• Journal of the Korean Vacuum Society
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• v.21 no.4
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• pp.193-198
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• 2012

In this study, we have fabricated the polymer insulator and diamond-like carbon (DLC) thin films by using plasma enhanced chemical vapor deposition methods. we fabricated the DLC films with various thicknesses as the passivation layer on plasma polymer and investigated the structural, physical, and electrical properties of DLC/plasma polymer films. The plasma polymer synthesized in this work had the low leakage current and low dielectric constant. The values of hardness and elastic modulus in DLC/plasma polymer films are increased, and the value of rms surface roughness is decreased, and contact angle value is increased with increasing DLC film thickness. In the electrical properties of DLC/plasma polymer, the value of the dielectric constant is increased, however the leakage current property of the DLC/plasma polymer is improved than that of plasma polymer film with increasing DLC film thickness.

• Journal of the Korean Applied Science and Technology
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• v.34 no.4
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• pp.1017-1024
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• 2017

Carbon thin films were deposited by HiPIMS(High Power Impulse Magnetron Sputtering). The properties and microstructures of carbon thin film were investigated with power, pressure, bias voltage and duty cycle. As the HiPIMS power increased, the deposition thickness increased and the surface tended to be rough. The increase in pressure also tended to make the surface rough, but the deposition thickness was not proportional to the pressure. As the bias voltage increased, the surface roughness became worse, the deposition thickness increased and then decreased from the critical bias voltage. Changes in the duty cycle have caused problems such as arcing, which is affected by the chamber structure and the size of the target. The $sp^2/sp^3$ fractions of thin films were estimated by XPS and it was confirmed that the fraction of thin films made by HiPIMS were larger than the fraction of thin films made by DC sputtering.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.1054-1057
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• 2004

The nitrogenated diamond-like carbon (NDLC) exhibits high electrical resistivity and thermal conductivity that are similar to the properties shown by diamond-like carbon (DLC) films. These diamond-like transparent properties in NDLC come in a material consisting of $sp^2$-bonded carbon versus the $sp^3$-carbon of DLC. The diamond-like properties and nondiamond-like bonding make NDLC an attractive candidate for applications. Liquid crystal (LC) alignment capabilities with ion beam exposure on NDLC thin films and electro-optical (EO) performances of the ion-beam-aligned twisted nematic liquid crystal display (TN-LCD) with oblique ion beam exposure on the NDLC thin film surface were studied. An excellent uniform alignment of the nematic liquid crystal (NLC) alignment with the ion beam exposure on the NDLC thin films was observed. In addition, it can be achieved that the good EO properties of the ion-beam-aligned TN-LCD. Finally, we will present the residual DC property of the ion-beam-aligned TN-LCD on the NDLC thin film surface.

• Journal of the Korean institute of surface engineering
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• v.54 no.2
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• pp.53-61
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• 2021

The properties of tetrahedral amorphous Carbon (ta-C) film can be determined by multiple parameters and comprehensive effects of those parameters during a deposition process with filtered cathodic vacuum arc (FCVA). In this study, Taguchi method was adopted to design the optimized FCVA deposition process of ta-C for improving deposition efficiency and mechanical properties of the deposited ta-C thin film. The influence and contribution of variables, such as arc current, substrate bias voltage, frequency, and duty cycle, on the properties of ta-C were investigated in terms of deposition efficiency and mechanical properties. It was revealed that the deposition rate was linearly increased following the increasing arc current (around 10 nm/min @ 60 A and 17 nm/min @ 100A). The hardness and I_D/I_G showed a correlation with substrate bias voltage (over 30 GPa @ 50 V and under 30 GPa @ 250 V). The scratch tests were conducted to specify the effect of each parameter on the resistance to plastic deformation of films. The analysis on variances showed that the arc current and substrate bias voltage were the most effective controlling parameters influencing properties of ta-C films. The optimized parameters were extracted for the target applications in various industrial fields.

• Journal of the Microelectronics and Packaging Society
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• v.28 no.4
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• pp.1-10
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• 2021

Recently, electronic components are becoming smaller and highly integrated. As a result, electromagnetic interference (EMI) and heat generation problems must be solved simultaneously with a small area and thickness. Graphene composites and graphite composites are lightweight materials that can simultaneously solve EMI shielding and heat dissipation problems with excellent electrical and thermal conductivity. With the recent development of synthetic technology and composite manufacturing technology, the research to application of their composites is increasing. In this paper, we reviewed the latest researches on composite films of graphene and graphite for EMI shielding and heat dissipation.

• Applied Chemistry for Engineering
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• v.33 no.4
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• pp.381-385
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• 2022

It is very important to secure the adhesion durability between the base film and the conductive paste for the development of a sensor for detecting hazardous chemicals. In this study, an ester binder was used to improve the adhesive properties which can be a problem when applying the sensor to the cross cut 0B or 1B grade. This problem was found while evaluating the adhesive properties by coating the polyaniline/graphene nano plate (GNP) paste on the polyethylene terephthalate (PET) film. When 10 wt% or more of the ester-based binder was added, the cross cut grade to which the sensor can be applied was 3B or higher. It was confirmed that the excessive addition of the binder may affect the electrical properties of the conductive paste and actually decrease the reactivity to sulfuric acid. To improve the electrical property, a carbon black (CB) content was varied resulting in the optimum electrical property observed at 2 wt% of CB.

• The monthly packaging world
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• s.144
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• pp.111-113
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• 2005

• Proceedings of the Korean Vacuum Society Conference
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• 1997.07a
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• pp.36-36
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• 1997

• Proceedings of the Korean Magnestics Society Conference
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• 1998.10a
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• pp.30-31
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• 1998

• Bulletin of the Korean Chemical Society
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• v.19 no.5
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• pp.584-587
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• 1998