8%, annealing condition: 90$0^{\circ}C$, 1 hr.), patterned on a wheatstone bridge configuration, and used as pressure sensing elements with a high stability and a high gauge factor. The sensitivity is 1.097 ～ 1.21 mV/Vㆍkgf/$\textrm{cm}^2$ in the temperature range of 25 ～ 200 $^{\circ}C$ and the maximum non-linearity resistance), non-linearity than existing Si piezoresistive pressure sensors. The fabricated ceramic thin-film type pressure sensor is expected to be usefully applied as pressure and load sensors that os operable under high-temperature.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.731-734
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• 2002

This paper describes on the fabrication and characteristics of a ceramic thin-film pressure sensor based on Ta-N strain gauges for harsh environment applications. The Ta-N thin-film strain gauges are sputter deposited onto a micromachined Si diaphragms with buried cavity for overpressure protectors. The proposed device takes advantages of the good mechanical properties of single crystalline Si as diaphragms fabricated by SDB and electrochemical etch-stop technology, and in order to extend the operating temperature range, it incorporates relatively the high resistance, stability and gauge factor of Ta-N thin-films. The fabricated pressure sensor presents a low temperature coefficient of resistance, high sensitivity, low non-linearity and excellent temperature stability. The sensitivity is $1.097{\sim}1.21mV/V{\cdot}kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.2
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• pp.69-75
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• 2005

In order to improve the reliability of high voltage rotating machines and mold transformers, it is necessary to understand the breakdown mechanism and life assessment of the high voltage winding parts. Especially the on-line PD test provides the ability to monitor effects, such as slot discharge, internal discharge, and end-winding discharge without interrupting the electrical machines, this method has been proven the major testing technology. Capacitive couplers have been the most widely used sensors for the on-line partial discharge detection in rotating machines nowadays. This paper deals with the electrical characteristics and long-term reliability of a ceramic coupler(CC), which can be easily mounted into high voltage input terminal part, has been developed and tested to continuously measure PD activity during operating condition. This paper presents electrical characteristics (dielectric loss angle, capacitance, PD inception level, breakdown voltage, and frequency response bandwidth) and long-term life test result of the developed 6.6 kV class on-line ceramic coupling sensor. It was found that this sensor had good electrical characteristics to detect PD activity during the operating condition with its detection frequency band is between several and several tens MHz. Also, the voltage life of the 6.6kV class ceramic coupler was calculated over 60 years.

• Journal of Powder Materials
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• v.27 no.2
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• pp.111-118
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• 2020

The convergence of artificial intelligence with smart factories or smart mechanical systems has been actively studied to maximize the efficiency and safety. Despite the high improvement of artificial neural networks, their application in the manufacturing industry has been difficult due to limitations in obtaining meaningful data from factories or mechanical systems. Accordingly, there have been active studies on manufacturing components with sensor integration allowing them to generate important data from themselves. Additive manufacturing enables the fabrication of a net shaped product with various materials including plastic, metal, or ceramic parts. With the principle of layer-by-layer adhesion of material, there has been active research to utilize this multi-step manufacturing process, such as changing the material at a certain step of adhesion or adding sensor components in the middle of the additive manufacturing process. Particularly for smart parts manufacturing, researchers have attempted to embed sensors or integrated circuit boards within a three-dimensional component during the additive manufacturing process. While most of the sensor embedding additive manufacturing was based on polymer material, there have also been studies on sensor integration within metal or ceramic materials. This study reviews the additive manufacturing technology for sensor integration into plastic, ceramic, and metal materials.

• Journal of the Korean Ceramic Society
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• v.38 no.1
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• pp.52-55
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• 2001

Polyacrylonitrile(PAN)-based 탄소섬유와 epoxy resin matrix 내에 장착된 PAN-based 탄소섬유의 전기저항을 탄소섬유와 파괴될 때까지 인장강도를 증가시키며 측정하였다. 탄소섬유가 끊어져 측정 계기가 open-circuit을 나타내기 전까지 탄소섬유의 전기저항 값은 strain이 증가할수록 증가하였으며, epoxy resin은 탄소섬유의 저항값 측정에 거의 영향을 미치지 않았다. 탄소섬유의 저항값 변화는 strain에 대해 정확도 1% 이내로 예측(calibrate)할 수 있었으며 재현성 또한 우수하였다. 따라서 탄소섬유는 재료의 기계적 강도를 증가시키기 위해 사용될 수 있을 뿐만 아니라 구조재료의 파괴를 예측할 수 있는 스마트 센서로서도 사용할 수 있다는 가능성을 확인하였다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.7
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• pp.3191-3196
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• 2013

Ultrasonic transducer is the sensor which is measuring distance. Piezo ceramic of ultrasonic sensor and adhesive technique of matching layer are the most core techniques. With the study of relation on matching layer which takes off the ultrasonic wave into the air, this paper aims to find the second useful frequency as the results which can be changed are extracted in case piezo ceramic and matching layer are bonded. And the experiment is done with piezo ceramic as real piezoelectric element and matching layer of chemical wood. OD of piezo ceramic has designed by ${\Phi}50{\times}3T$ and OD of matching layer is designed by ${\Phi}62{\times}12t$ with ${\lambda}=1/4$. Acoustic impedance is generated at the most optimum resonant frequency of 53 Khz. As experimental result, more available frequency can be generated by using the adhesive close to solid than the flexible one.

• Proceedings of the Korea Concrete Institute Conference
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• 2001.11a
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• pp.391-396
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• 2001

In order to estimate thermal cracking in mass concrete and to decide the removal time of the forms outside the concrete structures in wintertime, temperature measurement is indispensible. Until now, the measurement system employs thermocouple type. In this paper, we introduce economical and accurate NTC(Negative Temperature Coefficient) ceramic type measurement system. In principle, NTC ceramic type sensor is very sensitive in the range -20~15$0^{\circ}C$. In this range, the signal change is so large that the sensor needs less amplification than thermocouple. Therefore, not only the sensor itself is inexpensive but also the system is too. In this experiments the temperature of the NTC system are identical to those of thermocouple. In conclusion, inexpensive NTC thermistor system is very adequate to the temperature measurement during concrete curing.

• Journal of the Korean Ceramic Society
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• v.37 no.6
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• pp.537-544
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• 2000

Thin-film humidity sensor which TiO2, ZrO2, or CeO2 was added to MgCr2O4-based materials, respectively, were fabricated on the alumina substrate by using a resistant-heating evaporator. Thin films were approximately 2${\mu}{\textrm}{m}$ in grain size and shwoed porous microstructures. The resistance of the sensor decreased with increasing the relative humidity and the MgCr2O4-TiO2 sensor had the best humidity-sensing characteristics (linearity in relative humidity versus resistance).

• Journal of Sensor Science and Technology
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• v.25 no.3
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• pp.173-177
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• 2016

Tape casting ceramics technology has been adopted for the fabrication of solid state electrochemical $CO_2$ sensors and the packaging substrates. The fabricated $CO_2$ sensors exhibit a fast response and a good recovery with the almost theoretical sensitivity of 37 mV/decade, corresponding to a sensor operating temperature of 373 K. The two packaging methods, the wire bonding package and the surface- mounted on the ceramic package, were compared with respect to their power consumption and mass production feasibility. In terms of the ease of fabrication, the surface mount packaging technology is superior to the wire bonding technology but its power consumption is approximately twice that of the wired package.

• Journal of the Korean Ceramic Society
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• v.55 no.1
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• pp.1-20
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• 2018

Semiconducting nanomaterials have attracted considerable interest in recent years due to their high sensitivity, selectivity, and fast response time. In addition, for portable applications, they have low power consumption, lightweight, simple in operation, a low maintenance cost. Furthermore, it is easy to manufacture microelectronic sensor structures with metallic oxide sensitive thin layers. The use of semiconducting metal oxides to develop highly sensitive chemiresistive sensing systems remains an important scientific challenge in the field of gas sensing. According to the sensing mechanisms of gas sensors, the overall sensor conductance is determined by surface reactions and the charge transfer processes between the adsorbed species and the sensing material. The primary goal of the present study is to explore the possibility of using semiconducting mixed metal oxide nanostructure as a potential sensor material for selective gases.