• 공업화학
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• 제33권2호
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• pp.188-194
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• 2022

본 연구에서는 비파괴적 표면 기능기화 통하여 단일벽 탄소나노튜브(SWCNT) 탄소소재의 특성 변화를 최소화 시킬 수 있는 대면적화 공법을 제안하고, 대면적화 된 SWNT 전자 필름 상에 효소를 집적하여 효소와 SWCNT 전자 필름 간 효율적 전자 전달을 연구하였다. p-terphenyl-4,4"-dithiol, dithiothreitol와 SWCNT의 혼합을 통해 SWCNT 전자 필름의 균일도 및 전하 전달 능력을 향상시키고, 분광학적 분석 및 전기화학적 특성을 평가하여 SWCNT 전자 필름의 향상된 전기화학적 특성을 확인하였다. 전자 필름 상에 고분자 전해질 및 포도당 산화환원 효소를 layer-by-layer 기법으로 효율적으로 집적하여, 최종적으로 음전압 범위에서 구동이 가능한 포도당(glucose) 바이오센서를 구현하였다. 개발된 포도당 바이오센서는 효소와 SWCNT 전자 필름과의 높은 전하 전달 효율을 바탕으로 -0.45 vs. Ag/AgCl 음전압 범위에서 높은 산화환원 신호를 보였을 뿐 아니라 0~1 mM의 낮은 글루코스 농도 변화에서 약 98 ㎂/mM·cm²의 높은 감도를 보였다. 또한 음전압 구동을 통하여, 산화 반응을 일으킬 수 있는 4종의 방해물질(요산, 아스코르빅산, 도파민, 아세타아미노펜) 환경에서 4% 이하의 변화를 보여 높은 선택성을 보였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.431-431
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• 2007

In this paper, the LC alignment characteristics of the NDLC thin film deposited by PECVD and sputtering were reported respectively. The NDLC thin film deposited using sputter showed uniform LC alignment at the 1200 eV of the ion beam intensity and pretilt angle was about $2^{\circ}$ while the NDLC thin film deposited using the PECVD showed uniform LC alignment and high pretilt angle at the 1800 eV of the ion beam intensity. Concerning the ion beam intensity, uniform LC alignment of the NDLC thin film deposited by the sputtering was achieved at the lower intensity. And the pretilt angle of the NDLC thin film deposited by sputter was higher than those of NDLC thin film that was deposited using the PECVD. The uppermost of the thermal stability of NDLC thin film was $200^{\circ}C$, respectively. However, NDLC thin film deposited by the PECVD showed stability at high temperature without defects, compared to NDLC thin film deposited by the sputter.

• 한국세라믹학회지
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• 제31권2호
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• pp.206-212
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• 1994

Effects of the film deposition process parameters on the properties such as deposition rate, etch rate, refractive index, stress and step coverage of plasma enhanced chemical vapor deposited (PECVD) tetraethylorthosilicate glass (TEOS) SiO2 film were investigated and analysed using SEM, FTIR and SIMS techniques. Increasing TEOS flow or decreasing O2 flow increased the deposition rate and the compressive stress of the oxide film but produced a less denser film. The deposition rate decreased owing to the decrease in the sticking coefficient of the TEOS and the O2 molecules onto the substrate Si with increasing the substrate temperature. Increasing the substrate temperature produced a denser film with a lower etch rate and the higher refractive index by lowering SiOH and moisture contents. Increasing the rf power increases the ion bombardment energy. This increase in energy, in turn, increases the deposition rate and tends to make the film denser. No appreciable changes were found in the deposition rate but the refractive index and the stress of the film decreased with increasing the deposition pressure. The carbon content in the plasma TEOS CVD oxide film prepared under our standard deposition conditions were very low according to the SIMS analysis results.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2009년 춘계학술대회논문집
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• pp.315-320
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• 2009

A computational investigation is conducted on free convection from a thin plate having a surface heat source. The thermal configuration simulates the recently-proposed transparent film heater made of a single-walled carbon nanotube film on a glass substrate. The Navier-Stokes computations are carried out to study laminar free convection from the heater. Parallel numerical experiments are performed by using a simplified design analysis model which solve the conduction equation with the boundary conditions utilizing several existing correlations for convective heat transfer coefficient. Comparison leads to the most suitable boundary condition for the thermal model to evaluate the performance evaluation of a transparent thin-film heater.

• 한국표면공학회지
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• 제33권2호
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• pp.115-125
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• 2000

TiN films were deposited onto Stellite 6B alloy (Co base) by the reactive magnetron sputter ion plating. As the bias increases, TiN film changes from columnar structure to dense structure with great hardness and smooth surface due to densification and resputtering by ion bombardment. The content of oxygen and carbon impurities in the TiN film decreases greatly when the substrate bias is applied. The preferred orientation of the TiN films changes from (200) to (111) with decreasing $N_2$/Ar ratio, and from (200) to (111) and then (220) with increasing the substrate bias. The change of the preferred orientation is discussed in terms of surface energy and strain energy which are related to the impurity contents and the ion bombardment damage. The hardness of the TiN film increases with increasing compressive stress generated in the film by virtue of ion bombardment. It becomes as high as up to 3500kgf/mm$^2$ when an appropriate substrate bias is applied.

• 한국전기전자재료학회논문지
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• 제28권3호
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• pp.196-200
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• 2015

In this paper, we fabricated flexible antenna radiator using the CNT/PVDF (carbon nanotube / polyvinylidene fluoride) composite film. We used polymer film as a matrix material for the flexible devices, and introduced CNTs for adding conductivity into the film resulting in obtaining performances of the antenna radiator. Spray coating method was used to form the CNT/PVDF composite radiator, and pattern formation of the radiator was done by shadow mask during the spray coating process. We investigated the electrical properties of the CNT/PVDF composite films with the CNT concentration, and also estimated the radiator performance. Finally we discuss the feasibility of the CNT/PVDF composite radiator for the flexible antenna.

• 대한기계학회논문집A
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• 제26권7호
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• pp.1270-1279
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• 2002

Residual stress is a dominant obstacle to efficient production and safe usage of device by deteriorating the mechanical strength and failure properties. Therefore, we proposed a new thin film stress-analyzing technique using a nanoindentation method. For this aim, the shape change in the indentation load-depth curve during the stress-relief in film was theoretically modeled. The change in indentation depth by load-controlled stress relaxation process was related to the increase or decrease in the applied load using the elastic flat punch theory. Finally, the residual stress in thin film was calculated from the changed applied load based on the equivalent stress interaction model. The evaluated stresses for diamond-like carbon films from this nanoindentation analysis were consistent with the results from the conventional curvature method.

• KSTLE International Journal
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• 제9권1_2호
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• pp.31-35
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• 2008

DLC (Diamond Like Carbon) films have predominant tribological properties like a high hardness, low friction and high chemical resistance; therefore, DLC films are applied in a wide range of industrial fields. This paper evaluated the characteristics of DLC films deposited on bearing steel with different hardness by RF-PECVD (Radio Frequency - Plasma Enhanced Chemical Vapor Deposition) method. Si-interlayer was deposited on bearing steel to improve adhesion strength by RF-Sputtering method. The DLC film structures were analyzed with Raman spectra and Gaussian function. Adhesion strength of DLC films was measured with a scratch tester. Friction and wear test were carried out with a ball-on -disc type to investigate the tribological characteristics. Experimental results showed that DLC films deposited on bearing steel under same deposition condition have typical structure DLC films regardless of hardness of bearing steel. Adhesion strength of DLC film is increased with a hardness of bearing steel. Friction coefficient of DLC film showed lower at the high hardness of bearing steel.

• Fibers and Polymers
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• 제6권2호
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• pp.108-112
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• 2005

Nanocomposite films were prepared by casting the solution of polyacrylonitrile (PAN) and single wall nanotube (SWNT) in nitric acid subsequent to sonication. Even though SWNT shows good dispersion visually, the reinforcing effect was not satisfactory. The G-band Raman spectra of the drawn film clearly demonstrated that SWNTs in the film are well-oriented along the drawing axis of the film. The electrical resistivity of the film prepared using nitric acid was lower than that of the film using DMF. Thus, nitric acid is presumably more effective in dispersing nanotubes than DMF.

• E2M - 전기 전자와 첨단 소재
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• 제10권7호
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• pp.713-718
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• 1997

Polyaniline free standing films cast from N-methyl-2-pyrrolidinone(NMP) solution, camphorsulfonic acid(HCSA), dodecylbenzensulfonic acid(HDBSA), inorganic matter(carbon black, graphite) and metal(silver) were prepared by processings. The properties of these films such as crystallinity, near-infrared absorption spectra and conductivity were investigated. The HCSA and HDBSA doped polyaniline films cast from m-cresol and chloroform solvents showed the metallic property and high crystallinity, respectively. The value of conductivity in the HCSA doped polyaniline film obtained 180 S/cm. We have obtained the value of conductivity 200 S/cm in the metal(silver) doped polyaniline film, which is higher than that of the HCSA doped polyaniline film. The metal(silver) doped polyaniline film shows good properties as a electromagnetic shielding material.