Investigation of Spatial Distribution of Plasma Density between the Electrode and Lateral Wall of Narrow-gap CCP Source |
Choi, Myung-Sun
(Department of Energy Systems Engineering, Seoul National University)
Jang, Yunchang (Department of Energy Systems Engineering, Seoul National University) Lee, Seok-Hwan (Department of Energy Systems Engineering, Seoul National University) Kim, Gon-Ho (Department of Energy Systems Engineering, Seoul National University) |
1 | M.-S Choi, Y. Jang, S.-H Lee, G.-H Kim, Journal of KSDT, vol.13, No.3, pp 39-43, 2014. |
2 | Z.-H. Bi, Z.-L. Dai, Y.-R. Zhang, D.-P. Liu, Y.-N, Wang, Plasma Sources Sci. Technol. 22 (2013) 055007 (8pp). DOI ScienceOn |
3 | M. A. Lieberman, J. P. Booth, P. Chabert, J. M. Rax, M. M. Turner, Plasma Sources Sci. Technol. 11 (2002) 283-293. DOI ScienceOn |
4 | A. Perret, P. Chabert, J.-P. Booth, J. Jolly, J. Guillon, and Ph. Auvaray, Appl. Phys. Lett. 83 (2003) 243. DOI ScienceOn |
5 | V. Volynetz, A. Ushakov, D. Sung, Y. N. Tolmachev, V. G. Pashkovsky, J. B. Lee, T. Y. Kwon, K. S. Jeong, J. Vac. Sci. Technol. A 26, (2008) 406. DOI ScienceOn |
6 | I. Sawada, P. L. G. Ventzek, B. Lane, T. Ohshita, R. R. Upadhyay, L. L. Raja, J. J. Appl. Phy. 53 (2014) 03DB01. DOI |
7 | Y.-R. Zhang, X. Xu, A. Bogaerts, Y.-N. Wang, J. Phys. D: Appl. Phys. 45 (2012) 015203 (13pp). DOI ScienceOn |
8 | https://www.esi-group.com/software-services/virtual-environment/cfd-multiphysics/ace-suite/cfd-ace. |
9 | T. Ohba, T. Makabe, Appl. Phy. Lett. 96 (2010) 111501. DOI ScienceOn |