• 한국정밀공학회지
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• 제25권9호
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• pp.109-115
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• 2008

The cleaning process of contaminant particles adhering to the microchips, integrated circuits (ICs) or the like is essential in modern microelectronics industry. In the cleaning process particularly working with the application of inert gases, the removal of contaminant particles of submicron scale is very difficult because the particles are prone to reside inside the boundary layer of the working fluid, The use of cryogenic $CO_2$ cleaning method is increasing rapidly as an alternative to solve this problem. In contrast to the merits of high efficiency of this process in the removal of minute particles compared to the others, even fundamental parametric studies for the optimal process design in this cleaning process are hardly done up to date, In this study, we attempted to measure the cleaning efficiency with the variations of some principal parameters such as mass flow rate, injection distance and angle, and tried to draw out optimal cleaning conditions by measuring and evaluating an effective cleaning width called $d_{50}$.

• 보존과학회지
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• 제27권3호
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• pp.333-344
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• 2011

철제유물의 보존처리 과정 중 표면 이물질 제거는 유물의 원형을 찾아주는 중요한 단계이다. 현재 표면 이물질 제거 시 가장 많이 사용하는 sand blaster (air brasive)의 경우, 분사되는 유리가루는 인체에 유해하고 환경오염을 유발하는 주요한 물질이다. 그러므로 이런 문제점을 보완하기 위해 타 산업분야에서 친환경세정장비로 많이 쓰이고 있는 $CO_2$ snow cleaning을 철제유물 표면 이물질 제거에 적용하여 비교·연구 하였다. 실험은 부식시험편과 철제유물에 sand blaster와 $CO_2$ snow cleaning을 적용하여 비교 분석하였다. 부식시험편의 경우, sand blaster와 $CO_2$ snow cleaning 방법 모두 이물질 제거 정도, 표면 거칠기, 색도 측정 결과가 유사하게 나타났으며, 특히 SEM을 통해 $CO_2$ snow cleaning을 적용한 부식시험편은 sand blaster에 비해 표면을 마모시키지 않는 것을 확인하였다. 또한 철제유물에 적용한 경우, $CO_2$ snow cleaning의 power nozzle은 sand blaster에 비해 표면을 마모시키지 않고 고른 표면을 유지하는 등 세정효과가 우수하게 나타났다. 그리고 X-ray촬영을 통해 이물질 제거 전과 후 금속 내부의 구조적 변화는 없음을 관찰하였다. 결론적으로 sand blaster와 $CO_2$ snow cleaning의 power nozzle은 이물질 제거 효과가 유사함을 확인할 수 있었다. 그러나 $CO_2$ snow cleaning의 power nozzle을 철제유물에 적용하여도 sand blaster와 유사한 효과는 얻을 수 있으나, 분사압력이 높을 경우 철제 유물이 손상될 우려가 있으므로 유물 내부 상태에 따라 적용여부를 판단해야 함을 본 실험을 통하여 알 수 있었다.

• 한국표면공학회지
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• 제35권6호
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• pp.377-382
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• 2002

We investigated the appropriate wet cleaning process for Co-Ti-Si compounds formed on top of cobalt disilicide made from Co/Ti deposition and two rapid thermal annealing (RTA). We employed three wet cleaning processes, WP1 ($H_2$SO$_4$ etchant), WP2 ($NH_4$OH etchant), and WP3 which execute sequentially WP1 and WP2 after the first RTA. All samples were cleaned with BOE etchant after the second RTA. We characterized the sheet resistance with process steps by a four-point probe, the microstructure evolution by a cross detail sectional transmission electron microscope, a Auger depth profiler, and a X-ray diffractometer (XRD). We confirmed WP3 wet cleaning process were the most suitable to remove CoTiSi layer selectively.

• 청정기술
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• 제12권1호
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• pp.1-9
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• 2006

산업세정제 중에서 환경친화적이라 대체 세정제로 유망한 수계세정제를 배합하고 임의 세정성을 평가하였다. 수계세정제 배합시 EO부가 몰수가 3, 5, 7인 primary alcohol ethoxylate계열의 비이온계면활성제를 주계면활성제(S)로 하고 음이온계면활성제, 알코올류 등을 보조계면활성제(A)로 하여 수계세정제를 배합하였고, 이들 배합비(A/S)에 따른 절삭유와 그리스의 혼합오염물에 대한 세정성을 평가하였다. 또한 builder인 NaOH, KOH, $Na_2CO_3$, $NaHCO_3$를 첨가하여 세정효율 향상을 평가하였다. 세정성 평가 실험결과 보조계면활성제로는 음이온계면활성제인 Triethanolamine Lauryl Sulfate(TLS) 사용 시에 가장 세정효율이 좋았고, builder로는 NaOH, $Na_2CO_3$가 우수한 세정효율을 보여주었다.

• 한국정밀공학회지
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• 제25권6호
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• pp.13-19
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• 2008

• 한국표면공학회지
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• 제32권2호
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• pp.109-124
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• 1999

A study for replacing methylene chloride for an alternative cleaning agent which can be utilized for cleaning aluminium parts of hard disk drives was carried out at Suwon factory of Samsung Electro-mechanics Co. Ltd. As a result, quite a good cleaning agent was selected through data collection of alternative cleaning agents, their analysis of environment effects and safty factors and testing of their cleaning power. As compared with methylene chloride, the selected cleaning agent has better cleaning power. It is also more environmental-friendly, less toxic and more economical. And the operating cost reduction due to adoption of this alternative cleaning agent in Samsung Electro-mechanics Co. Ltd. was more than ￦l46,000,000 annually without any capital instrument in addition to improvement of environmental and safty conditions in the plant.

• 반도체디스플레이기술학회지
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• 제11권3호
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• pp.7-11
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• 2012

Among various wet cleaning methods, megasonic and jet spray gained their popularity in single wafer cleaning process for the efficient removal of particulate contaminants from the wafer surface. In the present study, we evaluated these two cleaning methods for particle removal efficiency (PRE) and pattern damage on the aluminum layered wafer surface. Also the effect of $CO_2$ dissolved water in jet spray cleaning is assessed by measuring PRE. It is observed that the jet spray cleaning process is more effective in terms of PRE and pattern damage compared to megasonic cleaning and the mixing of $CO_2$ in the water during jet sprays further increases the PRE. We believe that the outcome of the present study is useful for the semiconductor cleaning process engineers and researchers.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.927-928
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• 2008

• 한국태양에너지학회:학술대회논문집
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• 한국태양에너지학회 2012년도 춘계학술발표대회 논문집
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• pp.248-254
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• 2012

In the situation of expanding domestic solar power supply business long-term performance modeling of a proposed solar-cooling and cleaning system to increase electromotive force and light transmission is carried out to test the effectiveness of the system. To test the effectiveness of the system, the data which comparing the solar power planet installing the system to not installing at the same time is used. A difference between the utilization factor of each comparison group were recorded. Approximately from one year to two years Field Test was performed, Result of apply to cooling/cleaning technology, Each of plant by From least 7 percent up to 16 percent utilization factor increased, and the cooling / cleaning is output through improved as a result of the determined.

• 대한건축학회논문집:구조계
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• 제36권5호
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• pp.187-194
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• 2020

This study presents the energy-saving sequential control algorithm to handle indoor CO₂ and PM2.5 for the improvement of the air quality of school classrooms. To solve indoor air quality (IAQ) problems, air cleaning and ventilation systems are mainly used for school classrooms. Although air cleaning is able to collect PM2.5, it is difficult to remove harmful gas substances. The ventilation system is suitable to tackle CO and CO₂, the volume ventilation, however, is relatively small. In this paper, to remove CO₂ and PM2.5, the pollutant balance equation for improving indoor air quality is reviewed. The sequential control algorithm of the ventilation and air cleaning system with four levels of criteria is introduced for the effective removal of pollutants. The proposed sequential control algorithm confirms that indoor CO₂ and PM2.5 can be properly controlled below the standard value. In addition, the sequential operation of air cleaning and ventilation systems has shown significant improvement in IAQ compared to the independent ventilation system operation. Particularly, such systems are efficient when outdoor PM2.5 is high.