• 제목/요약/키워드: Carbon films

검색결과 952건 처리시간 0.032초

스프레이 코팅된 탄소나노튜브 박막을 이용한 알코올 가스 센서 (Alcohol Gas Sensors using Spray-coated Carbon Nanotube Thin Film)

  • 김성진
    • 한국전기전자재료학회논문지
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    • 제21권9호
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    • pp.783-788
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    • 2008
  • We suggest a CNT-based gas sensor for breath alcohol measurement. The sensor was composed of single-walled carbon nanotubes (SWCNTs) thin film on flexible PES (polyethersulfone) substrate, and the SWCNTs thin film was formed by multiple spray-coating with SWCNTs solution which was well-dispersed, highly controlled and functionalized in ethanol solvent. In this work, three types of SWCNTs thin films were deposited with changes in the number of spray-coatings to 20, 40 and 60 times in order to compare electrical response properties of the SWCNTs thin films. from the fabricated sensors, conductance and capacitance responses were measured and discussed. Alcohol gas sensors have been commercialized widely as gauge for breath alcohol measurement which is applicable to checking whether car drivers are drinking-driving or not. Our alcohol gas sensors showed good sensitivity and linearity even at room temperature.

수소결합에 의한 얇은 다중벽 탄소나노튜브의 자기조립 (Hydrogen Bonding-Driven Assembling of Thin Multiwalled Carbon Nanotubes)

  • 한중탁;김선영;우종석;이건웅
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.426-427
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    • 2007
  • Here we describe the formation of a self-assembled film of thin multiwalled carbon Nanotubes(t-MWNT) modified with hydroxy groups through hydrogen peroxide treatment. Morphologies of t-MWNT films could be controlled by the various coating method, such as filtering, drop casting, spraying method, etc. The results show that on densification of the CNT suspension during drying, multiple hydroxy group-modified MWNTs can be self-assembled through strong surface hydrogen bond interaction while MWNTs usually exist an entangled state in the film. The interaction between t-MWNT was illustrated from Raman spectrum of spray coated films.

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전기전도성 필름제조를 위한 탄소나노튜브 용해도 향상 (Enhanced Carbon Nanotube Dissolution for Electrically Conductive Films)

  • 이건웅;한동희;박수동;강동필
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.65-66
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    • 2006
  • Solubility of single wall carbon nanotubes (SWNTs) has been determined in various dispersing media by using the solvent parameters such as Kamlet-Taft parameter and 3-dimensional parameters. Nitric acid-treated SWNTs exhibit significantly improved solubility in hydrogen bondable solvents as well as in solvent mixtures. The forming bucky gel with ionic liquid allows for the new group of dissolving solvent. The dissolution behavior of SWNTs provides a route for SWNT dispersion/exfoliation in preparing electrically conductive films such as transparent electrode.

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MOVPE of ZnSe with DIPSe and DMZn

  • Soo, Huh-Jeung;Ok, Lim-Jeong
    • Journal of Korean Vacuum Science & Technology
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    • 제2권2호
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    • pp.118-121
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    • 1998
  • Diisopropylselenide (DIPSe) is employed for the metalorganic vapor phase epitaxy (MOVPE) of ZnSe in order to eliminate premature gas phase reaction while maintaining negligible carbon incorporation and preserving relatively low growth temperature. In combination with dimethylzinc, single crystalline ZnSe layers were grown on GaAs at temperature around 450$^{\circ}C$. Secondary ion mass spectrometry showed a negligible carbon incorporation in ZnSe films grown from DIPSe even at high [Ⅵ]/[II] ratios, in contrast of a carbon concentration of 1021 cm-3 in ZnSe films grown from diallyselenide (DASe). Crystalline and interface quality are demonstrated by secondary electron microscopy, secondary ion mass spectroscopy and double crystal X-ray diffraction.

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실리콘이 첨가된 다이아몬드상 카본 필름의 트라이볼로지적 특성에 미치는 환경변화의 영향 (Effect of Environment on the Tribological Behavior of Si-incorporated Diamond-like Carbon Films)

  • 양승호;공호성;이광렬;박세준;김대은
    • Tribology and Lubricants
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    • 제16권3호
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    • pp.188-193
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    • 2000
  • An experimental study was performed to discover the effect of environment on the tribological behavior of Si-incorporated diamond-like carbon(Si-DLC) film slid on a steel ball. The films were deposited on Si(100) wafers by a radio-frequency glow discharge of mixtures of benzene and dilute silane gases. Experiments using a ball-on-disk test-rig was performed in vacuum, dry air and ambient air conditions. It was observed that coefficient of friction decreased as the environment changed from vacuum, to dry air. Chemical analyses of debris suggested that low and stable friction is closely related to the formation of silicon-rich oxide debris and the rolling action.

Effect of Carbon Dioxide Adsorption on LDPE/Zeolite 4A Composite Film

  • Jung, Bich Nam;Shim, Jin Kie;Hwang, Sung Wook
    • 한국포장학회지
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    • 제24권3호
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    • pp.149-157
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    • 2018
  • Low density polyethylene (LDPE) has been researched in many industrial applications, and LDPE/zeolite 4A composites has been extensively studied for many applications such as microporous, breathable film and so on. LDPE/zeolite composite have a great potential for carbon dioxide adsorption film due to its high adsorption ability. In this study, LDPE/zeolite 4A composites with various contents were prepared by melt mixing process, and co-extrusion process was applied to develop a $CO_2$ adsorption conventional film and foamed film. The thermal, rheological, mechanical, physical and morphological properties of composite films has been characterized, and $CO_2$ adsorption of the composite films evaluated by thermogravimetric analysis (TGA) and the performance was found to be about 18 cc/g at 30.9 wt% of the zeolite content.

Friction and wear of DLC films in water environment

  • Suzuki, Masahiro;Umeda, Kazunori;Ohana, Tsuguyori;Tanaka, Akihiro
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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    • pp.177-177
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    • 2002
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가연성 가스 인식을 위한 $SnO_2$계열의 박막 가스센서 ($SnO_2$-based thin film gas sensors in array for recognizing inflammable gases)

  • 이대식;심창현;이덕동
    • 한국진공학회지
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    • 제10권3호
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    • pp.289-297
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    • 2001
  • 가연성 가스의 검지 및 인식을 위하여, SnO$_2$계열의 4가지 종류의 박막을 형성하였다. 감지막 형성을 위하여, Sn, Pt/Sn, Au/Sn 그리고 Pt, Au/Sn 막을 Sn의 열증착과 귀금속의 스퍼터링으로 증착하였다. 증착된 박막들을 $700^{\circ}C$ 정도에서 2 시간 열산화시켜 $SnO_2$계열의 감지막을 형성하였다. 제작된 박막은 tetragonal구조의 $SnO_2$이었고, 가스 흡착을 위한 가스 흡착점과 기공도를 많이 갖고 있었다. 스퍼터로 형성된 박막보다 열산화법으로 형성된 박막이 고감도를 보였다. 제작 박막들은 작업환경기준치정도의 저농도에서 측정 가연성 가스(부탄, 프로판, LPG, 일산화탄소)에 대해 고감도와 재현성을 나타내었다. 특히, 백금(30 $\AA$)을 첨가한 박막이 LPG와 부탄 가스에 대해, 순수 열산화된 $SnO_2$ 박막이 프로판과 일산화탄소에 대하여 가장 고감도를 나타내었다. 이들 센서들의 각 가스별로 차별화된 감도패턴을 이용하여 주성분 분석 기법을 통해 환경기준치(LEL, TLV) 범위에서 부탄, 프로판, LPG, 일산화탄소와 같은 가연성 가스의 종류 인식 및 정량을 인식할 수 있었다.

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$N_2/CH_4$가스비에 따른 Hydrogenated Amorphous Carbon Nitride 박막의 특성 (Hydrogeneted Amorphous Carbon Nitride Films on Si(100) Deposited by DC Saddle Field Plasma Enhanced Chemical Vapor Deposition)

  • 장홍규;김근식;황보상우;이연승;황정남;유영조;김효근
    • 한국진공학회지
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    • 제7권3호
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    • pp.242-247
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    • 1998
  • DC saddle-field-plasma-enhanced chemical-vapor deposition(PECVD) 장치를 이용 하여 상온에서 p-type Si(100)기판위에 hydrogenated amorphous carbon nitride [a-C:H(N)] 박막을 증착하였다. 원료가스인 $CH_4$$N_2$의 전체압력은 90mTorr로 고정하고 $N_2/CH_4$비를 0 에서 4까지 변화하면서 제작한 a-C:H(N)박막의 미세구조의 변화를 연구하였다. 진공조의 도달 진공도는 $1\times10^{-6}$Torr이고, 본 실험시 $N_2+CH_4$가스의 유량은 5sccm으로 고정하고 배 기량을 조절하여 진공조의 가스 압력을 90mTorr로 고정하였으며 기판에 200V의 직류 bias 전압을 인가하였다. $\alpha$-step과 X-ray photoelectron spectroscopy(XPS)를 이용한 분석결과 $N_2/CH_4$비가 0에서 0.5로 증가함에 따라 박막 두께는 4840$\AA$에서 2600$\AA$으로 급격히 감소하 였으며, 박막내의 탄소에 대한 질소함유량(N/C비)는 N2/CH4비가 4일 때 최대 0.25로 증가하 는 것을 확인하였다. 또한 XPS 스펙트럼의 fitting 결과 $N_2/CH_4$비가 증가할수록 CN결합이 증가하였다. Fourier Transformation Infrared(FT-IR) 분석결과 $N_2/CH_4$비가 증가함에 따라 박막내의 C-H결합은 감소하고, N-H, C≡N결합은 증가하였다. Optical bandgap 측정 결과 $N_2/CH_4$비가 0에서 4로 증가함에 따라 a-C:H(N)박막의 bandgap 에너지는 2.53eV에서 2.3eV 로 감소하는 것을 확인하였다.

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펄스 레이저 증착법에 의한 DLC 박막 제작 연구 (Study on the fabrication of DLC thin films by pulsed laser deposition)

  • 정영식;은동석;이상렬;정해석;박형호
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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    • pp.285-287
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    • 1997
  • We have deposited hydrogen-free diamond-like carbon (DLC) films by pulsed laser deposition of graphite. Pulsed laser deposition (PLD) can be utilized to generate films with desired properties quite different from those of the starting material. Since DLC films grown by PLD using turbo pump are perpared without hydrogen, they have a higher density and a higher index of refraction than the hydrogenated DLC films. In this study, effects of the substrate temperature and laser energy density on the properties of DLC films were systematically investigated. The structure and properties of the films have been studied by scanning electron microscopy (SEM), Fourier Transform Infrared (FT-IR), X-ray diffraction (XRD), and Raman spectroscopy.

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