Tribology and Lubricants

Korean Tribology Society (한국트라이볼로지학회)
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Effect of Environment on the Tribological Behavior of Si-incorporated Diamond-like Carbon Films

실리콘이 첨가된 다이아몬드상 카본 필름의 트라이볼로지적 특성에 미치는 환경변화의 영향

  • 양승호 (한국과학기술연구원 트라이볼로지 연구센타) ;
  • 공호성 (한국과학기술연구원 트라이볼로지 연구센타) ;
  • 이광렬 (한국과학기술연구원 박막기술연구센터) ;
  • 박세준 (한국과학기술연구원 박막기술연구센터) ;
  • 김대은 (연세대학교 기계공학과)
  • Published : 2000.06.01
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Abstract

An experimental study was performed to discover the effect of environment on the tribological behavior of Si-incorporated diamond-like carbon(Si-DLC) film slid on a steel ball. The films were deposited on Si(100) wafers by a radio-frequency glow discharge of mixtures of benzene and dilute silane gases. Experiments using a ball-on-disk test-rig was performed in vacuum, dry air and ambient air conditions. It was observed that coefficient of friction decreased as the environment changed from vacuum, to dry air. Chemical analyses of debris suggested that low and stable friction is closely related to the formation of silicon-rich oxide debris and the rolling action.

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References

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