• 한국산학기술학회논문지
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• 제12권4호
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• pp.1509-1514
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• 2011

IT 제품의 핵심 전자부품에는 MLCC, chip inductors, chip Varistors 등이 있다. chip의 전기적 특성을 검사하기 위해 리노핀을 이용한 접촉검사 방식이 사용되고 있다. 리노핀을 이용한 칩 검사에 고속으로 구동할 수 있는 Actuator가 필요하다. 그 중 PZT Actuator는 압전소자를 이용한 마이크로 Actuator의 하나로 높은 분해능 및 좋은 응답성 그리고 큰 힘을 낼 수 있는 장점을 가지고 있다. 하지만 진동변위가 매우 작다는 단점이 있다. 그래서 이러한 단점을 극복하기 위하여 변위 증폭구조를 설계하는 연구가 활발히 진행되고 있다. 따라서 본 논문에서는 유연힌지를 이용한 지레구조 증폭기구를 설계하였으며, 반도체칩 검사장비 산업분야에서 성능검사 및 전기적 특성을 측정할 수 있는 리노핀용 고속구동 Actuator 시스템을 개발하였다.

• 한국재료학회지
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• 제1권2호
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• pp.105-112
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• 1991

압전 actuator를 위한 새로운 형태의 재료를 개발하여, 그 특성들을 조사하였다. 이 압전 actuator는 세 층으로 구성되어 있다: 압전 세라믹 층, 조성이 점차로 변하는 중간층, 그리고 또 다른 압전 세라믹 층, 이러한 형태이 재료는 경사 기능 재료(Functionally Gradient Material, FGM)라 불리운다. 경사 기능 재료를 제작하기 위한 재료설계의 개념을 도입하여, FGM화에 있어서 열팽창에 의한 시편의 박리를 막기 위해 $(Pb,\;La)(Zr,\;Ti)O_3$계에서 서로 다른 세라믹스의 조성을 선택하였다. $1300^{\circ}C$, 2시간의 소성에 의해 경사 기능화된 PLZT는 약 $20\mu\textrm{m}$정도의 중간층을 형성하는 미세구조를 가지고 있었다. 경사 기능 재료에서의 유전 및 압전 등의 여러 특성은 두 접합 조성층 특성의 사이의 값을 나타내었다. 인가 전압에 따른 strain특성은 전반적으로 단일 시편의 특성보다 증가하였으며, 특히 접합 조성층에서 고압전-저유전성 조성과 저압전-고유전성 조성을 경사 기능화하였을 경우에 변위의 증가 정도가 더욱 향상되었다.

• 한국전기전자재료학회논문지
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• 제27권11호
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• pp.702-706
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• 2014

A comparative study has been attempted for microwave and conventional sintering of lead-free $Bi_{0.5}Na_{0.5}TiO_3(BNT)$-based multilayer ceramic actuators(MLAs). It was found that microwave sintering (MWS) could be successfully applied to the co-firing of piezoceramic/AgPd MLAs with a 10 times shorter firing cycle as well as $100^{\circ}C$ lower firing temperature ($850^{\circ}C$) for sufficient densification than conventional furnace sintering ($950^{\circ}C$). Furthermore, MWS-derived specimens showed better electric field-induced strain than that of CFS-derived specimens by effectively suppressing interdiffusions between ceramic and electrode layers.

• 한국세라믹학회지
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• 제35권5호
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• pp.512-520
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• 1998

PLZT(7.5/70/30) was initially a cubic phase having diffuse phase transition at high temperatures. Sn-sub-stitution for PLZT(7.5/70/30) underwent an irreversible phase transition from cubic to rhom-bohedral structure. However PLZTS(7.5/70/30/y=5 & 10) could be reversibly switched from paraelectric to ferroelectric phase under electric field without showing a significant change in crystal structure. With in-creasing the amount of Sn-substitution the P-E behaviors of the PLZTS became more antiferroelectric which was similar to the effect of La-substitution of PLZT. Our study may suggest that Sn-substitution ef-fectively weakens a formation of long-range order between polar Ti-or Zr- containing octahedra which greatly affects strain properties.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 춘계학술대회논문집B
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• pp.491-496
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• 2000

The objective of this study is to increase lift and decrease drag of an airfoil by delaying flow separation with piezo-ceramic actuators. The airfoil used is NACA 0012 and the chord length is 30cm. An experiment is performed at the freestream velocity of 15m/s at which the Reynolds number is $3{\times}10^5$. Seven rectangular actuators are attached to the airfoil surface and move up and down based on the electric signal. At the attack angle of $16^{\circ}$, the separation point is delayed downstream due to momentum addition induced by the movement of the actuators. Drag and lift are measured using an in-house 2-dimensional load cell and the surface pressures are also measured. Lift is increased by 10%, drag is reduced by 50%, and the efficiency is increased to 170%. The flow fields with and without control are visualized using the smoke-wire and tuft techniques.

• 한국세라믹학회지
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• 제26권6호
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• pp.802-810
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• 1989

The temperature dependence of piezoelectric strain constant and the electric field induced strain are investigated as a function of PT in 0.5[xPT-(1-x)PZ]-0.5PNN ceramics. The piezoelectric strain constant d31 has the highest value(360$\times$10-12m/V) at PT=0.68. The temperature dependence of d31 is improved as Curie temperature of sample is increased, and the electric field dependence of induced strain is decreased with the coercive field increased. This ceramic system shows both piezoelectric effect and electrostrictive effect under the applied electric field. The piezoelectric of tetragonal phase is higher than that of rhombohedral phase, and the magnitude of electrostrictive constant is appeared in the order of morphotropic, rhombohedral and tetragonal phase. The piezoelectric strain constant with applied field must be considered theelectrostrictive effect due to 90$^{\circ}$domain wall displacements, and the displacement of bimorph type actuator agrees with the calulated value well.

• 한국세라믹학회지
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• 제40권4호
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• pp.385-392
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• 2003

Sol-gel preparation technique using a chemical reaction of metal alkoxides has been widely used for the fabrication of various materials including ceramics. However, its mechanism has been studied till now because a number of chemical ways are possible from various alkoxides and additives. In this study, the mechanism of hydrolysis, condensation, and polymerization of alkoxides were investigated from the fabrication of lead-zirconate-titanate (PbZr$\_$x/Ti$\_$l-x/O$_3$; PZT) thin film that is used as various micro-actuator, transducer, and sensor because of its high electro-mechanical coupling factors and thermal stability. Furthermore, the fabrication process and characteristics of self-patternable PZT film using photosensitive stabilizer were studied in order to resolve the problem of physical damage and properties degradation during dry etching for device fabrication. Using an optimum condition to prepare the self-patternable PZT film, more than 5000 ${\AA}$ thick self-patternable PZT film could be fabricated by three times coating. The PZT film showed 28.4 ${\mu}$c/cm$^2$ of remnant polarization (Pr) and 37.0 kV/cm of coercive field (E$\_$c/).

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1798-1802
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• 2007

Adhesion strength of single layer ceramic capacitor sheet was measured using a peel testing system developed in this study. The peel test specimens with various dimensions were prepared from the ceramic sheet cast on the PET film. In peel test, the sheet specimen was adhered on the glass jig floating on the liquid media, which was designed to minimize the friction, and the specimen was then pulled up by micro-actuator. During the separation of the sheet from the PET film, peel force was measured. To normalize the testing condition, 3 different widths of the specimen were selected: 5, 10 and 20 mm. was used Furthermore, testing speed effect was investigated in this study. From the resullts using various testing conditions, the standard method for the peel strength testing may be suggested. Based on the testing condition, effect of peel angle on the strength was experimentally examined. It was found that the adhesive strength for the ceramic sheet is nearly identical, irrespective of the specimen width ranged from 5 to 20 mm, while the adhesive strength was increased with increasing testing speed. Furthermore, the strength was shown to be dependent on the peel angle.

• 한국세라믹학회지
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• 제52권4호
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• pp.237-242
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• 2015

$Bi_{0.5}(Na_{0.78}K_{0.22})_{0.5}TiO_3$ (BNKT) lead-free piezoelectric ceramics modified by $LaMnO_3$ (LM) were fabricated by conventional solid-state method. The crystal structure and the morphology of the lead free ceramics were analyzed by XRD (X-ray diffraction) and FE-SEM (Field Emission Scanning Electron Microscopy). The LM modified BNKT ceramics have a phase transition from ferroelectric tetragonal to non-polar pseudo-cubic. Despite decreases in the remnant polarization ($P_r$) and coercive field ($E_c$) in the P-E hysteresis loops, the electric-field induced strain properties were significantly enhanced by the LM modification. The highest value of $S_{max}/E_{max}=412pm/V$ at an applied electric field of 5 kV/mm was found in BNKT-0.01LM ceramic.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권8호
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• pp.417-422
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• 2006

This paper presents the effect of driving waveform for piezoelectric bend mode inkjet printhead with optimized mechanical design. Experimental and theoretical studies on the applied driving waveform versus jetting characteristics were performed. The inkjet head has been designed to maximize the droplet velocity, minimize voltage response of the actuator and optimize the firing frequency to eject ink droplet. The head design was carried out by using mechanical simulation. The printhead has been fabricated with Si(100) and SOI wafers by MEMS process and silicon direct bonding method. To investigate how performance of the piezoelectric ceramic actuator influences on droplet diameter and droplet velocity, the method of stroboscopy was used. Also we observed the movement characteristics of PZT actuator with LDV(Laser Doppler Vibrometer) system, oscilloscope and dynamic signal analyzer. Missing nozzles caused by bubbles in chamber were monitored by their resonance frequency. Using the water based ink of viscosity of 4.8 cps and surface tension of 0.025 N/m, it is possible to eject stable droplets up to 20 kHz, 4.4 m/s and above 8 pl at the different applied driving waveforms.