• Journal of the Korean Society for Precision Engineering
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• v.26 no.2
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• pp.35-44
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• 2009

Long stroke Fast Tool Servo (LFTS) with maximum stroke of $432{\mu}m$ is designed, manufactured and tested for fabrication of optical free-form surfaces. The large amount of stroke in LFTS has been realized by utilizing the hinge and lever mechanisms which enable the displacement amplification ratio of 4.3. In this mechanism the peculiar shape was devised for maximizing the displacement of end tip in LFTS and special mechanical spring has been mounted to provide the sufficient preload to the piezoelectric actuator. Also, its longitudinal motion of tool tip can be measured by capacitive type displacement sensor and closed-loop controlled to overcome the nonlinear hysteresis. In order to verify the static and dynamic characteristics of designed LFTS, several features including step response, frequency response and cut-off frequency in closed-loop mode were experimentally examined. Also, basic machining result shows that the proposed LFTS is capable of generating the optical free-form surface as an additional axis in diamond turning machine.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.453-458
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• 2004

A capacitate sensor is a proper device for measuring high small displacement. General design parameters and procedure are discussed and a test sensor was built to have a measuring range of 100$\mu\textrm{m}$ and a sensitivity about 30nm. This sensor has too opposing electrode of comparably large area and has nominal gap distance about 150$\mu\textrm{m}$. So as to achieve a nano order displacement sensitivity, both sensor and target system have to be considered. This is important for the sensitivity can be achieved by minimizing a system total noise level in electronic type sensor application. Typical performance of the developed sensor is demonstrated in precision moving stage having 0.1$\mu\textrm{m}$ moving resolution.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.12 no.4
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• pp.366-372
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• 2019

In this paper, we fabricated a capacitive humidity sensor with an IDT(Interdigitated) electrode using commercial polyimide containing fluorine, and its properties were measured and analyzed. First, in order to analyze the composition of commercial polyimide, EDS analysis was performed after patterning process on a silicon wafer. The area of the humidity sensor was $1.56{\times}1.66mm^2$, and the width of the electrode and the gap between the electrodes were $3{\mu}m$ each. The number of electrodes was 166 and the length of the electrode was 1.294mm for the sensitivity of the sensor. The fabricated sensor showed that the sensitivity was 24 fF/%RH, linearity <${\pm}2.5%RH$ and hysteresis <${\pm}4%RH$. As a result of measuring the capacitance value according to the frequency change, the capacitance vlaue decreased with increasing frequency. Capacitance deviations with 10kHz and 100kHz were measured as 0.3pF on average.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.11 no.2
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• pp.225-229
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• 2011

In this study, capacitive type pressure sensors based on low temperature co-fired ceramics (LTCC) technology for environmental monitoring were demonstrated. The LTCC is one of promising technology than is based one since it has many advantages (e.g., low cost production, high manufacturing yields and easy realizing 3D structure etc.) for sensor application. Especially, it has good mechanical and chemical properties for robust environmental application. The 3D LTCC diaphragm with thickness of 400 ${\mu}m$ were fabricated by laminating 4 green sheets using commercial powder (NEG, MLS 22C). To evaluate the sensing properties of the different cavity areas, two types of diaphragm which had different cavity areas with 25, 49 $mm^2$ respectively, were fabricated. To realize capacitive type pressure sensor, the Au top electrode was fabricated using thermal evaporator and the bottome electrode was compressed using aluminium foil. The sensing properties of the fabricated sensors showed linear characteristic under different pressure (0~30 psi) using pressure measurement system.

• JSTS:Journal of Semiconductor Technology and Science
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• v.16 no.3
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• pp.380-386
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• 2016

This paper presents a compact and low-power on-chip touch sensor and readout circuit using shunt proximity touch sensor and its design scheme. In the proposed touch sensor readout circuit, the touch panel condition depending on the proximity of the finger is directly converted into the corresponding voltage level without additional signal conditioning procedures. Furthermore, the additional circuitry including the comparator and the flip-flop does not consume any static current, which leads to a low-power design scheme. A new prototype touch sensor readout integrated circuit was fabricated using complementally metal oxide silicon (CMOS) $0.18{\mu}m$ technology with core area of $0.032mm^2$ and total current of $125{\mu}A$. Our measurement result shows that an actual 10.4 inches capacitive type touch screen panel (TSP) can detect the finger size from 0 to 1.52 mm, sharply.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.29 no.4A
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• pp.466-471
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• 2004

This paper proposes an advanced circuit for fingerprint sensor signal processing. We increased the voltage between ridge and valley by modifying the parasitic capacitance eliminating circuit of sensor plate. The analog comparator was designed for comparing the sensor signal voltage with the reference signal voltage. 1-Pixel Fingerprint sensor circuit was designed and simulated, and the layout was performed.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.41 no.3
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• pp.109-114
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• 2004

This paper proposes an advanced circuit for the fingerprint sensor signal processing. We increased the voltage between ridge and valley by modifying the parasitic capacitance eliminating circuit of sensor plate. The analog comparator was designed for comparing the sensor signal voltage with the reference signal voltage. We also propose an effective isolation strategy for removing noise and signal coupling of each sensor pixel. The fingerprint sensor circuit was designed and simulated, and the layout was performed.

• Science of Emotion and Sensibility
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• v.15 no.4
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• pp.415-424
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• 2012

According to introduction of Well-Being lifestyle and ageing society, vital sign monitoring system which can be continued measurement of vital sign has been increased their important in field of the healthcare. Under this trend, Respiration monitoring system has been studied and developed in a various way to apply continued monitoring and non-conscious monitoring system. But, Study of the respiration monitoring system based on consumer needs and usability test is insufficient. In this study, Textile capacitive pressure sensor(TCPS) of belt type was developed and tested it's utility and subjective sensibility. TCPS measures respiration signals and can be derived in real time monitoring. As a result, monitoring respiration using textile capacitive pressure sensor offers a promising possibility of convenient measurement of respiration rate (correlation (r＝0.9553, p<0.0001). In the result of usability and wearability test, all of categorizes(perceived change, wearability, movement, facility of management, usefulness) were received favorable evaluation on usability test( mean value : 3.8), and suitable location of TCPS in the clothing is deriven on the abdomen part. According to synthetical results, Basic smart clothing design based on respiration monitoring system is proposed.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.63 no.4
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• pp.495-501
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• 2014

Piezoresistive-type, capacitive-type, and optical-type sensors have mainly been used for measuring a strain. However, in building a sensor network for remote monitoring using these conventional sensors there are disadvantages such as the complexity of a measuring system including wireless communication circuitry and high cost. In this paper, we demonstrates a highly-sensitive surface acoustic wave (SAW) strain sensor which is advantageous to harsh environments and wireless network. We designed and fabricated the SAW strain sensor. The SAW strain sensor attached on a specimen was tested with a tensile tester. The strain on the sensor surface was measured with a commercial strain gauge and compared with that obtained from strain analysis. The central frequency shift of the SAW sensor was measured with a network analyzer. The sensitivity of the SAW strain sensor is 134 $Hz/{\mu}{\varepsilon}$ which is high compared to previous results.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.36 no.12
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• pp.1497-1502
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• 2012

To manufacture a robot hand that essentially mimics the functions of a human hand, it is necessary to develop flexible actuators and sensors. In this study, we propose the design, manufacture, and performance verification of flexible actuators and sensors based on Electro Active Polymer (EAP). EAP is fabricated as a type of film, and it moves with changes in the voltage because of contraction and expansion in the polymer film. Furthermore, if a force is applied to an EAP film, its thickness and effective area change, and therefore, the capacitance also changes. By using this mechanism, we produce capacitive actuators and sensors. In this study, we propose an EAP-based capacitive sensor and evaluate its use as a robot hand sensor.