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CMOS Programmable Interface Circuit for Capacitive MEMS Gyroscope  

Ko, Hyoung-Ho (Department of Electronics, Chungnam National University)
Publication Information
Abstract
In this paper, the CMOS programmable interface circuit for MEMS gyroscope is presented, and evaluated with the MEMS sensing element. The circuit includes the front-end charge amplifier with 10 bit programmable capacitor arrays, 9 bit DAC for accurate offset calibration, and 10 bit PGA for accurate gain calibration. The self oscillation loop with automatic gain control operates properly. The offset error and gain error after calibration are measured to be 0.36 %FSO and 0.19 %FSO, respectively. The noise equivalent resolution and bias instability are measured to be 0.016 deg/sec and 0.012 deg/sec, respectively. The calibration capability of this circuit can reduce the variations of the output offset and gain, and this can enhance the manufacturability and can improve the yield.
Keywords
Capacitive interface; Programmable circuit; Self oscillation; Gyroscope; MEMS;
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Times Cited By KSCI : 1  (Citation Analysis)
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