• Proceedings of the Korean Ceranic Society Conference
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• 2000.10a
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• pp.160.1-160
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• 2000

• Proceedings of the Korean Vacuum Society Conference
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• 1996.02a
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• pp.91-91
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• 1996

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09b
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• pp.907.2-907.2
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• 2006

• Proceedings of the Korean Ceranic Society Conference
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• 2003.10a
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• pp.147.1-147
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• 2003

• Proceedings of the Korean Ceranic Society Conference
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• 2003.10a
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• pp.210.2-210
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• 2003

• Proceedings of the Materials Research Society of Korea Conference
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• 1998.08a
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• pp.81.1-81
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• 1998

• Journal of Sensor Science and Technology
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• v.23 no.6
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• pp.420-424
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• 2014

Aluminum-scandium nitride ($Al_{1-x}Sc_xN$) thin films with a TiN buffer layer have been fabricated on SUS430 substrate by RF reactive magnetron sputtering at room temperature under 50% $N_2$/Ar. The effect of Sc-doping on the structure and piezoelectric properties of AlN films has been investigated using SEM, XRD, surface profiler and pressure-voltage measurements. The as-deposited AlN films showed polycrystalline phase, and the Sc-doped AlN film, the peak of AlN (002) plane and the crystallinity became very strong. With Sc-doping, the crystal size of AlN film was grown from ~20 nm to ~100 nm. The output signal voltage of AlN sensor showed a linear behavior between 15~65 mV, and output signal voltage of Sc-doped AlN sensor was increased over 7 times. The pressure-sensing sensitivity of AlN film was calculated about 10.6mV/MPa, and $Al_{0.88}Sc_{0.12}N$ film was calculated about 76 mV/MPa.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.11
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• pp.702-706
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• 2016

We demonstrated that self-separation FS-GaN (freestanding-GaN) was grown on MELO (maskless epitaxially lateral overgrowth) GaN template by horizontal HVPE (hydride vapor phase epitaxy). Before thick GaN grwoth, MELO GaN template was grown on patterned GaN template by MOCVD (metal organic chemical vapor deposition). The laterally overgrown GaN would consist of a continuous well coalesced layer. The mixed TDD (threading dislocation density) of seed and wing region were $8{\times}10^8cm^{-2}$ and $7{\times}10^7cm^{-2}$, respectively. After thick GaN grown by HVPE, the self-separation between thick GaN and sapphire substrate was generated at seed region. The regions of self-separation for FS-GaN and sapphire were observed by FE-SEM. Moreover, Raman results indicated that the compressive strain of seed and wing regions at FS-GaN substrate were slightly released compared to that of thick GaN grown on conventional GaN template. The optical properties of the FS-GaN substrate were examined by using PL (photoluminescence). The PL exhibited that donor bound exciton and donor acceptor pair were observed at low temperature. The effects on optical and structural properties of FS-GaN substrate have been discussed in detail.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.20 no.4
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• pp.168-172
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• 2010

Superhydrophilic thin film consisted of positively charged poly (allylamine hydrochloride) (PAH) and negatively charged poly (acrylic acid) (PAA) was fabricated by a layer-by-layer (LBL) self-assembly. Glutaraldehyde (GA) was used in order to increase an adhesion hardness by amine-aldehyde reaction. The surface morphology, thickness, transmittance, water contact angle and adhesion hardness of PAH/PAA thin film with or without GA were measured. The adhesion hardness of PAH/PAA thin film with GA deposition increased over 2 times although the film thickness of PAH/GA/PAA decreased than that of PAH/PAA thin film. The increase of adhesion hardness by amine-aldehyde reaction between PAH and GA was measured by fourier transform infrared (FT-IR) spectroscopy. Fabricated PAH/PAA and PAH/GA/PAA thin films showed water contact angel under $5^{\circ}$ and high transmittance over 91.3% at 550 nm.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.11a
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• pp.41.1-41.1
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• 2009

Aerosol Deposition (AD) is anovel way to fabricate bioactive ceramic coatings in biomedical implants and prostheses applications. In the present work, silicon-substituted hydroxyapatite (HA) coatings on commercially pure titanium were prepared by aerosol deposition using Si-HA powders. The incorporation of silicon in the HA lattice is known to improve the bioactivity of the HA, makingsilicon-substitute HA an attractive alternative to pure HA in biomedical applications. Si-HA powders with the chemical formula $Ca_{10}(PO_4)_6-x(SiO_4)x(OH)_2-x$, having silicon contents up to x=0.5 (1.4 wt%), were synthesized by solid-state reaction of $Ca_2P_2O_7$, $CaCO_3$, and $SiO_2$. The Si-HA powders were characterized by X-ray diffraction (XRD), X-ray fluorescence spectrometry (XRF), and Fourier transform infrared spectroscopy(FT-IR). The corresponding coatings were also analyzed by XRD, scanning electron microscopy (SEM), and electron probe microanalyzer (EPMA). The results revealed that a single-phase Si-HA was obtained without any secondary phases such as $\alpha$- or $\beta$-tricalcium phosphate (TCP) for both the powders and the coatings.The Si-HA coating was about $5\;{\mu}m$ thick, had a densemicrostructure with no cracks or pores. In addition, the proliferation and alkaline phosphatase (ALP) activity of MC3T3-E1 preosteoblast cells grown on the Si-HA coatings were significantly higher than those on the bare Ti and pure HA coating. These results revealed the stimulatory effects induced by siliconsubstitution on the cellular response to the HA coating.