• JSTS:Journal of Semiconductor Technology and Science
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• 제2권4호
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• pp.246-252
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• 2002

Two kinds of PZT cantilevers integrated with a piezoresistor have been newly designed, fabricated, and characterized for high speed AFM. In first cantilever, a piezoresistor is used to sense atomic force acting on tip, while in second cantilever, a piezoresistor is integrated to calibrate hysteresis and creep phenomena of the PZT cantilever. The fabricated PZT cantilevers provide high tip displacement of $0.55\mu\textrm{m}/V$ and high resonant frequency of 73 KHz. A new cantilever structure has been designed to prevent electrical coupling between sensor and PZT actuator and the proposed cantilever shows 5 times lower coupling voltage than that of the previous cantilever. The fabricated PZT cantilever shows a crisp scanned image at 1mm/sec, while the conventional piezo-tube scanner shows blurred image even at $180\mu\textrm{m}/sec$. The non-linear properties of the PZT actuator are also well calibrated using the piezoresistive sensor for calibration.

• 한국정밀공학회지
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• 제14권3호
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• pp.107-113
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• 1997

This paper presents the active control of a flexible cantilever beam vibration. The cantilever beam was excitied by a steady-state harmonic and white noise point force and the control was performed by one piezo ceramic actuator bonded to the surface of the beam. An adaptive controller based on filtered-x LMS algorithm was used and the controller was defined by minimizing the square of the response of error sensor. In the experiment, gap sensor was used as an error sensor while the sinusoidal or white noise was applied as a disturbance. In the case of sinusoidal input, more than 20 dB of vibration reduction was achieved over all range of the natural frequencies and it takes 5 seconds to control the vibration at first natural frequency and 1 second at other natural frequencies. In the case of white noise input, 7 dB of vibration reduction was achieved at the first natural frequency and good control performance was achieved in the considered whole frequency range. Results indicate that the vibration of a flexible cantilever beam could be controlled effectively when the piezo ceramic actuator was used with filtered-x LMS algorithm.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제50권5호
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• pp.249-252
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• 2001

The paper represents the design and fabrication of an electrostatic micro actuator with $p^+$,/TEX> Si cantilevers. The micro actuator consists of a plate suspended by four $p^+$,/TEX> silicon cantilevers and an electrode on a glass substrate. The $p^+$,/TEX> Si structure is fabricated by the boron diffusion process and the anisotropic wet etch process. The cantilevers of the micro actuator curl down because of the residual stress gradient in $p^+$,/TEX> silicon. When the electrostatic forec is applied to the $p^+$,/TEX> cantilevers, the vertical displacement of the plate can be achieved. The deflection of the cantilever due to the residual stress gradient and the vertical displacement by electrostatic force were calculated. The displacement of the plate was measured with a laser displacement meter for various input voltages and frequencies. The feasibility of the proposed micro actuator for the applications to optical pickup devices or optical communication devices was confirmed by the experiments.

• 한국전기전자재료학회논문지
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• 제33권4호
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• pp.276-280
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• 2020

A linear piezoelectric actuator that utilizes the elliptical motion of the two tips of the actuator is proposed. This device is easy to fabricate owing to its simple structure, consisting of three piezo ceramic benders and is suitable for use in micro robotic applications. A π-shaped structure, which was composed of four piezo ceramic benders, was constructed. Two of the benders were positioned on the center of the actuator, and the joints were attached at the ends of the cantilever. The other two benders were positioned on the side of the actuator and were attached between the joint and the tips. The actuator structure was designed to obtain the first bending mode of the horizontal vibration and the vertical vibration at the same frequency, resulting in elliptical motions at the tips. When two sinusoidal wave voltages with a 90-degree phase difference were applied to the two pairs of the actuator benders, elliptical motions were obtained at the tips. The driving characteristics of the prototype actuator were then measured using a laser doppler vibrometer.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 추계학술대회논문집
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• pp.109-114
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• 2004

This paper presents a theoretical and experimental study of a non-collocated pair of piezopolymer PVDF sensor and piezoceramic PZT actuator, which are bonded on a cantilever beam, in order to suppress unwanted vibration at the tip of the beam. The PZT actuator patch was bonded near the clamped part and the PVDF sensor, which was triangularly shaped, was bonded on the other part of the beam. This is because the triangular PVDF sensor is known that it can detect the tip velocity of a cantilever beam. Because the arrangement of the sensor and actuator pair is not collocated and overlapped each other, the pair can avoid so called 'the in-plane coupling'. The test beam is made of aluminum with the dimension of $200\times20\times2mm$, and the two PZT5H actuators are both $20\times20\times1mm$ and bonded on the beam out-of-phase, and the PVDF sensor is $178mm\times6mm\times52{\mu}m$. Before control, the sensor-actuator frequency response function is confirmed to have a nice phase response without accumulation in a reasonable frequency range of up to 5000 Hz. Both the DVFB and displacement feedback strategies made the error signal from the tip velocity (or displacement) sensor is transmitted to a power amplifier to operate the PZT actuator (secondary source). Both the control methods attenuate the magnitude of the first two resonances in the error spectrum of about 6-7 dB.

• 센서학회지
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• 제14권1호
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• pp.1-6
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• 2005

This paper describes a novel concept of a chemically sensitive scanning force microscope (CS-SFM). It consists of the conventional SFM and the time-of-flight mass spectrometer (TOF-MS). A switchable cantilever (SC) fabricated by the micromachining technology combines each advantage of two completely different systems, SFM and TOF-MS. The CS-SFM offers to produce both images of topography and chemical information simultaneously. First we employed a rotatable tip holder based on 4 piezotube actuators for demonstration of the possibility of the CS-SFM concept. Second the CS-SFM concept is optimized with the micromachining technology. The micromachined SC with an integrated bimorph actuator and a piezoresistive strain sensor provides a reasonable switching speed of ${\sim}10$ ms which is very attractive for the CS-SFM application. The SC is currently being integrated in an ultra-high-vacuum system to perform various experiments.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 춘계학술대회논문집
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• pp.1004-1008
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• 2003

Near-filed optical storage using cantilever aperture tip is a promising way fer next generation optical data storage. To enhance the speed of reading and writing data, gap between tip and media should be controlled fast and precisely within near field region. In this paper, several PZT actuators are analyzed far constructing dual servo control algorithm: coarse actuators(stact. PZT, bimorph PZI) for media surface inclination and One actuator(film PZT) for media surface roughness. Dynamic analysis of stack PZT, bimorph PZT, and film PZT are performed through the frequency response. Based on the frequency response and mathematical model, fast analog controller is designed.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2013년도 추계학술대회 논문집
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• pp.533-534
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• 2013

This paper is concerned with the active vibration control of rectangular plate equipped with MFC actuators. To this end, the dynamic model of the rectangular plate bonded with MFC sensors and actuators was derived by means of the Rayleigh-Ritz method. The MFC actuator and sensor were modeled based on the pin-force assumption. The theoretical model was then validated experimentally. The multiinput and multi-output (MIMO) Positive Position Feedback (PPF) controller was designed based on the natural mode shapes and implemented using dSpace system and Simulink. The proposed control algorithm was applied to the cantilever plate having two MFC wafers having both sensor and actuator. Numerical and experimental investigations were carried out. Both theoretical and experimental result shows that the proposed control algorithm can effectively suppress vibrations of cantilever plate.

• KIEE International Transaction on Systems and Control
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• 제2D권2호
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• pp.65-71
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• 2002

In this paper, an experiment for the active vibration control of a cantilever beam uses electromagnet as an actuator and uses a laser sensor to measure the position of the bending beam, constituting a non-contacting control system. A mathematical model of the overall system is derived to analytically design an appropriate controller. Dynamic equations of the electromagnetic actuator and the beam are combined to find the transfer function from the actuator to the sensor. The effectiveness of the obtained model is verified by various experiments and an improper PID controller is designed based on the obtained model. According to analysis, the coefficient of the derivative controller is the most important parameter for handling the performance and the stability margin of the control system. The experimental results of the active control system are compared with those of the open loop system.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2009년도 춘계학술대회 논문집
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• pp.587-592
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• 2009

This paper is concerned with the development of linear magnetic actuator for active vibration control. The newly developed linear magnetic actuator consists of permanent magnets and copper coils. On the contrary to the voice-coil type actuator, the linear magnetic actuator utilizes magnetic flux to generate the shaft movement. In this study, experiments on the prototype linear magnetic actuator were carried out to investigate its dynamic characteristics. Block and inertia forces generated by the actuator were measured. The experimental results show that the actuator can be used as both actuator and active tuned-mass damper. The linear magnetic actuator was attached to a cantilever as the active-tuned mass damper and active vibration control experiment was carried out. The experimental results show that the newly developed linear magnetic actuator can be effectively used for the active vibration control of structures.