• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2000년도 Proceedings of 5th International Joint Symposium on Microeletronics and Packaging
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• pp.118-118
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• 2000

New single-source precursor, [AlCI3:NH2tBu] was synthesized for AlN thin f film processing with AICI3 (Aluminum Chloride) and tBuNH2 (tert-butylamine). AlN thin films for packaging aspplication were deposited on sapphire substrate by a atmosph하ie-pressure MOCVD. In most of other study methyl-based AI precursors w were used for source, But herein Aluminum Chloride was used for as AI source i in order to prevent the carbon contamination in the films and stabilize the p precursor. New precursor showed the very high gas vapor pressure so it allowed to m make the film under atmospheric-pressure and get the high purified film. High q quality AlN thin film was obtained at 700 to $900^{\circ}C$. The new precursor was p purified by a sublimation technique and help to fabricate high purity film. It s showed high vapor pressure, which is able to a critieal factor for the high purity a and atmospheric CVD of AlN. High Quality AIN thin film was obtained at $700-900^{\circ}C$. The AIN film was characterized by RBS

• 한국식품과학회지
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• 제36권5호
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• pp.733-739
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• 2004

과실의 연화 및 변색이 가장 적게 발생되는 과실 크기별 봉지 규격을 구명하고 이와 더불어 연화 및 변색과 상관관계를 가지는 봉지 내 산소와 이산화탄소 농도와의 관계를 이용하여, 최적 기체 농도가 이루어지도록 PE 필름 봉지의 적정 규격을 모델링하고자 하였다. 다섯 등급으로 선과된 과실(LL:261g, L:217g, M:188g, S:168g, SS:154g)을 작업성과 미관을 고려하여 과실과 봉지 사이의 간격을 1-1.5cm 되게 PE 필름 봉지를 적용시켰을 때, LL은 150mm, L은 140mm, M과 S는 130mm, SS는 120mm의 봉지 폭에 각각 376mm, 357mm, 344mm, 333mm, 318mm의 봉지 길이가 적절하였다. 연화 및 흑변과 갈변 발생을 최소화하는 봉지 내 산소와 이산화탄소 농도는 각각 0.5-1.0%와 6.0-8.0%였으며, 이를 유지할 수 있는 과실 크기별 PE 필름 봉지의 최적두께는 LL은 $45{\mu}m$, L은 $50{\mu}m$, M은 $55{\mu}m$, S는 $60{\mu}m$, SS는 $65{\mu}m$로 조사되었다. 주어진 과실 크기에 맞는 봉지의 면적$(mm^2)$은 과실의 중량(g)에 대한 2차 단순회귀$(Y=-4055.707+627.993X_1-0.701{X_1}^2)$가 매우 적합하였고, 이 때 PE 필름 봉지 내에 원하는 수준의 산소나 이산화탄소 농도(Y, %)를 유지할 수 있는 PE 필름의 두께를 구하는 회귀식은 과실 중량$(X_1,\;g)$과 봉지 두께$(X_2,\; {\mu}m)$의 선형 중회귀$(O_2:Y=5.798-0.0109X_1-0.0491X_2,\;CO_2:Y=-2.427+0.01927X_l+0.09646X_2)$가 가장 적합하였다.

• 한국정밀공학회지
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• 제27권12호
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• pp.28-32
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• 2010

Technical demands for aspheric glass lens formed in market increases its application from simple camera lens module to fiber optics connection module in optical engineering. WC is often used as a metal core of the aspheric glass lens, but the long life time is issued because it fabricated in high temperature and high pressure environment. High hard thin film coating of lens core increases the core life time critically. Diamond Like Carbon(DLC) thin film coating shows very high hardness and low surface roughness, i.e. low friction between a glass lens and a metal core, and thus draw interests from an optical manufacturing industry. In addition, DLC thin film coating can removed by etching process and deposit the film again, which makes the core renewable. In this study, DLC films were deposited on the SiC ceramic core. The process variable in FVA(Filtered Vacuum Arc) method was the substrate bias-voltage. Deposited thin film was evaluated by raman spectroscopy, AFM and nano indenter and measured its crystal structure, surface roughness, and hardness. After applying optimum thin film condition, the life time and crystal structure transition of DLC thin film was monitored.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2001년도 춘계학술발표회 초록집
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• pp.73-73
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• 2001

Boron-containing materials have several excellent properties, such as superlnardness, insulation and non-Rinear optical property. Recently, oxynitride compounds, such as Si(ON), Ti(ON), became the promising materials applied in diffusion barrier layer and solar cell. With the expectation of obtaining the hybrid property, we have firstly grown the BON thin film by radio frequency (R.F.) plasma enhanced metalorganic chemical vapm deposition (PEMOCVD) with 100 kHz frequency and trimethyl borate precursor. The plasma source gases used in this study were Ar and $H_2$, and two kinds of nhmgen source gases, $N_2$ and <$NH_3$, were also employed. The as-grown films were characterized by XPS, IR, SEM and Knoop microlhardness tester. The relationship between the films hardness and the growth rate indicated that the hardness of the film was dependent on several factors such as nitrogen source gas, substrate temperature and film thickness due to the variation of the composition and the structure of the film. Both nitrogen and carbon content could raise the film hardness, on which nitrogen content did stronger effect than carbon. The smooth morphology and continuous structure was benefit of obtaining high hardness. The maximum hardness of BON film was about 10 GPa.

• 한국결정성장학회지
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• 제23권2호
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• pp.93-100
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• 2013

지구 온난화의 대표적인 주범인 $CO_2$를 저감하기 위하여 많은 연구가 진행되고 있다. 특히 가스 하이드레이트 형성원리를 이용한 $CO_2$ 분리 및 저장 공정이 주목을 받고 있다. 본 연구는 필름형 $CO_2$ 하이드레이트의 결정성장 거동에 관하여 성장 메커니즘을 규명하였다. 다양한 압력조건에서 반회분식 교반 반응기를 이용하여 $CO_2$ 하이드레이트를 형성시켰으며 객체가스의 용해도 차이를 최소화하기 위하여 모든 실험에서 온도는 고정하였다. 공급된 가스는 순도 99.999 %의 $CO_2$ 가스를 사용하였고, CCD 카메라(Nikon DS-5M/Fi1/2M-U2)가 장착된 광학현미경을 사용하여 관찰 결과를 실시간 기록하였다. 실험에 적용되는 압력에 따라서 하이드레이트 성장형태와 성장속도는 매우 큰 차이를 보였다. 특히 2.0 MPa 이상의 압력에서 가장 큰 변화를 관찰하였으며, 이것은 $CO_2$의 농도 차이와 모세관 힘에 의한 것으로 사료된다.

• Tribology and Lubricants
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• 제9권1호
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• pp.62-69
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• 1993

Friction and wear behavior of a carbon/carbon composite material for aircraft brake material was experimentally investigated. Friction and wear test setup was designed and built for the experiment. Friction and wear tests were conducted under various sliding conditions. Friction coefficients were measured and processed by a data acquisition system and amount of wear measured by a balance. Stainless steel disk was used as the counterface material. Temperature was also measured by inserting thermocouple 2.5 mm beneath the sliding surface of the carbon/carbon composite specimen. Wear surfaces were observed by SEM, and analyzed by EDAX. The experimental results showed that sliding speed and normal force did not have significant effects on friction coefficient and wear factor of the composite. Temperature increase just below the surface was not large enough to cause any thermal degradation or oxidation which occurred at higher temperature when tested by TGA. Wear film was generated both on the specimen and on the counterface at relatively low sliding speed but cracks, grooves, and wear debris were observed at high sliding speed. Friction coefficient remained almost constant when the sliding speed or normal load was varied. It is believed that the adhesive and abrasive components contributed mainly to the friction coefficient. Wear behavior at low sliding speed was governed by wear film formation and adhesive wear mechanism. At high speed, fiber orientation, ploughing by counterface asperities, and fiber breakage dominated wear of the carbon/carbon composite.

• Bulletin of the Korean Chemical Society
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• 제32권3호
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• pp.939-942
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• 2011

Conductive carbon films were prepared at room temperature by unbalanced magnetron sputtering (UBMS) on silicon substrates using argon (Ar) gas, and the effects of post-annealing temperature on the structural, tribological, and electrical properties of carbon films were investigated. Films were annealed at temperatures ranging from $400^{\circ}C$ to $700^{\circ}C$ in increments of $100^{\circ}C$ using a rapid thermal annealing method by vacuum furnace in vacuum ambient. The increase of annealing temperature contributed to the increase of the ordering and formation of aromatic rings in the carbon film. Consequently, with increasing annealing temperature the tribological properties of sputtered carbon films are deteriorated while the resistivity of carbon films significantly decreased from $4.5{\times}10^{-3}$ to $1.0{\times}10^{-6}\;{\Omega}-cm$ and carrier concentration as well as mobility increased, respectively. This behavior can be explained by the increase of sp2 bonding fraction and ordering $sp^2$ clusters in the carbon networks caused by increasing annealing temperature.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2009년도 춘계학술대회 논문집
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• pp.111-112
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• 2009

Diamond-like carbon (DLC) is a convenient term to indicate the compositions of the various forms of amorphous carbon (a-C), tetrahedral amorphous carbon (ta-C), hydrogenated amorphous carbon and tetrahedral amorphous carbon (a-C:H and ta-C:H). The a-C film with disordered graphitic ordering, such as soot, chars, glassy carbon, and evaporated a-C, is shown in the lower left hand corner. If the fraction of sp3 bonding reaches a high degree, such an a-C is denoted as tetrahedral amorphous carbon (ta-C), in order to distinguish it from sp2 a-C [2]. Two hydrocarbon polymers, that is, polyethylene (CH2)n and polyacetylene (CH)n, define the limits of the triangle in the right hand corner beyond which interconnecting C-C networks do not form, and only strait-chain molecules are formed. The DLC films, i.e. a-C, ta-C, a-C:H and ta-C:H, have some extreme properties similar to diamond, such as hardness, elastic modulus and chemical inertness. These films are great advantages for many applications. One of the most important applications of the carbon-based films is the coating for magnetic hard disk recording. The second successful application is wear protective and antireflective films for IR windows. The third application is wear protection of bearings and sliding friction parts. The fourth is precision gages for the automotive industry. Recently, exciting ongoing study [1] tries to deposit a carbon-based protective film on engine parts (e.g. engine cylinders and pistons) taking into account not only low friction and wear, but also self lubricating properties. Reduction of the oil consumption is expected. Currently, for an additional application field, the carbon-based films are extensively studied as excellent candidates for biocompatible films on biomedical implants. The carbon-based films consist of carbon, hydrogen and nitrogen, which are biologically harmless as well as the main elements of human body. Some in vitro and limited in vivo studies on the biological effects of carbon-based films have been studied [$2{\sim}5$].The carbon-based films have great potentials in many fields. However, a few technological issues for carbon-based film are still needed to be studied to improve the applicability. Aisenberg and Chabot [3] firstly prepared an amorphous carbon film on substrates remained at room temperature using a beam of carbon ions produced using argon plasma. Spencer et al. [4] had subsequently developed this field. Many deposition techniques for DLC films have been developed to increase the fraction of sp3 bonding in the films. The a-C films have been prepared by a variety of deposition methods such as ion plating, DC or RF sputtering, RF or DC plasma enhanced chemical vapor deposition (PECVD), electron cyclotron resonance chemical vapor deposition (ECR-CVD), ion implantation, ablation, pulsed laser deposition and cathodic arc deposition, from a variety of carbon target or gaseous sources materials [5]. Sputtering is the most common deposition method for a-C film. Deposited films by these plasma methods, such as plasma enhanced chemical vapor deposition (PECVD) [6], are ranged into the interior of the triangle. Application fields of DLC films investigated from papers. Many papers purposed to apply for tribology due to the carbon-based films of low friction and wear resistance. Figure 1 shows the percentage of DLC research interest for application field. The biggest portion is tribology field. It is occupied 57%. Second, biomedical field hold 14%. Nowadays, biomedical field is took notice in many countries and significantly increased the research papers. DLC films actually applied to many industries in 2005 as shown figure 2. The most applied fields are mold and machinery industries. It took over 50%. The automobile industry is more and more increase application parts. In the near future, automobile industry is expected a big market for DLC coating. Figure 1 Research interests of carbon-based filmsFigure 2 Demand ratio of DLC coating for industry in 2005. In this presentation, I will introduce a trend of carbon-based coating research and applications.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.353-353
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• 2008

Carbon nanotubes (CNTs) are attractive for field emitter because of their outstanding electrical, mechanical, and chemical properties. Several applications using CNTs as field emitters have been demonstrated such as field emission display (FED), backlight unit (BLU), and X-ray source. In this study, we fabricated a CNT cathode using transparent ultra-thin CNT film. First, CNT aqueous solution was prepared by ultrasonically dispersing purified single-walled carbon nanotubes (SWCNTs) in deionized water with sodium dodecyl sulfate (SDS). To obtain the CNT film, the CNT solution in a milliliter or even several tens of micro-litters was deposited onto a porous alumina membrane through vacuum filtration process. Thereafter, the alumina membrane was solvated by the 3 M NaOH solution and the floating CNT film was easily transferred to an indium-tin-oxide (ITO) glass substrate of $0.5\times0.5cm^2$ with a film mask. The transmittance of as-prepared ultra-thin CNT films measured by UV-Vis spectrophotometer was 68~97%, depending on the amount of CNTs dispersed in an aqueous solution. Roller activation, which is a essential process to improve the field emission characteristics of CNT films, increased the UV-Vis transmittance up to 93~98%. This study presents SEM morphology of CNT emitters and their field emission properties according to the concentration of CNTs in an aqueous solutions. Since the ultra-thin CNT emitters prepared from the solutions show a high peak current density of field emission comparable to that of the paste-base CNT emitters and do not contain outgassing sources such as organic binders, they are considered to be very promising for small-size-but-high-end applications including X-ray sources and microwave power amplifiers.

• 센서학회지
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• 제30권4호
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• pp.255-260
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• 2021

We studied electrochemical sensors using printed carbon nanotube (CNT) film on a polyethylene terephthalate (PET) substrate. Multiwalled CNT films were printed on a PET substrate to study its feasibility as hazardous and noxious substances (HNS) detection sensor. The printed CNT film (PCF) with a 50 ㎛ thickness exhibited a specific resistance of 230 ohm. To determine the optimum sensor structure, a resistance-type PCF sensor (R-type PCF sensor) and a conductive-type PCF sensor (C-type PCF sensor) were fabricated and compared using diluted NH₃ droplets with various concentrations. The response magnitude, response time, sensitivity, linearity, and limit of detection (LOD) were compared, and it was concluded that the C-type PCF sensor exhibited superior performance. By applying a C-Type PCF sensor, we confirmed the detection performance of 12 types of floating HNS and the response of the sensor with selectivity according to the degree of polarity.