• 제목/요약/키워드: CFD-ACE+

검색결과 114건 처리시간 0.027초

A Destruction Pattern Analysis of a Turbo-Molecular Pump According to the Foreline Clamp Damage in an ICP Dry Etcher for 300 mm Wafers

  • Jeong, Jinyong;Lee, Intaek;Joo, Junghoon
    • Applied Science and Convergence Technology
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    • 제24권2호
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    • pp.27-32
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    • 2015
  • We analyzed the destruction patterns of a turbo-molecular pump (TMP) resulting from its sudden exposure of a foreline to the atmospheric pressure due to a destruction of the foreline connecting clamp of an ICP dry etcher for 300 mm wafers during high-vacuum operation ($5{\times}10^{-6}$ Torr). Unlike in the case of view port's breakage, the TMP's rotor module was crashed inside the chamber. The primary damage resulted from the collision of the blades and stators, and the secondary damage resulted from the breaking of the rotor - driving shaft assembly. The fixing screws of the rotor and axial shaft were bent and broken when the TMP controller output the maximum current even after the crash event. Electrical power consumption analysis of the TMP power controller confirmed it. The stress distributions were analyzed by a finite element method using CFD-ACE+ multi physics software. Rotating inertia of each parts and kinetic energies were calculated as well. 68% of the rotational kinetic energy is deposited by the rotor - shaft module.

좁은 간격 CCP 전원의 전극과 측면 벽 사이 플라즈마 분포 (Investigation of Spatial Distribution of Plasma Density between the Electrode and Lateral Wall of Narrow-gap CCP Source)

  • 최명선;장윤창;이석환;김곤호
    • 반도체디스플레이기술학회지
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    • 제13권4호
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    • pp.1-5
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    • 2014
  • The plasma density distribution in between the electrode and lateral wall of a narrow gap CCP was investigated. The plasma density distribution was obtained using single Langmuir probe, having two peaks of density distribution at the center of electrode and at the peripheral area of electrodes. The plasma density distribution was compared with the RF fluctuation of plasma potential taken from capacitive probe. Ionization reactions obtained from numerical analysis using CFD-$ACE^+$ fluid model based code. The peaks in two region for plasma density and voltage fluctuation have similar spatial distribution according to input power. It was found that plasma density distribution between the electrode and the lateral wall is closely related with the local ionization.

회전형 마그네트론 음극의 냉각수 유동 및 열전달 해석 (Flow and Heat Transfer Analysis of Cooling Water in a Rotating Magnetron Cathode)

  • 주정훈
    • 한국표면공학회지
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    • 제52권3호
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    • pp.171-179
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    • 2019
  • We have developed a numerical model to analyze flow dynamics and heat transfer characteristics of the cooling water in a circular rotating magnetron cathode by a moving boundary grid method realized in a commercial multiphysics package, CFD-ACE+. The numerical model is composed of a target, dual mass rotating cathode and cooling water connections. When the inlet and outlet of the cooling water are offset by the same distance from the rotation axis, the temperature at the center is higher by $50^{\circ}C$ at maximum. At 5 mm away from the target surface, the temperature profile showed typical center high characteristic. At heat input of 30 kW, the maximum temperature change of the cooling water hits $6^{\circ}C$ within 0.5 sec under 60 rpm. With a cooling water configuration of center in/edge out, the temperature of the center region of the target gets lowered. Within 100 seconds of plasma operation time, the cooling water temperature keeps getting higher.

저 레이놀즈 수 평판 디퓨져 유동 수치적 연구 (Numerical Study of Planar Diffuser Flows at Very Low Reynolds numbers)

  • 오종윤
    • 한국추진공학회:학술대회논문집
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    • 한국추진공학회 2005년도 제25회 추계학술대회논문집
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    • pp.110-113
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    • 2005
  • This paper presents flow regime maps of two-dimensional, planar diffusers with constant-area ducts at very low Reynolds numbers. They are obtained from numerical calculations using the commercial CFD program CFD-ACE+. The Reynolds numbers considered are 63, 105, and 210. For each Reynolds number, a wide range of geometric parameters of dimensionless diffuser length, which is a ratio of diffuser length to throat width, $1 and divergence half angle $1^{\circ}<\phi<50^{\circ}$ are selected to obtain steady-state solutions. These maps can be served as a guideline to designers for very low Reynolds number diffuser flows.

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전산 유체 모델링을 이용한 평판형 고체산화물 연료전지 작동특성 전산모사 (Performance Simulation of Planar Solid Oxide Fuel Cells Characteristics: Computational Fluid Dynamics)

  • 우효상;정용재
    • 전기화학회지
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    • 제7권2호
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    • pp.69-79
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    • 2004
  • 전산모사를 이용하여 특성을 정확하게 모사하기 위해서는 전지 내부에서 발생하는 다양한 물리적, 화학적 현상을 고려하여야 한다. 이를 위해, 본 연구에서는 다양한 전지 내부 현상에 대한 변수를 고려할 수 있는 전산유체 상용코드인 CFD-ACE+를 이용하여 평판형 고체산화물 연료전지의 작동 특성을 분석하였다. 단위 스택에서 발생하는 물질전달과 열전달 및 전기화학 반응에 의한 전하이동을 복합적으로 고려하여, 작동조건 하에서 각 공정적, 구조적 변수 변화에 따른 전지특성을 예측하였다. 이러한 전산모사 방법을 통하여 확산과 유동에 의한 전지 내 반응물과 생성물의 mass fraction 분포와 단위 스택의 내부 온도분포 그리고 전지 특성을 나타내는 polarization curve에 의한 고체산화물 연료 전지의 분극 특성을 정성, 정량적으로 제시하였다. 본 연구를 통해 평판형 단위 스택 내에서의 다양한 변수 변화에 따른 전지의 작동 특성에 대한 효율적 예측이 가능하였고, 고체산화물 연료전지 작동 시 발생하는 현상에 대한 전산모사 접근법을 체계적으로 제시할 수 있었다.

CFD를 이용한 풍향에 따른 스마트무인기 흡기구 성능 변화 예측 (Prediction of Performance Change for the Intake system of Smart UAV With Freestream Wind Direction Using CFD Analysis)

  • 정용운;전용민;양수석
    • 한국전산유체공학회:학술대회논문집
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    • 한국전산유체공학회 2004년도 추계 학술대회논문집
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    • pp.95-99
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    • 2004
  • The developing Smart UAV in KARI supposes high speed flight as like a conventional plane, as well as vertical takeoff and landing as like a helicopter. Therefore, the air intake system should be designed to provide the sufficient air flow to the engine and the maximum possible total pressure recovery at the engine intake screen over a wide range of flight conditions. For this purpose, we designed the intake system using a pilot type intake model and plenum chamber In this paper, we designed the intake model and analyzed the performance of designed intake system using the general-purpose commercial CFD code, CFD-ACE+ For 3-D calculation, we generated mesh using the unstructured gird and used $\kappa-\epsilon$ turbulence model. The analysis results of the total pressure variation and the velocity distribution was illustrated in this paper. The pressure recovery and distortion coefficient at a plane coincident with the compressor inlet were calculated and streamline variation through the intake system was investigated at the worst condition as well as the standard flight condition.

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코로나 방전기가 없는 전기집진기의 미세입자 집진에 관한 수치해석 (Numerical Investigation on Capture of Sub-Micron particles in Electrostatic Precipitator without Corona Discharger)

  • 이진운;장재성;이성혁
    • 한국분무공학회지
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    • 제16권2호
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    • pp.69-75
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    • 2011
  • This article presents computational fluid dynamics (CFD) simulations of sub-micron particle movements and flow characteristics in laboratory-scale electrostatic precipitator (ESP) without corona discharge, and for simulation, it uses the commercial CFD program (CFD-ACE) including electrostatic theory and Lagrangian-based equation for sub-micron particle movement. For validation of CFD results, a simple cylindrical type of ESP is simulated and numerical prediction shows fairly good agreement with the analytical solution. In particular, the present study investigates the effect of particle diameter, inlet flow rate, and applied electric potential on particle collection efficiency and compares the numerical prediction with the experimental data, showing good agreement. It is found that the particle collection efficiency decreases with increasing inlet flow rate because the particle detention time becomes shorter, whereas it decreases with the increase in sub-micron particle diameter and with the decrease of applied electric voltage resulting from smaller terminal electrostatic velocity.

CRW 비행체 덕트 시스템 설계를 위한 CFD의 활용 (The Application of CFD for the Duct System Design of CRW aircraft)

  • 정용운;전용민;양수석
    • 한국전산유체공학회:학술대회논문집
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    • 한국전산유체공학회 2003년도 추계 학술대회논문집
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    • pp.200-205
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    • 2003
  • The Canard rotor/wing (CRW) aircraft concepts offer great potential for application by allowing the use of a common propulsion system for high-speed cruise and low-speed powered lift. Using the rotor for lift in both flight modes increases its utility. In the hovering mode, the exhausted gas from an gas turbine engine is accelerated through the duct system and it provides the tipjet power for rotor system enough to lift the aircraft. In the cruise mode, the rotor is fixed and the exhausted gas is extracted through the main nozzle, such that the aircraft is able to flight with high speed. The duct system was designed using 1-D fanno line flow theory and empirical data. However, the empirical data of the pressure loss coefficient for various bending and dividing ducts were not enough to design our duct system adaptively. Therefore, using 3-D CFD analysis we obtained the pressure loss coefficient for our duct models and chose the appropriate bending or diving duct type. In this paper, we used the CFD-ACE+ software package for the CFD analysis and the modeling of duct system. Through the 3-D CFD analysis, we investigated also the pressure loss and the velocity distributions of the designed whole duct system as well as the blade duct. Comparing the 3-D CFD result with 1-D analysis result, we lessened the uncertainty of the designed duct system and speculated the problem that was not concerned in design state.

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CFD 해석을 통한 4종의 건식 분류층 석탄가스화기 설계개념 비교 (Comparison of Design Concepts for Four Different Entrained-Bed Coal Gasifier Types with CFD Analysis)

  • 윤용승;주지선;이승종
    • 공업화학
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    • 제22권5호
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    • pp.566-574
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    • 2011
  • 석탄가스화기는 석탄가스화복합발전과 석탄간접액화 공정에서 고효율을 얻기 위한 중요한 설비 중 하나이다. 현재 여러 종류의 석탄가스화기가 성공적으로 사용되고 있지만, 간단하면서도 신뢰도를 높일 수 있는 다양한 설계 변경이 가능하다. 건식 분류층 가스화기 4종류의 형태를 제시하고 이들을 체류시간, 가스화기 출구 합성가스의 온도, 합성가스 조성을 중점으로 비교하였다. 설계개념이 적정한지를 우선 파악하고자 반응을 배제한(cold-flow) CFD 해석을 먼저 수행하였고, 실제 가스화기 조건을 반영한 화학반응이 고려된(hot-flow) 해석을 수행하여 비교하였다. 가스화기 설계에 CFD를 적용하는 데는 슬랙의 거동과 슬랙탭 설계 등 측면에서 제한적이기는 하지만, 다양한 설계개념 중에서 가능성이 높은 가스화기 형태의 범위를 좁히는 데 매우 유용하게 사용될 수 있다.

가스 누출 실험, CFD 및 거리산출 비교를 통한 LP가스 누출 검지농도 분포에 대한 고찰 (A Comparison on Detected Concentrations of LPG Leakage Distribution through Actual Gas Release, CFD (FLACS) and Calculation of Hazardous Areas)

  • 김정환;이민경
    • 공업화학
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    • 제32권1호
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    • pp.102-109
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    • 2021
  • Recently, an interest in risk calculation methods has been increasing in Korea due to the establishment of classification code for explosive hazardous area on gas facility (KGS CODE GC101), which is based on the international standard of classification of areas - explosive gas atmospheres (IEC 60079-10-1). However, experiments to check for leaks of combustible or toxic gases are very difficult. These experiments can lead to fire, explosion, and toxic poisoning. Therefore, even if someone tries to provide a laboratory for this experiment, it is difficult to install a gas leakage equipment. In this study we find out differences among actual experiments, CFD by using FLACS and calculation based on classification code for explosive hazardous area on gas facility (KGS CODE GC101) by comparing to each other. We develpoed KGS HAC (hazardous area classification) program which based on KGS GC101 for convenience and popularization. As a result, actual gas leak, CFD and KGS HAC are showing slightly different results. The results of dispersion of 1.8 to 2.7 m were shown in the actual experiment, and the CFD and KGS HAC showed a linear increase of about 0.4 to 1 m depending on the increase in a flow rate. In the actual experiment, the application of 3/8" tubes and orifice to take into account the momentum drop resulted in an increase in the hazardous distance of about 1.95 m. Comparing three methods was able to identify similarities between real and CFD, and also similarities and limitations of CFD and KGS HAC. We hope these results will provide a good basis for future experiments and risk calculations.