• 한국재료학회지
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• 제16권2호
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• pp.75-79
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• 2006

The effect of ozone and/or ultrasound treatments on the efficiency of slurry removal in post sliced cleaning (PSC) of silicon ingot was studied. Efficiency of slurry removal was evaluated as functions of time, temperature and surfactant with DOE (Design of Experiment) method. Residual slurries were observed on the wafer surface in case of cleaning by ozone or ultrasound separately. However, a clean wafer surface was appeared when cleaned with ozone and ultrasound simultaneously. It has found that cleaning time was the main effect among temperature, time and surfactant. Elevated temperature, addition of surfactant and high ozone concentration helped to accelerate efficient removal of slurry. The improvement of removal efficiency seems to be related to the formation of more active OH radicals. The highly cleaned surface was achieved at 10 wt% ozone, 1 min and 10 vol% surfactant with ultrasound. Application of ozone and ultrasound might be a useful method for PSC process in wafer cleaning.

• 로봇학회논문지
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• 제5권3호
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• pp.209-215
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• 2010

This paper presents a graphic user interface system consisting of graphic simulator and remote control system for a building cleaning robot. It provides a tool of convenient 3D graphical map construction for real world. The 3D map is reconstructed from existing 2D building CAD data with DXF format by using OpenGL graphic API. Through this system, graphic display of robot's status information, remote control and cleaning scheduling can be done for a building cleaning robot. This proposed system is expected to give efficient way of graphic simulation and remote monitoring and control system for a building cleaning robot.

• 한국산학기술학회논문지
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• 제15권8호
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• pp.4784-4789
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• 2014

본 논문의 목적은 세척기를 구조 변경하여 새로운 세척기를 개발하는데 있다. 세척 성능을 향상시킨 세척기 개발을 위하여 기존의 세척기 구조를 변경하여 설계하였다. 설계 시 프로그램은 CATIA를 사용하였으며 구조해석에 필요한 모델링도 CATIA를 사용하였다. 또한 모델링된 세척기에 대하여 3차원 유한요소해석 프로그램인 ANSYS를 사용하여 구조해석을 실시하였으며 해석결과로서 총변형량, 응력, 변형률을 구하였다. 이러한 구조해석의 결과는 새로운 세척기의 제품개발에 활용되었다.

• Environmental Engineering Research
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• 제21권1호
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• pp.45-51
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• 2016

Membrane bioreactor (MBR) and reverse osmosis (RO) membrane system was applied to the treatment and reclamation of textile wastewater in Thailand. An experiment was carried out to determine the fouling behavior and effect of anti-scalant and biocide addition to flux decline and its recovery through chemical cleaning. The RO unit was operated for one month after which the fouled membranes were cleaned by sequential chemical cleaning method. RO flux was found rapidly declined during initial period and only slightly decreased further in long-term operation. The main foulants were organic compounds and thus sequential cleaning using alkaline solution followed by acid solution was found to be the most effective method. The provision of anti-scalant and biocide in feed-water could not prevent deposition of foulant on the membrane surface but helped improving the membrane cleaning efficiencies.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2018년도 추계 학술논문 발표대회
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• pp.138-139
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• 2018

The purpose of this study is to analyze the work of the existing manpower dependent cleaning method by investigating the window cleaning site. In this study, detailed work contents were confirmed by on-site investigation and interview with experts, and the relationship, procedure, repetition work, and time required for each work were analyzed. The future analysis results will be used as a basic data for comparative analysis of productivity and economical efficiency with the window cleaning device to be developed.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.2005-2010
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• 2004

Ultrasonic cleaning is performed by cavitation which is caused by the change of the sound pressure due to the vibration in a cleaning tank. In this study, experiments on electric power and sound pressure with various temperatures, dissolved oxygen and the level of the fluid was done in order to find out how the changes in a cleaning tank affect cavitation. As a result of a series of experiments, we found that transducer impedance changes periodically in response to the variances of fluid and have a direct influence on cleaning efficiency.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2017년도 추계 학술논문 발표대회
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• pp.203-204
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• 2017

In case of developing a guide-rail type window cleaning robot, only the first prototype has been developed. In this study, it was considered that the size and the load of the window cleaning robot was not optimized, and through the structural analysis of the self-weight of the window cleaning robot, the stress concentration area was derived and the concentrated stress was quantified. Analysis showed that the upper rail shaft had a bending stress of 9.964Mpa and the bolt had a shear stress of 19.544Mpa. The results of this study will be used as basic data for designing future prototypes.

• 동력기계공학회지
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• 제21권4호
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• pp.26-33
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• 2017

In this paper, we developed a control algorithm to maximize the cleaning performance and the cleaning efficiency of the underwater cleaning robot platform which has been developed for various cistern environment in the industrial field. Through these research and development, we have presented the operation and application of underwater cleaning robots that have been developed, and contributed to commercialization. Finally, this results were verified the effectiveness through actual field experiments.

• 반도체디스플레이기술학회지
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• 제20권2호
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• pp.34-42
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• 2021

Recent cleaning technologies of mask in extremely ultraviolet semiconductor processes were reviewed, focused on newly developed issues such as particle size determination or hydrocarbon and tin contaminations. In detail, critical particle size was defined and proposed for mask cleaning where nanosized particles and its various shapes would result in surface atomic ratio increase vigorously. A new cleaning model also was proposed with amphoteric behavior of electrolytically ionized water which had already shown excellent particle removing efficiency. Having its non-equilibrium and amphoteric properties, electrolyzed ion water seemed to oxidize contaminant surface selectively in nano-scale and then to lift up oxidized ones from mask surface very effectively. This assumption should be further investigated in future in junction with hydrogen bonding and cluster of water molecules.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.161.3-161
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• 2001

This paper describes design features of a cleaning robot for use in a radioactive zone of the Isolation room of the Irradiated Material Examination Facility (IMEF) at Korea Atomic Energy Research Institute (KAERI). This cleaning robot is intended to completely eliminate human interaction with hazardous radioactive contaminants. The clean ing robot that is operated either by manual mode or by autonomous mode is designed to be capable of cleaning the isolation room´s floor surface and collecting dry nuclear fuel debris and other radioactive waste placed on the floor. The functional, mechanical and electrical design considerations of the cleaning robot in terms of remote cleanup operation and remote maintenance at a radioactive environment are presented. A graphical representation of the cleaning ...