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http://dx.doi.org/10.5573/JSTS.2017.17.4.543

Advanced On-chip SOL Calibration Method for Unknown Fixture De-embedding  

Yoon, Changwook (Intel Corporation)
Chen, Bichen (EMC Laboratory, Missouri University of Science and Technology)
Ye, Xiaoning (Intel Corporation)
Fan, Jun (EMC Laboratory, Missouri University of Science and Technology)
Publication Information
JSTS:Journal of Semiconductor Technology and Science / v.17, no.4, 2017 , pp. 543-551 More about this Journal
Abstract
SOL (Short, Open and Load) calibration based on iterative error sensitivity is proposed in this paper. With advanced SOL calibration, unknown parasitic parameters at on-chip terminations are accurately estimated up to 20 GHz. Artificial terminations are designed on printed circuit board (PCB) to experiment the proposed method. On-chip SHORT, OPEN and LOAD fabricated inside silicon shows the accuracy of proposed calibration method through the comparison with known fixture S-parameter after de-embedding.
Keywords
SOL calibration; iterative error sensitivity; de-embedding;
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