• Current Optics and Photonics
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• 제4권4호
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• pp.345-352
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• 2020

We describe a calibration method to improve the accuracy of interferometric snapshot spectroscopic ellipsometry employing a dual-spectrometer sensor scheme. Conventional spectral wavelength calibration of a spectrometer has been performed by using a calibration lamp having multiple peaks at specific wavelength. This paper shows that such a conventional spectrometer calibration method is inappropriate for the proposed interferometric snapshot spectroscopic ellipsometry to obtain highly accurate ellipsometric phase information. And also, systematic error analysis of interferometric snapshot spectroscopic ellipsometry is conducted experimentally.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 춘계학술대회 논문집(한국공작기계학회)
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• pp.143-148
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• 2001

Volumetric error measurement and calibration of a coordinate measuring machine are studied by using a Ball-Bar artifact. Examples of the Ball-Bar design are shown using inbar materials and precision steel balls. Also, for the uncertainty error using the Ball-Bar is discussed. Method of Ball-Bar artifact and the analysis of the error vectors are proposed. Using the Ball-Bar data, we studied the method of volumetric errors ana]ysis of a coordinate measuring machine.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.378-378
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• 2000

The permissible positioning error of the transducer used in reactor inspection must be within 10 mm. To implement the required precision it is necessary to manufacture all components affecting the positioning mechanism correctly and precisely. In addition, it is also necessary to handle error factors accurately. This paper describes the activities of the findings and corrections of the errors which were occurred in experiments. Those activities are; i) Categorization of error factors, ii) Cause analysis of errors, iii) Correction of errors founded in experiments by the analysis of laser induction type and by the validation of real measurement of horizontal, vertical baselines.

• 전자공학회논문지
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• 제52권12호
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• pp.109-117
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• 2015

본 논문에서는 DSP(Digital Signal Processor)를 이용하여 LED(Light Emitting Diode)에 전류 또는 전압을 공급하고, 이에 따라 나타나는 전압 또는 전류 특성을 분석하는 시스템에서, 전원 공급 또는 측정하는 회로의 비선형 오차 및 임의로 발생하는 오차를 감소시키는 방법을 제안하였다. 임의 오차를 줄이기 위해서는 재귀 평균 방법을 이용하였으며, 비선형 오차를 줄이기 위해서는 보정과정에서 획득한 데이터들을 2차 다항 회귀분석 방법을 이용하여 보정계수를 구하였으며, 이를 이용하여 LED를 생산 시 측정하는 항목인 역방향전류(IR), 역방향 전압(VR), 순방향전압(VF1, VF2, VF3)에 적용하여 오차를 교정하였다. 실험 결과에서는 오차율이 0.017 ~ 0.043 %로 관찰되었다.

• 한국해양공학회지
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• 제35권3호
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• pp.183-190
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• 2021

Tomographic particle image velocimetry (PIV) is a widely used method that measures a three-dimensional (3D) flow field by reconstructing camera images into voxel images. In 3D measurements, the setting and calibration of the camera's mapping function significantly impact the obtained results. In this study, a camera self-calibration technique is applied to tomographic PIV to reduce the occurrence of errors arising from such functions. The measured 3D particles are superimposed on the image to create a disparity map. Camera self-calibration is performed by reflecting the error of the disparity map to the center value of the particles. Vortex ring synthetic images are generated and the developed algorithm is applied. The optimal result is obtained by applying self-calibration once when the center error is less than 1 pixel and by applying self-calibration 2-3 times when it was more than 1 pixel; the maximum recovery ratio is 96%. Further self-correlation did not improve the results. The algorithm is evaluated by performing an actual rotational flow experiment, and the optimal result was obtained when self-calibration was applied once, as shown in the virtual image result. Therefore, the developed algorithm is expected to be utilized for the performance improvement of 3D flow measurements.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1996년도 한국자동제어학술회의논문집(국내학술편); 포항공과대학교, 포항; 24-26 Oct. 1996
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• pp.860-863
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• 1996

In this paper, we formulate the extended Kalman filter for calibration of gimballed inertial navigation system (GINS) at a pure navigation mode with 1500 ft/sec initial velocity and compare its performance to the linear Kalman filter's by using Monte-Carlo analysis method. It has been shown that estimation performance of the extended Kalman filter is better than that of the linear Kalman filter.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 D
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• pp.2507-2509
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• 2005

Because the rain gauges of tipping bucket type can easily use the digital signal, the rain gauges are widely used for the meteorological observation. In general, the resolution of rain gauges of tipping bucket type can be categorized by the 0.1mm, 0.5mm, and 1.0mm classes. But, the error of the tipping bucket rain gauges is made by the intensity of rainfalls and is expected to make the standard calibration method for error measurement. Thus, we developed the hardware of standard calibration facility for rain gauges by weighting measurement method and proposed the standard procedure by rainfall intensity in this study. Also, we calculated the error for the rainfall intensity and obtained useful result through the proposed calibration method.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.434-437
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• 2003

Evaluation or the patterning accuracy of e-beam lithography machines requires a high precision inspection system that is capable of measuring the true xy-locations of fiducial marks generated by the e-beam machine under test. Fiducial marks are fabricated on a single photo mask over the entire working area in the form of equally spaced two-dimensional grids. In performing the evaluation, the principles of self-calibration enable to determine the deviations of fiducial marks from their nominal xy-locations precisely, not being affected by the motion errors of the inspection system itself. It is. however, the fact that only repeatable motion errors can be eliminated, while random motion errors encountered in probing the locations of fiducial marks are not removed. Even worse, a random error occurring from the measurement of a single mark propagates and affects in determining locations of other marks, which phenomenon in fact limits the ultimate calibration accuracy of e-beam machines. In this paper, we describe an uncertainty analysis that has been made to investigate how random errors affect the final result of self-calibration of e-beam machines when one uses an optical inspection system equipped with high-resolution microscope objectives and a precision xy-stages. The guide of uncertainty analysis recommended by the International Organization for Standardization is faithfully followed along with necessary sensitivity analysis. The uncertainty analysis reveals that among the dominant components of the patterning accuracy of e-beam lithography, the rotationally symmetrical component is most significantly affected by random errors, whose propagation becomes more severe in a cascading manner as the number of fiducial marks increases

• JSTS:Journal of Semiconductor Technology and Science
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• 제17권4호
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• pp.543-551
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• 2017

SOL (Short, Open and Load) calibration based on iterative error sensitivity is proposed in this paper. With advanced SOL calibration, unknown parasitic parameters at on-chip terminations are accurately estimated up to 20 GHz. Artificial terminations are designed on printed circuit board (PCB) to experiment the proposed method. On-chip SHORT, OPEN and LOAD fabricated inside silicon shows the accuracy of proposed calibration method through the comparison with known fixture S-parameter after de-embedding.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1992년도 한국자동제어학술회의논문집(국내학술편); KOEX, Seoul; 19-21 Oct. 1992
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• pp.786-791
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• 1992

When a mobile robot moves from one place to another, position error occurs due to the limit of accuracy of robot and the effect of environmental noise. In this paper. an accurate method of estimating the position and orientation of a mobile robot using the camera calibration is proposed. Kalman filter is used as the estimation algorithm. The uncertainty in the position of camera with repect to robot base frame is considered well as the position error of the robot. Besides developing the mathematical model for mobile robot calibration system, the effect of relative position between camera and calibration points is analyzed and the method to select the most accurate calibration points is also presented.