Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
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A Destruction Pattern Analysis of a Turbo-Molecular Pump According to the Foreline Clamp Damage in an ICP Dry Etcher for 300 mm Wafers

  • Jeong, Jinyong (Department of Plasma Convergence Engineering, Kunsan National University) ;
  • Lee, Intaek (Department of Material Science and Engineering, Kunsan National University) ;
  • Joo, Junghoon (Department of Plasma Convergence Engineering, Kunsan National University)
  • Received : 2015.03.25
  • Accepted : 2015.03.30
  • Published : 2015.03.30
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Abstract

We analyzed the destruction patterns of a turbo-molecular pump (TMP) resulting from its sudden exposure of a foreline to the atmospheric pressure due to a destruction of the foreline connecting clamp of an ICP dry etcher for 300 mm wafers during high-vacuum operation ($5{\times}10^{-6}$ Torr). Unlike in the case of view port's breakage, the TMP's rotor module was crashed inside the chamber. The primary damage resulted from the collision of the blades and stators, and the secondary damage resulted from the breaking of the rotor - driving shaft assembly. The fixing screws of the rotor and axial shaft were bent and broken when the TMP controller output the maximum current even after the crash event. Electrical power consumption analysis of the TMP power controller confirmed it. The stress distributions were analyzed by a finite element method using CFD-ACE+ multi physics software. Rotating inertia of each parts and kinetic energies were calculated as well. 68% of the rotational kinetic energy is deposited by the rotor - shaft module.

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References

  1. Kang, H, S., Han, J. S., Korean Soc. Mech. Eng. A, Proceedings of the spring academic conference, 113-114 (2012).
  2. Hablanian, M. H., Varian Vacuum Technologies, 82, 61-65 (2007).
  3. Wang, X, and Peng, Q., Trans Tech Publication, 82, 298-301 (2009).
  4. Boc Edowards Japan Ltd, Yongwei Shi, Yuji Takahashi, Vacuum pump PCT/JP2007/059846, May 14, 2007.
  5. Kang, H, S., Jeong, H, Y, Han, J. S., Korean Soc. Mech. Eng. A, Proceedings of the spring academic conference, 2117-2122 (2012).
  6. Bea, S. H., In S. R., Jeong, K. H., Lee, Y. B., and Shin, Y. H., Korea Economic Daily, 194-200 (2000).
  7. Kang, S, B., Shin, J, H., Korean Vac. Soc, 19, 249-255 (2010). https://doi.org/10.5757/JKVS.2010.19.4.249
  8. Won, B. R., Jung, H. Y. and Han, J. S., Korean Soc. Mech. Eng. A, 37, 1279-1289 (2013). https://doi.org/10.3795/KSME-A.2013.37.10.1279
  9. Hwang, Y. K., Heo, J, S. and Park, C. Y., Korean Journal of Air-Conditioning and Refrigeration Engineering, 2, 83-94 (2000).
  10. Lee, W. Y., Kook, J. K. and Koo, B, H., Journal of the Korean Society of Semiconductor Equipment Technology, 1, 41-45 (2002).

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