• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.9 no.2
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• pp.155-161
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• 2016

This paper proposes a novel fabrication method for a capacitive type micro-accelerometer with uniform nano-gap using photo-assisted electro-chemical etching. The sensitivity of the accelerometer should be improved while the electrodes between the inertial mass and the sensing comb should be narrowed. In this paper the nano-gap trench structure is fabricated using the photo-assisted electrochemical etching method. The sensor was designed and analysed using ANSYS simulator. The characteristics of the etching were observed according to the dc bias, the light intensity, the composition of the solution, the temperature of the solution, and the pattern pitch variation. The optimum etching conditions were dc bias of 2V, Blue LED of 20mA, 49wt% HF:DMF:D.I.Water=1:20:10, the pattern pitch of $20{\mu}m$. Uniform trench structure with width of 344nm and depth of $11.627{\mu}m$ are formed using the optimum condition.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.48 no.9
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• pp.13-21
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• 2011

In this paper, the CMOS programmable interface circuit for MEMS gyroscope is presented, and evaluated with the MEMS sensing element. The circuit includes the front-end charge amplifier with 10 bit programmable capacitor arrays, 9 bit DAC for accurate offset calibration, and 10 bit PGA for accurate gain calibration. The self oscillation loop with automatic gain control operates properly. The offset error and gain error after calibration are measured to be 0.36 %FSO and 0.19 %FSO, respectively. The noise equivalent resolution and bias instability are measured to be 0.016 deg/sec and 0.012 deg/sec, respectively. The calibration capability of this circuit can reduce the variations of the output offset and gain, and this can enhance the manufacturability and can improve the yield.

• Journal of Sensor Science and Technology
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• v.5 no.5
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• pp.63-68
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• 1996

In order to implement the integrated capacitive pressure sensors, which contains integrated interface circuits to detect the electrical output signal, several main factors that have a bad effect on the characteristics of sensors must be improved, such as parasitic capacitance effects, temperature/thermal drift, and the leakage current of a readout circuitry. This paper describes the novel design of the dedicated CMOS readout circuitry that is consists of two capacitance to frequency converters and 4 bit digital logic compensating circuits. Dividing the oscillation frequency of a sensing sensor by that of reference sensor, this circuit is designed to eliminate the thermal/temperature drift and the effect of the leakage currents, and to access a digital signals to obtain a high signal-to-noise(S/N)ratio. Therefore, the resolution of this circuit can be increased by increasing the number of the digital bits. Digital compensated circuits of this circuits, except for the C-F converters, are fabricated on a FPGA chip, and fundamental performance of the circuits are evaluated.

• Journal of the Microelectronics and Packaging Society
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• v.24 no.1
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• pp.51-56
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• 2017

In this paper, we have developed a differential pressure flow sensor designed as a single capacitive type. And the sensor was fabricated using a MEMS process. Differential pressure flow sensors are the most commonly used sensors for industrial applications. The sensing diaphragm and bonding joint of the MEMS pressure sensor are easily broken at high pressure. In this paper, we proposed a structure in which the diaphragm of the sensor was not broken at a pressure exceeding the proof pressure, and the differential pressure sensor was designed and manufactured accordingly. The operating characteristics of the sensor were evaluated at a pressure three times higher than the sensor operating pressure (0-3 bar). The developed sensor was $3.0{\times}3.0mm$ and measured with a LCR meter (HP 4284a) at a pressure between 0 and 3 bar. It showed 3.67 pF at 0 bar and 5.13 pF at 3 bar. The sensor operating pressure (0-3 bar) developed a pressure sensor with hysteresis of 0.37%.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.12 no.4
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• pp.366-372
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• 2019

In this paper, we fabricated a capacitive humidity sensor with an IDT(Interdigitated) electrode using commercial polyimide containing fluorine, and its properties were measured and analyzed. First, in order to analyze the composition of commercial polyimide, EDS analysis was performed after patterning process on a silicon wafer. The area of the humidity sensor was $1.56{\times}1.66mm^2$, and the width of the electrode and the gap between the electrodes were $3{\mu}m$ each. The number of electrodes was 166 and the length of the electrode was 1.294mm for the sensitivity of the sensor. The fabricated sensor showed that the sensitivity was 24 fF/%RH, linearity <${\pm}2.5%RH$ and hysteresis <${\pm}4%RH$. As a result of measuring the capacitance value according to the frequency change, the capacitance vlaue decreased with increasing frequency. Capacitance deviations with 10kHz and 100kHz were measured as 0.3pF on average.

• Journal of the Institute of Electronics and Information Engineers
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• v.52 no.4
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• pp.62-70
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• 2015

Recently the demand for projected capacitance touch screens is sharply growing especially for large screens for medical devices, PC monitors and TVs. Large touch screens in general need a controller of higher complexity. They usually have a larger number of driving and sensing lines, and hence it takes longer to scan one frame for touch detection leading to a low frame scan rate. In this paper, a novel touch screen control technique is presented, which scans each frame in two steps of simultaneous multi-channel driving. The first step is to drive all driving lines simultaneously and determine which sensing lines have any touch. The second step is to sequentially rescan only the touched sensing lines, and determine exact positions of the touches. This technique can substantially increase the frame scan rate. This technique has been implemented using an FPGA and an AFE board, and tested using a commercial 23-inch touch screen panel. Experimental results show that the proposed technique improves the frame scan rate by 8.4 times for the 23-inch touch screen panel over conventional methods.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.28 no.3
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• pp.275-281
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• 2015

In this study, vertical motion of a Tuned Liquid Column Damper(TLCD) is measured by a variable voltage measurement system in the electric field and design parameters of the TLCD are determined. First, nonlinear damping term of the TLCD is replaced as the equivalent viscous damping term. The natural frequency and damping ratio of dynamic characteristics of the TLCD are verified. In addition, a novel liquid level measurement system is developed for measuring vertical motion of the TLCD. For the experimental achievement, experimental characterizations of natural frequency and damping ratio of the TLCD are undertaken utilizing the developed variable voltage sensing. Also, shake table testing is performed to determine the dynamic characteristics of the TLCD. As a result, the feasibility of the proposed liquid level measurement system is verified by comparison with the capacitive type wavemeter.

• Journal of Sensor Science and Technology
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• v.16 no.2
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• pp.97-103
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• 2007

Crystallized carbon nitride film that has many stable physical and/or chemical properties has been expected potentially by a new electrical material. However, one of the most significant problems degrading the quality of carbon nitride films is an existence of N-H and C-H bonds from the deposition environment. The possibility of these reactions with hydroxyl group in carbon nitride films, caused by a hydrogen attack, was suggested and proved in our previous reports that this undesired effect could be applied for fabricating micro-humidity sensors. In this study, MIS capacitor and MIM capacitor with $5{\mu}m{\times}5{\mu}m$ meshes were fabricated. As an insulator, carbon nitride film was deposited on a $Si_{3}N_{4}/SiO_{2}/Si$ substrate using reactive magnetron sputtering system, and its dielectric constant, C-V characteristics and humidity sensing properties were investigated. The fabricated humidity sensors showed a linearity in the humidity range of 0 %RH to 80 %RH. These results reveal that MIS and MIM $CN_{X}$ capacitive humidity sensors can be used for Si based micro-humidity sensors.

• International Journal of Internet, Broadcasting and Communication
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• v.7 no.2
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• pp.73-78
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• 2015

Touch panel is mainly applied to pressure type touch panel but it occur a low recognition rate and error during long-term use. So, it is partly applied to capacitive touch panel to compensate for these problems but it also can occur a same problems via pollutions. Touch technology has developed a various method but it is not used because of high costs and difficult installation process. So, in this paper, we proposed an input method of touchless panel using IrDA matrix. This method is conducted using an IrDA Matrix composed of depth sensor. It is possible to offer a various contents for multi user. The proposed technology need a development of a high sensitivity sensing method and high-speed processing method of position information for Seamless operation control. And, it is required high-precision drive technology. Also, we proposed a Seamless user recognition for interactive contents service through a touchless panel using IrDA matrix.

• Smart Structures and Systems
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• v.15 no.6
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• pp.1601-1623
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• 2015

Electroactive polymers have attracted considerable attention in recent years due to their sensing and actuating properties which make them a material of choice for a wide range of applications including sensors, biomimetic robots, and biomedical micro devices. This paper presents an effective modeling strategy for nonlinear large deformation (small strains and moderate rotations) dynamic analysis of polymer actuators. Considering that the complicated electro-chemo-mechanical dynamics of these actuators is a drawback for their application in functional devices, establishing a mathematical model which can effectively predict the actuator's dynamic behavior can be of paramount importance. To effectively predict the actuator's dynamic behavior, a comprehensive mathematical model is proposed correlating the input voltage and the output bending displacement of polymer actuators. The proposed model, which is based on the rigid finite element (RFE) method, consists of two parts, namely electrical and mechanical models. The former is comprised of a ladder network of discrete resistive-capacitive components similar to the network used to model transmission lines, while the latter describes the actuator as a system of rigid links connected by spring-damping elements (sdes). Both electrical and mechanical components are validated through experimental results.