• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.03b
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• pp.13-13
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• 2010

Piezoelectric sensors are extensively used to measure force because of their high sensitivity and low cost. however, the development of device with reduced size but with improved sensitivity is highly important. Low-temperature co-fired ceramic (LTCC) is one of promising materials for this application than a silicon substrate because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of PZT thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• Journal of Sensor Science and Technology
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• v.15 no.3
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• pp.216-221
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• 2006

ZnO thin films prepared by PLD method exhibit an excellent optical property, but may have some problems such as incomplete surface roughness and crystallinity. In this study, undoped ZnO buffer layers were deposited on (0001) sapphire substrates by ultra high vacuum pulse laser deposition (UHV-PLD) and molecular beam epitaxy (MBE) methods, respectively. After post annealing of ZnO buffer layer, undoped ZnO thin films were deposited under different oxygen pressure ($35{\sim}350$ mtorr) conditions. The Arsenic-doped (1, 3 wt%) ZnO thin layers were deposited on the buffer layer of undoped ZnO by UHV-PLD method. The optical property of the ZnO thin films was analyzed by photoluminescence (PL) measurement. The ${\theta}-2{\theta}$ XRD analysis exhibited a strong (002)-peak, which indicates c-axis preferred orientation. Field emission-scanning electron microscope (FE-SEM) revealed that microstructures of the ZnO thin films were varied by oxygen partial pressure, Arsenic doping concentration, and deposition method of the undoped ZnO buffer layer. The denser and smoother films were obtained when employing MBE-buffer layer under lower oxygen partial pressure. It was also found that higher Arsenic concentration gave the enhanced growing of columnar structure of the ZnO thin films.

• Journal of Biosystems Engineering
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• v.32 no.6
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• pp.448-454
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• 2007

This study was conducted to develop a 100 kPa soil tensiometer mainly consisted of a porous ceramic cup, water-holding tube, and a digital vacuum gauge, through theoretical design analysis and experimental performance evaluation. Major findings were as follows. 1. Theoretical analysis showed that air entry value of a porous media decreased as the maximum effective size of the pore increased, and the maximum diameter of the pores was $2.9\;{\mu}m$ for measuring up a 100 kPa of soil-water tension. 2. Property analysis of tensiometer porous cups supplied in Korean domestic market indicated that main components were $SiO_2$ and $Al_2O_3$ with a porosity range of $33.8{\sim}49.3%$. 3. The porous cup selected through sample fabrication and air-permeability tests showed weight ratios of 87% and 11% for $Al_2O_3$ and $SiO_2$. The analysis of SEM (scanning electron microscope) images showed that the sample was sintered at temperatures of about $1150^{\circ}C$, which consisted of pores with sizes of up to 25% of those for commercial porous cups. 4. The prototype soil tensiometer was fabricated using the developed porous cup and a digital vacuum gauge that could measure water tension with a pressure of 85 kPa in air tests. 5. In-soil tests of the prototype conducted during a period of 25-day drying showed that soil-water tension values measured with the prototype and commercial units were not significantly different, and soil-water characteristic curves could be established for different soils, confirming accuracy and stability of the prototype.

• Journal of Sensor Science and Technology
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• v.15 no.2
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• pp.84-89
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• 2006

Highly concentrated p-type ZnO thin films can be obtained by doping of N, P and As elements. In this study, undoped ZnO buffer layers were prepared on a (0001) sapphire substrate by a ultra high vaccum pulsed laser deposition(UHV-PLD) method. ZnO buffer layers were deposited with various deposition temperature($400{\sim}700^{\circ}C$) at 350 mtorr of oxygen working pressure. Arsenic doped(1 wt%) ZnO thin films were deposited on the ZnO buffer layers by UHV-PLD. Crystallinity of the samples were evaluated by X-ray diffractometer and scanning electron microscopy. Optical, electrical properties of the ZnO thin films were estimated by photoluminescence(PL) and Hall measurements. The optimal condition of the undoped ZnO buffer layer for the deposition of As-doped ZnO thin films was at $600^{\circ}C$ of deposition temperature.

• Journal of the Korean Society of Industry Convergence
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• v.23 no.5
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• pp.817-823
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• 2020

In recent, the machining of difficult-to-cut materials such as titanium alloys, stainless steel, Inconel, ceramic, glass, and carbon fiber reinforced plastics (CFRP) used in aerospace, automobile, medical industry is actively researched. Abrasive waterjet is a non-traditional processing method in which ultra-high pressure water and abrasive particles are mixed in a mixing chamber and shoot out jet through a nozzle, and removed by erosion due to collision with a material. In particular, the nozzle of the abrasive waterjet is one of the most important parts that affect the machining quality as with a cutting tool in general machining. It is very important to monitor the condition of the nozzle because the workpiece is uncut or the surface quality deteriorates due to wear, expanding of the bore, damage of the nozzle and clogging of the abrasive, etc. Therefore, in this paper, we propose a monitoring system based on Acoustic Emission(AE) sensor that can detect nozzle condition in real time during AWJ processing.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1360-1362
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• 2001

본 논문에서는 다이어프램을 세라믹을 사용하여 2차 변환 소자로 금속 스트레인 게이지 대신에 thick film piezoresistor를 이용한 후막 압력센서에 관한 연구이다. 다이어프램의 미소 변형을 후막의 비저항 변화로 검출하는 압저항 효과를 이용하는 방식이다. 종래의 압력센서와 비교하여 크리프 현상이 적고, 안정성이 우수한 특징을 갖고 있다. 또한 저항선이나 박 게이지의 게이지율이 3$\sim$5 인 것이 비하면 후막저항을 사용한 경우, 약 15$\sim$20정도의 높은 게이지율을 얻을 수 있어서 측정범위를 넓게 할 수 있으며, 후막공정의 스크린 프린팅을 통한 자동화는 수율의 향상과 저 가격화를 실현할 수 있다. 또, 후막 저항형 압력센서는 두 개의 저항이 다이어프램의 중앙 부근에 위치하며, 나머지 두 개의 저항은 가장자리에 위치시킴으로써 미소 변형에서도 저항값의 변화를 읽을 수 있도록 하였고, 휘스톤 브리지의 연결 도체부는 Pt를 주성분으로 하는 conductive paste(DHC7085)를 사용하였다. 이렇게 설계.제작된 압력 센서를 지지대에 고정시킨 후 캡슐에 넣고 감도, 선형성, 히스테리시스 그리고 온도특성 등을 고찰하였다.

• Korean Journal of Materials Research
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• v.9 no.2
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• pp.163-167
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• 1999

LiNbO$_3$films were prepared by an rf-magnetron sputtering technique using sintered target containing potassium. The potassium was included to help to fabricate stoichiometric LiNbO$_3$film. Structural and electrical properties of thin films was investigated as a function of deposition condition. Optimum sputtering conditions were rf power of 100W, working pressure of 1m Torr and substrate temperature of 58$0^{\circ}C$. The thin film was grown to (012) preferred orientation. The dielectric constant of the thin film LiNbo$_3$ fabricated under optimum condition was 55 at 1MHz. Average grain size is about 200$\AA$ and roughness of the film is small enough to apply to optic devices.

• Journal of Sensor Science and Technology
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• v.6 no.6
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• pp.466-475
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• 1997

In this paper, an implantable middle ear hearing aids using an electromagnetic transducer which consists of a tiny coil and a magnet is designed, and objective design method to implement a vibrator of the electromagnetic type transducer is proposed. Sound characteristic of the electromagnetic type vibrator is excellent but power transfer rate is lower than that of a ceramic type. To improve power transfer efficiency of system, external and inner part of a middle ear system is designed using FM transmission method. We implemented an experimental set of the designed transducer, inner part, and outer part. Then, we measured vibration characteristics of a metal strip and a temporal bone of a dead body. As the results, we confirmed the advantage of FM method and showed that designed transducer could effectively transmit vibration of amplified input sound pressure to ossicle.

• Journal of Bio-Environment Control
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• v.20 no.2
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• pp.93-100
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• 2011

Maintenance of adequate soil water potential during the period of crop growth is necessary to support optimum plant growth and yields. A better understanding of soil water movement within and below the rooting zone can facilitate optimal irrigation scheduling aimed at minimizing the adverse effects of water stress on crop growth and development and the leaching of water below the root zone which can have adverse environmental effects. The objective of this study was to evaluate the feasibility of using a portable irrigation controller with an Watermark sensor for the cultivation of drip-irrigated vegetable crops in a greenhouse. The control capability of the irrigation controller for a soil water potential of -20 kPa was evaluated under summer conditions by cultivating 45-day-old tomato plants grown in three differently textured soils (sandy loam, loam, and loamy sands). Water contents through each soil profile were continuously monitored using three Sentek probes, each consisting of three capacitance sensors at 10, 20, and 30 cm depths. Even though a repeatable cycling of soil water potential occurred for the potential treatment, the lower limit of the Watermark (about 0 kPa) obtained in this study presented a limitation of using the Watermark sensor for optimal irrigation of tomato plants where -20 kPa was used as a point for triggering irrigations. This problem might be related to the slow response time and inadequate soil-sensor interface of the Watermark sensor as compared to a porous and ceramic cup-based tensiometer with a sensitive pressure transducer. In addition, the irrigation time of 50 to 60 min at each of the irrigation operation gave a rapid drop of the potential to zero, resulting in over irrigation of tomatoes. There were differences in water content among the three different soil types under the variable rate irrigation, showing a range of water contents of 16 to 24%, 17 to 28%, and 24 to 32% for loamy sand, sandy loam, and loam soils, respectively. The greatest rate increase in water content was observed in the top of 10 cm depth of sandy loam soil within almost 60 min from the start of irrigation.