• Title/Summary/Keyword: CVD, Chemical Vapor Deposition

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3C-SiC/Si 에피층 성장과 Ga 불순물 효과

  • 박국상;김광철;김선중;서영훈;남기석;이형재;나훈균;김정윤;이기암
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1997.10a
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    • pp.141-144
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    • 1997
  • High quality 3C-SiC epilayer was grown on Si(111) at 125$0^{\circ}C$ using chemical vapor deposition(CVD) technique by pyrolyzing tetramethylsilane(TMS). 3C-SiC epilayer was doped by tetramethylgallium(TMGa) during the CVD growth. The crystallinity of 3C-SiC was significantly enhanced by doping the gallium impurity.

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Performance of Thin Film Transistors Having an As-Deposited Polycrystalline Silicon Channel Layer

  • Hong, Wan-Shick;Cho, Hyun-Joon;Kim, Tae-Hwan;Lee, Kyung-Min
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08b
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    • pp.1266-1269
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    • 2007
  • Polycrystalline silicon (poly-Si) films were prepared directly on plastic substrates at a low (< $200^{\circ}C$) by using Catalytic Chemical Vapor Deposition (Cat-CVD) technique without subsequent annealing steps. Surface roughness of the poly-Si layer and the density of the gate dielectric layer were found to be influential to the TFT performance.

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DEVELOPMENT OF SUPERIOR THERMAL PROTECTIVE COATING ON CARBON COMPOSITES

  • SOO BIN BAE;JI EUN LEE;JONG GYU PAIK;NAM CHOON CHO;HYUNG IK LEE
    • Archives of Metallurgy and Materials
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    • v.65 no.4
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    • pp.1371-1375
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    • 2020
  • A superior SiC based thermal protection coating process for carbon composite, which can be especially effective in a hot oxidizing atmosphere, was established in this study. A multi-coating process based on a combination of Chemical Vapor Reaction (CVR) and Chemical Vapor Deposition (CVD) was developed. Various protective coating layers on carbon composite were tested in hot oxidizing surroundings and the test results verified that the thermal ablation rate could be dramatically reduced down to 3.8% when the protective multi-coating was applied. The thermal protection mechanism of the coating layers was also investigated.

Decomposition of Formaldehyde Using TiO$_2$ Photocatalyst Beads by Circulating Fluidized Bed Chemical Vapor Deposition (CFB-CVD법으로 제조된 TiO$_2$ 광촉매 비드를 이용한 포름알데히드의 분해)

  • Kim, Kyoung-Hwan;Kim, Yu-Bong;Lee, Seung-Young;Park, Jae-Hyeon;Lim, Jin-Young;Jung, Sang-Chul
    • Journal of Korean Society of Environmental Engineers
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    • v.30 no.7
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    • pp.688-693
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    • 2008
  • TiO$_2$ photocatalyst films deposited beads were prepared by circulating fluidized bed chemical vapor deposition(CFB-CVD) using TTIP(Titanium Tetra Iso-Propoxyde). Photocatalytic activities of Photocatalyst beads were evaluated by decomposition rate of formaldehyde in aqueous solution using a photo-reactor. From the result of photocatalytic degradation of formaldehyde, decomposition rate were shown gradually increased according to the increase of UV intensity, circulating fluid velocity and addition amount of H$_2$O$_2$. However the decomposition rate of formaldehyde were decreased according to the increase of initial concentration and pH value.