• 제목/요약/키워드: CZ method

검색결과 65건 처리시간 0.025초

RTA를 이용하여 수소 열처리한 실리콘 웨이퍼의 표면 및 근처의 변화 연구 (Investigation into the variation on Si wafer by RTA annealing in $H_2$ gas)

  • 정수천;이보영;유학도
    • 한국결정성장학회지
    • /
    • 제10권1호
    • /
    • pp.42-47
    • /
    • 2000
  • 일반적인 쵸크랄스키(CZ)방법으로 성장된 실리콘 단결정봉(Ingot)을 가공하여 경면 연마한 후 RTA법으로 수소 분위기에서 열처리하여 실리콘 웨이퍼 표면 및 표면 근처의 특성 변화에 대하여 고찰하였다 수소 열처리를 통하여 표면의 COP (결정결함)가 현저히 감소하는 것을 확인하였고 깊이 5um까지의 영역에서도 결정결함의 밀도가 감소하였다. 또한 수소 열처리에 의해 실리콘 웨이퍼 표면이 에칭 및 실리콘의 재배열에 의해 형성되는 테라스(Terrace) 형태도 관찰되었다.

  • PDF

강수/비강수 사례 분류를 위한 RBFNN 기반 패턴분류기 설계 (Design of RBFNN-Based Pattern Classifier for the Classification of Precipitation/Non-Precipitation Cases)

  • 최우용;오성권;김현기
    • 한국지능시스템학회논문지
    • /
    • 제24권6호
    • /
    • pp.586-591
    • /
    • 2014
  • 본 연구에서는 인공 벌 군집(ABC: Artificial Bee Colony) 알고리즘을 이용하여 주어진 레이더 데이터로부터 강수 사례와 비강수 사례를 분류하는 방사형 기저함수 신경회로망(RBFNNs: Radial Basis Function Neural Networks)분류기를 소개한다. 기상청에서 사용하고 있는 기상 레이더 데이터의 특성 분석을 통해 입력 데이터를 구성한다. 방사형 기저함수 신경회로망의 조건부에서는 Fuzzy C-Means 클러스터링 방법을 이용하여 적합도를 계산하고, 결론부에서는 최소자승법(LSE: Least Square Method)을 이용하여 다항식 계수를 추정한다. 추론부에서 최종출력 값은 퍼지 추론 방법을 이용하여 얻어진다. 제안된 분류기의 성능은 기상청에서 사용하는 QC와 CZ 데이터를 고려하여 비교 및 분석되어진다.

창정 5B호 발사체의 재진입 시점 예측 분석 (Analysis of Reentry Prediction of CZ-5B Rocket Body)

  • 성재동;정옥철;정유연;정대원
    • 우주기술과 응용
    • /
    • 제1권2호
    • /
    • pp.149-159
    • /
    • 2021
  • 본 논문은 2021년 5월에 수행된 국제우주쓰레기조정위원회(IADC, Inter-Agency Space Debris Coordination Committee Reentry) 재진입 테스트 캠페인의 분석 대상인 중국 창정 5B호 발사체의 재진입 시점 예측 분석 내용을 포함하고 있다. 우주물체의 재진입 예측은 물체의 크기나 무게, 자세에 대한 정확한 정보의 부재, 대기밀도의 불확실성 등으로 정확한 예측이 어렵다. 때문에 IADC에서는 재진입 캠페인을 매년 수행하여 기관별 분석기법에 대한 검증을 수행하고 있고, 한국항공우주연구원에서도 2015년부터 이에 참여하고 있다. 본 연구에서는 우주물체가 재진입하는 시점을 예측하기 위해 탄도계수 최적화 기법을 제안하였고, 이를 활용하여 분석 대상의 재진입 시점을 예측한 결과, 실제 재진입 시점과 약 73초의 차이를 보여주어 제안한 기법의 정확도를 확인하였다.

Czochralski법에 의해 성장시킨 Nd : $LiNbO_3$ 단결정의 주기적인 domain제어에 관한 연구 (A study on the periodical domain obtained in Nd : $LiNbO_3$ sinlgle crystals grown by czochralski method)

  • 최종건
    • 한국결정성장학회지
    • /
    • 제12권1호
    • /
    • pp.50-55
    • /
    • 2002
  • $LiNbO_3$ 단결정에 $Nd_2O_3$0.2~0.5 wt.%를 칭량하여 결정을 성장 시켰다. 그리고 광손상을 억제하기 위해 ZnO 2~8 mole%를 첨가하여 광손상에 대한 저항성을 높였다. 본 연구에서는 Nd가 doping된 단결정을 성장시켜 주기적인 domain을 만들고자 하였다

Preparation and characterization of ZnWO4 nanocrystallines and single crystals

  • Lim, Chang-Sung
    • 한국결정성장학회지
    • /
    • 제20권5호
    • /
    • pp.197-201
    • /
    • 2010
  • $ZnWO_4$ nanocrystallines were prepared from polymeric complex method using microwave irradiation. The average nanocrystalline sizes were 18~25 nm showing an ordinary tendency to increase with the temperatures from 400 to $600^{\circ}C$. Bulk type single crystals of $ZnWO_4$ were grown successfully in the [100], [010] and [001] directions using the Czochralski method. The effect of the growth parameters, such as the rotation speed, pulling rate and diameter of the grown crystals, were examined. The hardness, thermal expansion coefficients and dielectric constants of the crystals were evaluated.

Analysis of 3D wall building structures dynamic response

  • Chyzy, T.;Kretowska, J.;Miedzialowski, Cz.
    • Structural Engineering and Mechanics
    • /
    • 제22권1호
    • /
    • pp.33-52
    • /
    • 2006
  • Three-dimensional description of building structure taking into consideration soil-structure interaction is a very complex problem and solution of this problem is often obtained by using finite element method. However, this method takes a significant amount of computational time and memory. Therefore, an efficient computational model based on subdivision of the structure into building elements such as wall and floor slab elements, plane and three-dimensional joints and lintels, that could provide accurate results with significantly reduced computational time, is proposed in this study for the analysis three-dimensional structures subjected to dynamic load. The examples prove the efficiency and the computing possibilities of the model.

중성자 조사에 의해 생성된 점결함 연구 (A study on point defects induced with neutron irradiation in silicon wafer)

  • 김진현;류근걸
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
    • /
    • pp.62-66
    • /
    • 2002
  • The conventional floating zone(FZ) crystal and Czochralski(CZ) silicon crystal have resistivity variations longitudinally as well as radially The resistivity variations of the conventional FZ and CZ crystal are not conformed to requirement of dopant distribution for power devices and thyristors. These resistivity variations in conventional cystals limits the reverse breakdown voltage that could be achieved and forced designers of high power diodes and thyristors to compromise the desired current-voltage characteristics. So to produce high Power diodes and thyristors, Neutron Transmutation Doping(NTD) technique is the one method just because NTD silicon provides very homogeneous distribution of doping concentration. This procedure involves the nuclear transmutation of silicon to phosphorus by bombardment of neutron to the crystal according to the reaction $^{30}$ Si(n,${\gamma}$)longrightarrow$^{31}$ Silongrightarrow(2.6 hr)$^{31}$ P+$\beta$$^{[-10]}$ . The radioactive isotope $^{31}$ Si is formed by $^{31}$ Si capturing a neutron, which then decays into the stable $^{31}$ P isotope (i.e., the donor atom), whose distribution is not dependent on the crystal growth parameters. In this research, neutron was irradiated on FZ silicon wafers which had high resistivity(1000~2000 Ω cm), for 26 and 8.3hours for samples of HTS-1 and HTS-2, and 13, 3.2, 2.0 hours for samples of IP-1, IP-2 and IP-3, respectively, to compare resistivity changes due to time differences. The designed resistivities were approached, which were 2.l Ωcm for HTS-1, 7.21 Ω cm for HTS-2, 1.792cm for IP-1, 6.83 Ωcm for IP-2, 9.23 Ωcm for IP-3, respectively. Point defects were investigated with Deep Level Transient Spectroscopy(DLTS). Four different defects were observed at 80K, 125K, 230K, and above 300K.

  • PDF

양극 경두개직류자극에 의한 운동관련피질전위의 변화 (Change of Cerebral Motor Area Activity by Anodal Transcranial Direct Current Stimulation (tDCS))

  • 임영은;김수현;양대중;김태열
    • The Journal of Korean Physical Therapy
    • /
    • 제21권4호
    • /
    • pp.65-71
    • /
    • 2009
  • Purpose: Transcranial direct current stimulation (tDCS) is a useful method for modulating the brain activity. This study compared the effect of continuous and interrupted tDCS using the change in the movement related cortical potential. Methods: Thirty healthy participants (male: 18 and female: 12) were assigned randomly to three groups; sham tDCS, continuous tDCS, which the current continuously flowed for 10 minutes, and interrupted tDCS, which the interrupted current flowed for 10 minutes (repetition: 4sec stimulation and 5sec rest) at an intensity of 1mA with anodal polarity. The effect of tDCS on the right primary motor area was measured from the movement related cortical potential (MRCP) before and after the experiment. MRCP consisted of the bereitshaftspotential (BP) and negative slope potential (NS) at Cz and C4. Results: Continuous and interrupted tDCS showed a significant difference in the changes in the BP, NS at Cz and C4 compared to the sham tDCS. However, there was no significant difference between the continuous tDCS and interrupted tDCS. Conclusion: The change in cortical activity by continuous and interrupted tDCS results from an improvement in the MRCP. An interrupted tDCS may be a safe and useful modality for stimulating the cortical region.

  • PDF

건강한 성인에서 시각적 되먹임 훈련이 감각운동겉질의 뮤-리듬에 미치는 즉각적인 효과 (Immediate Effect on Mu-rhythm of Somatosensory Cortex using Visual Feedback Training in Healthy Adults)

  • 김수복;이언석
    • 대한물리의학회지
    • /
    • 제18권3호
    • /
    • pp.47-53
    • /
    • 2023
  • PURPOSE: A visual feedback method was proposed to induce brain stimulation in a stroke patient, and among them, there was a treatment using a mirror. On the other hand, mirror therapy focuses only on the functional changes in body movements, and analysis of neurophysiological mechanisms of brain activity is lacking. In addition, studies on evaluating the activity and response generated in specific brain regions during visual feedback training using mirrors are insufficient. METHODS: Fifteen healthy adults (male: 10, female: 5, Years: 23.33 ± 1.23), who were right-handed were recruited. By attaching the C3, Cz, and C4 channels in the sensorimotor cortex using an electroencephalogram, training was performed under the conditions without mirror-based visual feedback (No-condition) and with visual feedback (Tasks-condition). At this time, the immediate activity of the mu-rhythm in response to training was separated and evaluated. RESULTS: The tasks-condition of C3, Cz, and C4 channels activated the relative mu-rhythm rather than the no-condition, and all showed significant differences (p < .05). In addition, in all channels at the start time, the tasks-condition was more active than the no-condition (p < .05). The activity of the cortical response was higher in the tasks-condition than in the no-condition (p < .05). CONCLUSION: The mu-rhythm activity can be evaluated objectively when visual feedback using a mirror is applied to healthy subjects, and a basic analysis protocol is proposed.

다채널 청각 사건관련전위 P300 결정에서 전부위장력측정법과 전통적방법의 비교 (Comparison of Global Field Power Measurement and Conventional Method in Multi-channel Auditory Event Related Potential P300 Determination)

  • 전양환;한상익
    • 생물정신의학
    • /
    • 제7권2호
    • /
    • pp.180-185
    • /
    • 2000
  • Objective : The present study was designed to compare Global Field Power Measurement and conventional method in P300 determination. Method : The subjects were composed of patients(N=20) with schizophrenia by DSM-IV and normal controls(N=20). The auditory event related potential P300 was measured by "oddball paradigm". P300 components were determined by Global Field Power Measurement and conventional method at 5 electrodes(Fz, Cz, Pz, $T_3$, $T_4$). Results : P300 amplitudes of patients were smaller than those of controls across all electrodes and in both methods, but there was no differential power in P300 determination between two methods. Asymmetry of auditory event-related potential P300 was not shown between patients with schizophrenia and normal controls. Conclusion : It is implicated that it depends on clinical situations and research purposes what method of P300 determination will be more appropriate for patients with schizophernia.

  • PDF