• Journal of the Korean Society for Precision Engineering
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• v.25 no.9
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• pp.109-115
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• 2008

The cleaning process of contaminant particles adhering to the microchips, integrated circuits (ICs) or the like is essential in modern microelectronics industry. In the cleaning process particularly working with the application of inert gases, the removal of contaminant particles of submicron scale is very difficult because the particles are prone to reside inside the boundary layer of the working fluid, The use of cryogenic $CO_2$ cleaning method is increasing rapidly as an alternative to solve this problem. In contrast to the merits of high efficiency of this process in the removal of minute particles compared to the others, even fundamental parametric studies for the optimal process design in this cleaning process are hardly done up to date, In this study, we attempted to measure the cleaning efficiency with the variations of some principal parameters such as mass flow rate, injection distance and angle, and tried to draw out optimal cleaning conditions by measuring and evaluating an effective cleaning width called $d_{50}$.

• Journal of Conservation Science
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• v.27 no.3
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• pp.333-344
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• 2011

Cleaning of foreign matter and corrosion products on surface among conservation treatment of iron artifacts is an important part for looking up a original form. The sand blaster is the most popular equipment when it removes the foreign matter and corrosion products on iron artifacts surface. Current foreign matter and corrosion products equipment, which mostly uses, is sand blaster. Glass dust which sprayed from sand blaster is harmful and causing environmental pollution. In order to solve these problems, we investigated the $CO_2$ snow cleaning that use a eco-friendly equipment to apply for cleaning foreign matter and corrosion products on surface of iron artifacts. It examined by using sand blaster and $CO_2$ snow cleaning to aged steel coupon and iron artifacts. In case of aged steel coupon, the result showed that the sand blaster and $CO_2$ snow cleaning methods were similar to the degrees of cleaning foreign matter and corrosion products, through surface roughness, color measurement and SEM. $CO_2$ snow cleaning applied to aged steel coupons weren't worn out the surface in comparison with sand blaster by SEM. When applied to the iron artifacts, power nozzle of the $CO_2$ snow cleaning was an excellent cleaning effect that surface wern't worn out in comparison with sand blaster. And, it showed that internal structure change of metal was no found before and after cleaning by X-ray radiography. Consequently, we confirmed that cleaning of the sand blaster and power nozzle of $CO_2$ snow cleaning were similar to the effect. But, it's very careful to use this method because of high outlet pressure of power nozzle for applying to the iron artifacts. As a result of experiments, it could be found that the cleaning methods should be selected depending on internal state of the artifacts.

• Journal of the Korean institute of surface engineering
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• v.35 no.6
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• pp.377-382
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• 2002

We investigated the appropriate wet cleaning process for Co-Ti-Si compounds formed on top of cobalt disilicide made from Co/Ti deposition and two rapid thermal annealing (RTA). We employed three wet cleaning processes, WP1 ($H_2$SO$_4$ etchant), WP2 ($NH_4$OH etchant), and WP3 which execute sequentially WP1 and WP2 after the first RTA. All samples were cleaned with BOE etchant after the second RTA. We characterized the sheet resistance with process steps by a four-point probe, the microstructure evolution by a cross detail sectional transmission electron microscope, a Auger depth profiler, and a X-ray diffractometer (XRD). We confirmed WP3 wet cleaning process were the most suitable to remove CoTiSi layer selectively.

• Clean Technology
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• v.12 no.1
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• pp.1-9
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• 2006

Aqueous cleaning agents which are considered to be environmental-friendly and promising alternative ones among various industrial cleaning agents were evaluated in this words. In order to formulate aqueous cleaning agents, primary alcohol ethoxylates with 3, 5 and 7 moles of ethylene oxides among nonionic surfactants were selected as main surfactants. And anionic surfactants and alcohols were chosen as their cosurfactants. Builders such as NaOH, KOH, $Na_2CO_3$ and $NaHCO_3$ were also evaluated as additives for improvement of cleaning efficiency of aqueous cleaning agents. The experimental results of cleaning ability tests show that introduction of anionic surfactant TLS as cosurfactant in alcohol ethoxylate-based aqueous solution gives the best cleaning efficiency for removing mixed soil of cutting oil and grease. NaOH and $Na_2CO_3$ are also shown to play an important role for improvement of cleaning efficiency in a aqueous cleaning agent.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.6
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• pp.13-19
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• 2008

• Journal of the Korean institute of surface engineering
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• v.32 no.2
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• pp.109-124
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• 1999

A study for replacing methylene chloride for an alternative cleaning agent which can be utilized for cleaning aluminium parts of hard disk drives was carried out at Suwon factory of Samsung Electro-mechanics Co. Ltd. As a result, quite a good cleaning agent was selected through data collection of alternative cleaning agents, their analysis of environment effects and safty factors and testing of their cleaning power. As compared with methylene chloride, the selected cleaning agent has better cleaning power. It is also more environmental-friendly, less toxic and more economical. And the operating cost reduction due to adoption of this alternative cleaning agent in Samsung Electro-mechanics Co. Ltd. was more than ￦l46,000,000 annually without any capital instrument in addition to improvement of environmental and safty conditions in the plant.

• Journal of the Semiconductor & Display Technology
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• v.11 no.3
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• pp.7-11
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• 2012

Among various wet cleaning methods, megasonic and jet spray gained their popularity in single wafer cleaning process for the efficient removal of particulate contaminants from the wafer surface. In the present study, we evaluated these two cleaning methods for particle removal efficiency (PRE) and pattern damage on the aluminum layered wafer surface. Also the effect of $CO_2$ dissolved water in jet spray cleaning is assessed by measuring PRE. It is observed that the jet spray cleaning process is more effective in terms of PRE and pattern damage compared to megasonic cleaning and the mixing of $CO_2$ in the water during jet sprays further increases the PRE. We believe that the outcome of the present study is useful for the semiconductor cleaning process engineers and researchers.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.927-928
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• 2008

• 한국태양에너지학회:학술대회논문집
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• 2012.03a
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• pp.248-254
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• 2012

In the situation of expanding domestic solar power supply business long-term performance modeling of a proposed solar-cooling and cleaning system to increase electromotive force and light transmission is carried out to test the effectiveness of the system. To test the effectiveness of the system, the data which comparing the solar power planet installing the system to not installing at the same time is used. A difference between the utilization factor of each comparison group were recorded. Approximately from one year to two years Field Test was performed, Result of apply to cooling/cleaning technology, Each of plant by From least 7 percent up to 16 percent utilization factor increased, and the cooling / cleaning is output through improved as a result of the determined.

• Journal of the Architectural Institute of Korea Structure & Construction
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• v.36 no.5
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• pp.187-194
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• 2020

This study presents the energy-saving sequential control algorithm to handle indoor CO₂ and PM2.5 for the improvement of the air quality of school classrooms. To solve indoor air quality (IAQ) problems, air cleaning and ventilation systems are mainly used for school classrooms. Although air cleaning is able to collect PM2.5, it is difficult to remove harmful gas substances. The ventilation system is suitable to tackle CO and CO₂, the volume ventilation, however, is relatively small. In this paper, to remove CO₂ and PM2.5, the pollutant balance equation for improving indoor air quality is reviewed. The sequential control algorithm of the ventilation and air cleaning system with four levels of criteria is introduced for the effective removal of pollutants. The proposed sequential control algorithm confirms that indoor CO₂ and PM2.5 can be properly controlled below the standard value. In addition, the sequential operation of air cleaning and ventilation systems has shown significant improvement in IAQ compared to the independent ventilation system operation. Particularly, such systems are efficient when outdoor PM2.5 is high.