Optimization of Factors according to Process-variables in Pulse-type Cryogenic ![]() |
Lee, Seong-Hoon
(중앙대학교 기계공학부)
Lee, Ju-Hong (중앙대학교 기계공학부) Kim, Pil-Kee (중앙대학교 기계공학부) Seok, Jong-Hyuk (인하공업전문대학 화공환경과) Oh, Byung-Joon ((주)에이앤아이) Seok, Jong-Won (중앙대학교 기계공학부) |
1 | Hattori, T., "Contamination control: Problems and prospects," Solid State Technol., Vol. 33, No. 7, 1-8, 1990 DOI ScienceOn |
2 | Spur, G., Uhlmann, E. and Elbing, F., "Dry-ice blasting for cleaning: process, optimization, and application," Wear, Vol. 233, No. 235, pp. 402-411, 1999 DOI ScienceOn |
3 | Zhao, Y. P., "Morphological stability of epitaxial thin elastic films by van der waals force," Arch. Appl. Mech. Vol. 72, No. 1, pp. 77-84, 2002 DOI |
4 | Na, Y. M., Kim, H. and Kim, S. G., "Measurement of coating removal rate of accelerated dry ice snow impact," Clean Technol, Vol. 10, No. 4, pp. 177-187, 2004 |
5 | Hattori, T. and Koyate, S., "An automated particle detection and identification system in VLSI wafer processing," Solid State Technol., Vol. 34, No. 9, pp. 1-6, 1991 DOI ScienceOn |
6 |
Linger, D. R., " |
7 | Maboudian, R., Ashurst, W. R. and Carraro, C., "Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments," Sensors and Actuators A, Vol. 82, No. 1, pp. 219-223, 2000 DOI ScienceOn |
8 |
Banerjee, S. and Campbell, A., "Principles and mechanisms of sub-micrometer particle removal by |
9 | Sung, U. C., Yoon, C. N. and Kim, S. G., "Surface cleaning by ice-particle jet(II): preparation of contaminated surface and its cleaning," Korean J. of Chem. Eng, Vol. 14, No. 1, pp. 15-22. 1997 DOI |
![]() |