• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제50권7호
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• pp.346-350
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• 2001

We present a surface-micromachined polysilicon capacitive accelerometer using unevenly distributed comb electrodes. The unique features of the accelerometer include a perforated proof-mass and the inner and outer comb electrodes with uneven electrode gaps. The perforated proof-mass reduces stiction between the structure and the substrate and the unevenly distributed electrodes shorten the electrode length required for a given sensitivity. The polysilicon accelerometer has been fabricated by the conventional 6-mask surface-micromachining process and showes a sensitivity of 1.03mV/g with a hybrid detection circuitry.

• 전기화학회지
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• 제12권3호
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• pp.287-294
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• 2009

$TiO_2$가 첨가된 탄소복합전극을 제조 Capacitive deionization(CDI)에서의 제염효과에 대하여 고찰하였다. 본 연구에서는 탄소전극과 탄소복합전극을 제조하여 순환전류전압법과 충전-방전 평가를 하였으며 이때의 이온제거율에 대하여 고찰하였다. 순환전류전압법으로 1 mV/s의 전위주사속도에서 측정한 결과 탄소전극은 125 F/g, 탄소복합전극의 축전용량은 243 F/g으로 2배 증가됨을 확인하였다. 탄소복합전극의 $TiO_2$의 함량은 10 wt.%로 고정하였으며 $TiO_2$가 첨가됨에 따라 전기이중층 흡착량이 증가되어 이온제거율이 탄소전극보다 25% 증가되었다.

• 대한전기학회논문지:전기기기및에너지변환시스템부문B
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• 제55권9호
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• pp.443-448
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• 2006

Non-contacting capacitive sensor based on Thompson-Lampard theorem have been fabricated and characterized for measuring of 때 order displacements. To overcome disadvantages of the existed capacitive sensors of parallel plate type with 2-electrodes and 3-electrodes, the developed new sensor was designed to have 4-electrodes with a constant gap of 0.2mm between the electrodes. Two of the electrodes were used as a high potential electrode and a low one, the other two electrodes were used as guard electrodes. These electrodes were made from copper using RF sputtering system on a sapphire plate with diameter 17 mm and thickness 0.7 mm. This sensor can be used for measuring the distance not only between the sensor and metallic target connected to ground potential but also non-metallic target without ground connection.

• Transactions on Electrical and Electronic Materials
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• 제16권1호
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• pp.42-45
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• 2015

The ability to take electrocardiographic measurements while performing our daily activities has become the people-choice for modern age vital sign sensing. Currently, wet and dry ECG electrodes are known to pose threats like inflammations, allergic reactions, and metal poisoning due to their direct skin interaction. Therefore, the main goal in this work is to implement a very small ECG sensor system with a capacitive coupling, which is able to detect electrical signals of heart at a distance without the conductive gel. The aim of this paper is to design, implement, and characterize the contactless ECG electrodes. Under a careful consideration of factors that affect a capacitive electrode functional integrity, several different sizes of ECG electrodes were designed and tested with a pilot ECG device. A very small cotton-insulated copper tape electrode ($2.324cm^2$) was finally attained that could detect and measure bioelectric signal at about 500 um of distance from the subject's chest.

• 공업화학
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• 제31권5호
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• pp.552-559
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• 2020

Activated carbon-nickel (II) oxide (AC-NiO) electrodes were studied as materials for the capacitive deionization (CDI) of aqueous sodium chloride solution. AC-NiO electrodes were fabricated through physical mixing and low-temperature heating of precursor materials. The amount of NiO in the electrodes was varied and its effect on the deionization performance was investigated using a single-pass mode CDI setup. The pure activated carbon electrode showed the highest specific surface area among the electrodes. However, the AC-NiO electrode with approximately 10 and 20% of NiO displayed better deionization performance. The addition of a dielectric material like NiO to the carbon material resulted in the enhancement of the electric field, which eventually led to an improved deionization performance. Among all as-prepared electrodes, the AC-NiO electrode with approximately 10% of NiO gave the highest salt adsorption capacity and charge efficiency, which are equal to 7.46 mg/g and 90.1%, respectively. This finding can be attributed to the optimum enhancement of the physical and chemical characteristics of the electrode brought by the addition of the appropriate amount of NiO.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.247.1-247.1
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• 2014

The capacitive coupled plasma is used widely in the semiconductor industries. Especially, the uniformity of the industrial plasma is heavily related with defect ratio of devices. Therefore, the industries need the capacitive coupled plasma source which can generate the uniform plasma and control the plasma's uniformity. To achieving the uniformity of the large area plasma, we designed multi-powered electrodes. We controlled the uniformity by controlling the power of each electrode. After this work, we started to research another concept of the plasma device. We make the plasma chamber that has multi-ground electrodes imaginary (CST microwave studio) and simulate the electric field. The shape of the multi-ground electrodes is ring type, and it is same as the shape of the multi-power electrodes that we researched before. The diameter of the side electrode's edge is 300mm. We assumed that the plasma uniformity is related with the impedance of ground electrodes. Therefore we simulated the imaginary chamber in three cases. First, we connected L (inductor) and C (capacitor) at the center of multi-ground electrodes. Second, we changed electric conductivity of multi-ground electrode. Third, we changed the insulator's thickness between the center ground electrode and the side ground electrode. The driving frequency is 2, 13.56 and 100 MHz. We switched our multi-powered electrode system to multi-ground electrode system. After switching, we measured the plasma uniformity after installing a variable vacuum capacitor at the ground line. We investigate the effect of ground electrodes' impedance to plasma uniformity.

• 전기학회논문지P
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• 제55권1호
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• pp.26-30
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• 2006

For the purpose of developing capacitive humidity sensor having interdigital electrodes, interdigital electrode was modeled and simulated to obtain capacitance and sensitivity as a function of geometric parameters like the structural gap and thickness. For the development of ASIC, switched capacitor signal processing circuits for capacitive humidity sensor were designed and simulated by Cadence using $0.25{\mu}m$ CMOS process parameters. The signal processing circuits are composed of amplifier for voltage gain control, and clock generator for sensor driving and switch control. The characteristics of the fabricated sensors are; 1) sensitivity is 9fF/%R.H., 2) temperature coefficient of offset(TCO) is $0.4%R.H./^{\circ}C$, 3) nonlinearity is 1.2%FS, 4) hysteresis is 1.5%FS in humidity range of $3%R.H.{\sim}98%R.H.$. The response time is 50 seconds in adsorption and 70 seconds in desorption. Fabricated process used in this capacitive humidity sensor having interdigital electrode are just as similar as conventional IC process technology. Therefore this can be easily mass produced with low cost, simple circuit and utilized in many applications for both industrial and environmental measurement and control system, such as monitoring system of environment, automobile, displayer, IC process room, and laboratory etc.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제50권3호
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• pp.144-148
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• 2001

For the purpose of developing capacitive humidity sensor having interdigit electrodes, interdigit electrode was modeled and simulated to obtain capacitance and sensitivity as a function of geometric parameters like the structural gap and thichness. For the development of ASIC, switched capacitor signal conditioning circuits for capacitive humidity sensor were designed and simulated by cadence using 0.25um CMOS process parameters. The signal conditioning circuits are composed of amplifier for voltage gain control, and clock generator for sensor driving and switch control The characteristics of the fabricated sensors are; 1) sensitivity is 9fF/%R.H., 2) temperature coefficient of offset(TCO) is 0.4%R.H./$^{\circ}C$, 3) nonlinearity is 1.2%FS, 4) hysteresis is 1.5%FS in humidity range of 3%R.H. ${\sim}$ 98%R.H.. The response time is 50 seconds in adsorption and 70 seconds in desorption. Fabricated process used in this capacitive humidity sensor having interdigit electrode are just as similar as conventional IC process technology. Therefore this can be easily mass produced with low cost, simple circuit and utilized in many applications for both industrial and environmental measurement and control system, such as monitoring system of environment, automobile, displayer, IC process room, and laboratory etc..

• 센서학회지
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• 제28권2호
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• pp.133-138
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• 2019

The a-InGaZnO (a-IGZO) thin film transistor (TFT) has the advantages of larger mobility than that of amorphous silicon TFTs, acceptable reliability and uniformity over a large area, and low process cost. A capacitive-type touch sensor was studied with an a-IGZO TFT that can be used on the front side of a display due to its transparency. A capacitive sensor detects changes of capacitance between the surface of the finger and the sensor electrode. The capacitance varies according to the distance between the sensor plate and the touching or non-touching of the sensing electrode. A capacitive touch sensor using only one a-IGZO TFT was developed with the reduction of two bus lines, which made it easy to reduce the pixel pitch. The proposed sensor circuit maintained the amplification performance, which was investigated for various drive conditions.

• 공업화학
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• 제24권1호
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• pp.49-54
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• 2013

혼합용액에서 nitrate 이온을 선택적으로 제거하기 위해 복합탄소전극을 제조하였다. 질산이온 선택성 수지(BHP55, Bonlite Co.) 분말을 탄소전극 표면에 코팅하여 전극을 제조하였다. 제조한 전극으로 BHP55 셀을 제작하여 chloride, nitrate, sulfate 이온이 혼합된 용액에 대해 축전식 탈염 실험을 수행하였다. 그리고 BHP55 셀에서의 질산 이온 제거량을 이온교환막을 결합한 MCDI 셀의 결과와 비교하였다. BHP55 셀에서 이온의 총 흡착량은 MCDI 셀에서 보다 31% 증가한 $38.3meq/m^2$를 나타냈다. 또한 BHP55 셀에서 질산 이온의 흡착량은 $15.9meq/m^2$ (전체 흡착량의 42%)이었고, 이는 MCDI 셀에서 보다 2.1배 큰 것으로 나타났다. 실험결과 제조한 복합탄소전극은 음이온 혼합용액에서 질산 이온을 선택적으로 제거하는데 매우 효과적임을 알 수 있었다.